Heat and Mass Transport in HDP-CVD Chamber

2003 ◽  
Author(s):  
Hemant Mungekar ◽  
Bruno Geoffrion ◽  
Bikram Kapoor ◽  
Naren Dubey ◽  
Mak Salimian ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Mass Transfer ◽  
Aspect Ratio ◽  
State Of The Art ◽  
Memory Device ◽  
Device Fabrication ◽  
Shallow Trench Isolation ◽  
Heat And Mass Transport ◽  
Trench Isolation ◽  
Plasma Facing Materials

HDP-CVD reactors are used for Shallow Trench Isolation (STI), Inter Metal Dielectric (IMD) and Inter Layer Dielectric (ILD) applications for logic and memory device fabrication. As device dimension shrinks, the trend has been to use lower pressure and higher plasma density for gap-fill with higher aspect ratio (AR). Higher AR gapfill in addition to higher throughput is achieved by running multiple wafers between a chamber clean, present a unique set of challenges for heat and mass-transfer in an HDP-CVD reactor. This paper describes some of the new state-of-the-art hardware innovations specifically developed to meet these challenges. In particular, heat transfer to plasma facing materials, fluid mechanics, and transport of sub-micron sized particles in the plasma environment of an HDP-CVD reactor are explored.

scholarly journals Structural tailoring of hierarchical fibrous composite membranes to balance mass transfer and heat transfer for state-of-the-art desalination performance in membrane distillation

2019 ◽  
Vol 7 (5) ◽  
pp. 2376-2384 ◽  
Author(s):  
Xiaochan An ◽  
Guorong Xu ◽  
Baolei Xie ◽  
Yunxia Hu
Keyword(s):  
Heat Transfer ◽  
Mass Transfer ◽  
State Of The Art ◽  
Fibrous Composite ◽  
Composite Membranes ◽  
Membrane Distillation ◽  
Seawater Desalination ◽  
Wastewater Recycling

Membrane distillation (MD) displays superior characteristics to other technologies to alleviate the ever-increasing freshwater crisis through seawater desalination and/or wastewater recycling.

A Spin-on Dielectric Material for High Aspect Ratio Gap Fill

2005 ◽  
Vol 863 ◽  
Author(s):  
Wei Chen ◽  
Sheng Wang ◽  
Ather Ashraf ◽  
Edward Somerville ◽  
Gerard Nowaczyk ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Thermal Processing ◽  
Dielectric Material ◽  
Hydrogen Silsesquioxane ◽  
Shallow Trench Isolation ◽  
Nano Scale ◽  
Main Challenge ◽  
Trench Isolation ◽  
Wet Etch

AbstractThis communication describes the results of a potential spin-on glass (SOG) solution for narrow and high aspect ratio trench fill in both shallow trench isolation (STI) and premetal dielectric (PMD) applications. We have focused our development work on a hydrogen silsesquioxane (HSQ, (HSiO3/2)n) material, which offers the advantage of a carbon free gap fill solution. The main challenge for carbon-free SOG materials is to achieve material densification in the nano-scale gaps during thermal processing that of the gap filled material during the wet cleaning steps. This paper reports some approaches and findings on material densification in the nano-scale gaps and the results of subsequent wet etch tests.

Using Direct Simulation Monte Carlo With Improved Boundary Conditions for Heat and Mass Transfer in Microchannels

2010 ◽  
Vol 132 (4) ◽  
Author(s):  
J. Yang ◽  
J. J. Ye ◽  
J. Y. Zheng ◽  
I. Wong ◽  
C. K. Lam ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Mass Transfer ◽  
Heat Flux ◽  
Aspect Ratio ◽  
Heat And Mass Transfer ◽  
Wall Temperature ◽  
Gas Flow ◽  
Wall Heat Flux ◽  
Entrance Region ◽  
Mass Flowrate

Micro-electromechanical systems and nano-electromechanical systems have attracted a great deal of attention in recent years. The flow and heat transfer behaviors of micromachines for separation applications are usually different from that of macro counterparts. In this paper, heat and mass transfer characteristics of rarefied nitrogen gas flows in microchannels are investigated using direct simulation Monte Carlo with improved pressure boundary conditions. The influence of aspect ratio and wall temperature on mass flowrate and wall heat flux in microchannels are studied parametrically. In order to examine the aspect ratio effect on heat and mass transfer behaviors, the wall temperature is set constant at 350 K and the aspect ratio of the microchannel varies from 5 to 20. The results show that as the aspect ratio increases, the velocity of the flow decreases, so does the mass flowrate. In a small aspect ratio channel, the heat transfer occurs throughout the microchannel; as the aspect ratio of the microchannel increases, the region of thermal equilibrium extends. To investigate the effects of wall temperature (Tw) on the mass flowrate and wall heat flux in a microchannel, the temperature of the incoming gas flow (Tin) is set constant at 300 K and the wall temperature varies from 200 K to 800 K while the aspect ratio is remained unchanged. Results show that majority of the wall heat flux stays within the channel entrance region and drops to nearly zero at the halfway in the channel. When Tw<Tin, under the restriction of pressure-driven condition and continuity of pressure, the molecular number density of the flow decreases along the flow direction after a short increase at the entrance region. When Tw>Tin, the molecular number density of the flow drops rapidly near the inlet and the temperature of the gas flow increases along the channel. As Tw increases, the flow becomes more rarefied, the mass flowrate decreases, and the resistance at the entrance region increases. Furthermore, when Tw>Tin, a sudden jump of heat transfer flux and temperature are observed at the exit region of the channel.

Using Improved DSMC Method in Simulating for the Heat and Mass Transfer in Microchannels

2008 ◽  
Author(s):  
J. J. Ye ◽  
J. Yang ◽  
P. Tang ◽  
J. Y. Zheng ◽  
W. Z. Li ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Mass Transfer ◽  
Aspect Ratio ◽  
Heat And Mass Transfer ◽  
Wall Temperature ◽  
Gas Flow ◽  
Mechanical Systems ◽  
Dsmc Method ◽  
Micro Electro Mechanical Systems ◽  
Mass Flowrate

Micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) have become the focus of a great deal of attention in recent years. The flow and heat behaviors of micro-machines are usually different from that of macro-machines. In this paper, the heat and mass transfer characteristics of rarefied nitrogen gas flows in microchannels have been investigated using improved DSMC method. The influence of aspect ratio and wall temperature on the mass flowrate and wall heat flux in microchannels are studied parametrically. In order to examine the aspect ratio effect on heat and mass transfer, the wall temperature is set constant at 350 K, and the aspect ratio of the microchannel varies from 5 to 20. The results show that as the aspect ratio increases, the velocity of the flow decreases, and the mass flowrate also decreases. In a small aspect ratio channel, the heat transfer occurs throughout the microchannel, and as the aspect ratio of the microchannel increases, the region of thermal equilibrium becomes larger. To investigate the effects of wall temperature on heat and mass transfer, the aspect ratio of the microchannel is held constant at 10 and the wall temperature is changed from 300 K to 800 K. The results show that, when the wall temperature increases, the pressure increases slightly and the number density drops rapidly near the inlet. In addition, the Knudsen number increases as the wall temperature increases. It indicates that the increasing wall temperature of microchannel enhances the rarefaction of the gas flow. Moreover, as the wall temperature increases, the mass flowrate decreases, and the temperature will increase more rapidly near the inlet, with more heat transfer between the gas flow and the wall.

Improved Drying Technology of Single Wafer Tool by Using Hot IPA/DIW

2012 ◽  
Vol 195 ◽  
pp. 243-246 ◽  
Author(s):  
Chang Hyun Kim ◽  
Min Sang Yun ◽  
Tae Ho Hwang ◽  
Chang Hyeon Nam ◽  
Si Chul Kim ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Isopropyl Alcohol ◽  
Design Rule ◽  
Drying Method ◽  
Shallow Trench Isolation ◽  
Free Condition ◽  
Trench Isolation ◽  
Drying Technology

As the DRAM design rule has been smaller, the leaning normally occurred in storage pattern with high aspect ratio also appears in STI (shallow trench isolation) pattern of sub 4Xnm device. IPA (isopropyl alcohol) showing the excellent ability to replace DIW (de-ionized water) is necessary in order to meet the leaning free condition, because the spin drying method cannot satisfy with leaning free condition.

Augmented Heat Transfer for Angled Rib With Intersecting Rib in Rectangular Channels of Different Aspect Ratios

2014 ◽  
Author(s):  
Heeyoon Chung ◽  
Jun Su Park ◽  
Sehjin Park ◽  
Seok Min Choi ◽  
Hyung Hee Cho ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Mass Transfer ◽  
Aspect Ratio ◽  
Heat Mass Transfer ◽  
Transfer Performance ◽  
Aspect Ratios ◽  
Rectangular Channels ◽  
Naphthalene Sublimation ◽  
Sublimation Method ◽  
Channel Aspect Ratio

This study was an experimental investigation of the effect of an intersecting rib on heat/mass transfer performance in rectangular channels with angled ribs and different aspect ratios. In a rib-roughened channel with angled ribs, heat/mass transfer performance deteriorates as the channel aspect ratio increases, since the vortices induced by angled ribs diminish with increasing aspect ratio. A longitudinal rib that bisects the angled ribs is suggested to overcome this disadvantage. The heat transfer performance of angled rib configurations with a 60° attack angle were tested with and without an intersecting rib using naphthalene sublimation method. The channel aspect ratio is varied from 1 to 4. When the intersecting rib was present, additional vortices were generated at every point of intersection with the angled ribs. Thus the heat/mass transfer performance was significantly enhanced for all channel aspect ratios when an intersecting rib was added to an ordinary angled rib configuration.

Mass∕Heat Transfer in Rotating, Smooth, High-Aspect Ratio (4:1) Coolant Channels With Curved Walls

2009 ◽  
Vol 131 (2) ◽  
Author(s):  
Eashwar Sethuraman ◽  
Sumanta Acharya ◽  
Dimitris E. Nikitopoulos
Keyword(s):  
Heat Transfer ◽  
Mass Transfer ◽  
Aspect Ratio ◽  
Cross Sections ◽  
Positive Curvature ◽  
Transfer Data ◽  
Naphthalene Sublimation Technique ◽  
Smooth Channel ◽  
Naphthalene Sublimation ◽  
Curved Walls

The paper presents an experimental study of heat∕mass transfer coefficient in 4:1 aspect ratio smooth channels with nonuniform cross sections. Curved leading and trailing edges are studied for two curvatures of 9.06 m−1 (0.23 in.−1) and 15.11 m−1 (0.384 in.−1) and for two different curvature configurations. One configuration has curved walls with curvature corresponding to the blade profile (positive curvature on both leading and trailing walls) and the other configuration has leading and trailing walls that curve inward into the coolant passage (negative curvature on the leading surface and positive curvature on the trailing surface). A detailed study at Re=10,000 with rotation numbers in the range of 0–0.07 is undertaken for the two different curvature configurations. All experiments are done for a 90 deg passage orientation with respect to the plane of rotation. The experiments are conducted in a rotating two-pass coolant channel facility using the naphthalene sublimation technique. Only the radially outward flow is considered for the present study. The spanwise mass transfer distributions of fully developed regions of the channel walls are also presented. The mass transfer data from the curved wall channels are compared to those from a smooth 4:1 rectangular duct with similar flow parameters. The local mass transfer data are analyzed mainly for the fully developed region, and area-averaged results are presented to delineate the effect of the rotation number. Heat transfer enhancement especially in the leading wall is seen for the lower curvature channels, and there is a subsequent reduction in the higher curvature channel when compared to the 4:1 rectangular smooth channel. This indicates that an optimal channel wall curvature exists for which heat transfer is the highest.

A Novel Retaining Ring in Advanced Polishing Head Design for Significantly Improved CMP Performance

1999 ◽  
Vol 566 ◽  
Author(s):  
Thomas H. Osterheld ◽  
Steve Zuniga ◽  
Sidney Huey ◽  
Peter McKeever ◽  
Chad Garretson ◽  
...  
Keyword(s):  
Device Fabrication ◽  
Silicon On Insulator ◽  
Technological Advancement ◽  
Shallow Trench Isolation ◽  
Trench Isolation ◽  
Retaining Ring

This paper reports a technological advancement in developing and implementing a novel retaining ring of advanced edge performance (AEPTM ring) for an advanced polishing head design. The AEP ring has been successfully used for significantly improved CMP performance in different CMP applications: oxide (PMD and ILD), shallow trench isolation (STI), polysilicon, metal (W and Cu), silicon-on-insulator (SOI), and silicon CMP. Robust processes have been developed using AEP ring along with many hardware upgrades for each application with extended runs to meet requirements of advanced IC device fabrication.

Natural Convection Heat and Mass Transfer in the Vertical Cylindrical Porous Channel Under the Effects of Time-Periodic Boundary Condition

2019 ◽  
Vol 141 (12) ◽  
Author(s):  
Hayder I. Mohammed ◽  
Donald Giddings
Keyword(s):  
Heat Transfer ◽  
Mass Transfer ◽  
Boundary Condition ◽  
Porous Medium ◽  
Nusselt Number ◽  
Natural Convection ◽  
Rayleigh Number ◽  
Aspect Ratio ◽  
Heat And Mass Transfer ◽  
Vertical Wall

Abstract Heat and mass transfer are investigated numerically with steady-state laminar natural convection through a vertical cylindrical enclosure filled with a liquid-saturated porous medium. The vertical wall is under a constant magnetic field and various durations of periodic heating boundary condition; the top and bottom surfaces are kept at a constant cold temperature. Continuity, momentum, and energy equations are transformed to dimensionless equations. The finite difference approach with the line successive over-relaxation (LSOR) method is used to obtain the computational results. This study covers the heat transfer, the temperature distribution, and the velocity field in the domain under the variation of different parameters. The code used is validated by modifying it to analyze the Nusselt number in the existing experimental literature of Izadpanah et al. (1998, “Experimental and Theoretical Studies of Convective Heat Transfer in a Cylindrical Porous Medium,” Int. J. Heat Fluid Flow, 19(6), pp. 629–635). This work shows that Nusselt number decreases (with varying gradient) as the aspect ratio increases, and that it increases as the Rayleigh number increases. The centerline temperature has a proportional relationship with the heating amplitude and the heating period (as the system receives more heat) and is inversely proportional with Rayleigh number. Increasing the Rayleigh number causes increased convective velocity, which affects the position of the hot region, and causes a decrease in the temperature field. Increasing the aspect ratio results in a warm stream at the center of the cylinder, and when the time period of the heating increases, the circulation becomes faster and the intensity of the temperature contour layers decreases. In this work, a correlation for Nu as a function of the mentioned parameters is developed.

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