Robust Controller Design to Achieve Active Damping for a MEMS Microphone
Keyword(s):
This paper presented an H∞-controller design to achieve active damping for a MEMS microphone system. The parametric uncertainties introduced by linearization process were modeled. The stability and performance of the closed-loop system were analyzed for the uncertain microphone model and both were shown to be robust. The nonlinear simulation further verifies that the controller offers the desired performance.
2020 ◽
pp. 014233122097313
2014 ◽
Vol 573
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2017 ◽
Vol 40
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pp. 2901-2911
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2012 ◽
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pp. 626-631
2012 ◽
Vol 503-504
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2019 ◽
Vol 8
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pp. 293