Dynamic Study of MEMS Variable Capacitive Device for Power Harvesting

Author(s):  
Jianxiong Zhu ◽  
Z. C. Feng ◽  
Jie Lin ◽  
Nuh Sadi Yuksek ◽  
Mahmoud Almasri

This work shows the complicated dynamic responses of the MEMS parallel plate capacitor for power harvesting resulting from the onset of rocking instability. Rocking instability or symmetry breaking is a relatively new area of study as it pertains to plate instability. It is important because the instability decreases the total amount of power that can be harvested especially when the tips of the moving plate make contact with the fixed plate. Two different designs characterized by the number of variable capacitors are studied. Power harvesting is achieved by the motion of a moving plate under external forces of vibration. The dynamics of the moving plate under sinusoidal excitations are obtained using numerical integration. We show that capacitive plates can become non-parallel due to the onset of rocking instability. Complicated dynamic phenomena including period doubling and chaos can occur. Consequently, the harvested power is greatly reduced when rocking instability occurs.

2015 ◽  
Author(s):  
◽  
Jianxiong Zhu

Unwanted vibrations are all around us in our daily life. These vibrations can effectively be converted into electrical power through capacitive device. Even though the amount of power generated is small ([mu]W), it is still sufficient to drive certain devices, such as devices in the field of Micro Electro Mechanical System (MEMS). We call these functional devices "self-powered devices". This dissertation describes design, modeling, analysis, dynamic simulation and experimental testing of MEMS variable capacitors which are used for power harvesting based on external vibration. More specifically, it includes the electrostatic force and the forces provided by the stopper designed to prevent direct impact between capacitive plates. To more accurately reflect the status of power harvesting, rocking instability is discussed as well. However, the onset of rocking instability leads to more complicated dynamic phenomena. This dissertation not only introduces equation theory derivation and dynamic behaviors of the MEMS capacitive harvester, but also presents a comparison of power harvesting at broad frequencies and different amplitudes. These conclusions are helpful for the design of high efficiency "self-powered" MEMS capacitive power harvester.


2020 ◽  
Vol 8 (32) ◽  
pp. 16661-16668
Author(s):  
Huayao Tu ◽  
Shouzhi Wang ◽  
Hehe Jiang ◽  
Zhenyan Liang ◽  
Dong Shi ◽  
...  

The carbon fiber/metal oxide/metal oxynitride layer sandwich structure is constructed in the electrode to form a mini-plate capacitor. High dielectric constant metal oxides act as dielectric to increase their capacitance.


2012 ◽  
Vol 2012 ◽  
pp. 1-25 ◽  
Author(s):  
S. L. Han ◽  
Takeshi Kinoshita

The determination of an external force is a very important task for the purpose of control, monitoring, and analysis of damages on structural system. This paper studies a stochastic inverse method that can be used for determining external forces acting on a nonlinear vibrating system. For the purpose of estimation, a stochastic inverse function is formulated to link an unknown external force to an observable quantity. The external force is then estimated from measurements of dynamic responses through the formulated stochastic inverse model. The applicability of the proposed method was verified with numerical examples and laboratory tests concerning the wave-structure interaction problem. The results showed that the proposed method is reliable to estimate the external force acting on a nonlinear system.


2004 ◽  
Vol 42 (4) ◽  
pp. 250-250
Author(s):  
Wojciech Dindorf

Author(s):  
Z. C. Feng ◽  
Mahmoud Almasri

Designs of many micro devices take advantage of the symmetry for better performance, immunity to noise, and for simpler analysis. When a symmetric structure is subjected to symmetric forcing, the symmetric response can become unstable leading to asymmetric responses. The occurrence of symmetry breaking bifurcation leads to complicated dynamic responses which often result in less desirable performances. In this paper, we obtain analytical criteria for the onset of symmetry breaking bifurcations. We also conduct numerical simulations to demonstrate different types of asymmetric dynamic responses resulting from the symmetry breaking bifurcation. In particular, we show the occurrence of amplitude modulated motions in such systems.


2003 ◽  
Vol 785 ◽  
Author(s):  
C. Bielmeier ◽  
W. Walter

ABSTRACTThe development of lightweight low power consumption actuators is critical to the development of micro-robotics. Electroactive Polymers (EAP), i.e. Nafion N-117, meet these requirements. In the actuation of an EAP, the current does not remain constant over time. The development of a circuit model of current draw over time to best predict a current dynamic has been explored. While the material mimics a parallel plate capacitor, it has been found that capacitance plays no role in achieving steady state current levels. This development is critical to understanding and developing the material as an actuator.


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