Tunability and Sub- and Superharmonic Entrainment of Limit Cycles in CW Laser Driven MEMS
The nonlinear dynamics of nanoscale mechanical oscillators driven both inertially and by CW laser light are explored experimentally. The oscillators are singly and doubly-supported beams, 200 nm thick with lengths up to 40 microns. The optically thin beams, suspended over a Si substrate, form a Fabry-Pérot interferometer. The net effect is that the fractions of absorbed and reflected light are periodic functions of the gap. Thus, monitoring the reflected signal allows the motion to be measured. In addition, motion of the device through the interference field modulates the temperature and hence thermal stress of the oscillator. The thermal stress provides a thermo-mechanical drive to the beam, resulting in nonlinear feedback that can drive the beam into limit cycle oscillation. The laser power needed for the onset of limit cycles is studied as a function of beam geometry, and laser placement. The oscillators show both hardening and softening behaviors, sub- and superharmonic entrainment and wide frequency tunability.