Electrical Determination of Elastic Modulus of Individual PZT Nanofibers by In Situ SEM

2011 ◽  
Author(s):  
Xi Chen ◽  
Yong Shi
Keyword(s):  
Elastic Modulus ◽  
Resonant Frequency ◽  
Lead Zirconate Titanate ◽  
Electrical Measurement ◽  
Lead Zirconate ◽  
Electrospinning Process ◽  
Frequency Spectra ◽  
Oscillating Electric Field ◽  
The Individual

We present an electrical measurement of elastic modulus of single electrospun lead zirconate titanate (PZT) nanofibers under harmonic vibration using in situ scanning electron microscopy (SEM) equipped with a nanomanipulator. The PZT nanofiber was fabricated using an electrospinning process and collected on a silicon substrate with 10 μm trenches. The individual PZT nanofibers were excited with an oscillating electric field applied by a network analyzer and the resonant frequency was observed through the SEM along with the transfer frequency spectra simultaneously. The elastic modulus was calculated as ∼70 GPa from this resonant frequency using Euler-Bernoulli equation.

High Temperature Plasma Etching of PZT Capacitor Stacks for High Density FERAMs

2002 ◽  
Vol 748 ◽  
Author(s):  
Ulrich Egger ◽  
Kazuhiro Tomioka ◽  
George Stojakovic ◽  
Yasuyuku Taniguchi ◽  
Rainer Bruchhaus ◽  
...  
Keyword(s):  
High Temperature ◽  
Lead Zirconate Titanate ◽  
Ferroelectric Properties ◽  
Ruthenium Oxide ◽  
Lead Zirconate ◽  
Temperature Plasma ◽  
Etching Profile ◽  
End Point Detection ◽  
The Individual ◽  
Point Detection

ABSTRACTA 32 Mbit chain FeRAM™ stack with 0.20μm minimum feature size was etched with two subsequent lithography/RIE steps: in mask step 1 the platinum/SRO (strontium ruthenium oxide) top electrode and the PZT (lead zirconate titanate) layer, in mask step 2 the bottom electrode together with the Ir/IrO2 diffusion barrier were etched. The stack was etched with various chlorine based chemistries. High temperature etching processes were applied to suppress residues by the formation of volatile etching byproducts resulting in a highly anisotropic etching profile and low redeposition.Profile angles of 75° for step 1 and 80° for step 2 could be achieved. For the thin SRO-layer a separate etching recipe was developed to avoid surface roughening caused by micromasking. The influence of etching temperature and different gas chemistries on the etching behavior was evaluated. Reliable end point detection and good uniformity of the individual etching processes were obtained, both being crucial for the application of a multi-step recipe. The ferroelectric properties of the capacitor were confirmed by hysteresis measurements. This demonstrates that the ferroelectric properties were conserved during RIE etch processes at high temperature.

Temperature Characteristics of Magnetoelectric Effect in Bilayer Ferromagnetic-Piezoelectric Structures

2015 ◽  
Vol 233-234 ◽  
pp. 357-359 ◽  
Author(s):  
Dmitry Burdin ◽  
Dmitry Chashin ◽  
Nikolay Ekonomov ◽  
Yuri Fetisov
Keyword(s):  
Magnetic Field ◽  
Resonant Frequency ◽  
Temperature Dependence ◽  
Lead Zirconate Titanate ◽  
Magnetoelectric Effect ◽  
Lead Zirconate ◽  
Magnetic Field Sensors ◽  
Temperature Characteristics ◽  
Magnetoelectric Coefficient ◽  
Piezoelectric Structures

Temperature characteristics of resonant magnetoelectric effect in bilayer structures consisting of langatate, lead zirconate titanate, nickel, and amorphous ferromagnetic Metglas layers have been investigated. The measurements were performed in the temperature range of 150-400 K. The influence of the ferromagnetic and piezoelectric layer’s parameters on the temperature dependence of resonant frequency and magnetoelectric coefficient αE has been demonstrated. The results can be used to develop magnetoelectric magnetic field sensors.

Energy Harvesting From PZT Nanofibers

2007 ◽  
Vol 1034 ◽  
Author(s):  
Yong Shi ◽  
Yong Shi
Keyword(s):  
Energy Harvesting ◽  
Dynamic Loading ◽  
Lead Zirconate Titanate ◽  
Output Voltage ◽  
Mechanical Vibration ◽  
Titanium Substrate ◽  
Average Diameter ◽  
Lead Zirconate ◽  
Electrospinning Process ◽  
Vibration Source

AbstractIn this paper, we demonstrated that Lead Zirconate Titanate (PZT) nanofibers can be used to harvest energy from dynamic loading and mechanical vibration. PZT nanofibers were fabricated by electrospinning process. SEM image of PZT nanofibers has shown that the average diameter of these fibers is about 150nm, which can be tuned from 50nm to 200 nm by varying the composition and viscosity of the precursor for electrospining. Titanium substrate with ZrO2 layer was used to collect the PZT nanofibers for the demonstration of energy harvesting from dynamic loading. The largest output voltage is 170mV under 0.5% strain; the frequency of the output voltage is the same as that of the input loading. Silicon substrate with trenches was used to collect the nanofibers for energy harvesting from vibration. The output voltage generated from 150Hz sinusoid vibration source has peak voltages of 64.9mV and -95.9mV. These experimental results suggest that PZT nanofibers have great potentials for energy harvesting from environments and being used as nanogenerators. Further study is under the way to optimize the design and improve the efficiency.

In-situ X-ray studies of phase transformations in lead zirconate titanate thin films during annealing

1995 ◽  
Vol 268 (1-2) ◽  
pp. 102-107 ◽  
Author(s):  
P. Aungkavattana ◽  
B. Haartz ◽  
C.O. Ruud ◽  
S. Trolier-McKinstry
Keyword(s):  
Thin Films ◽  
Phase Transformations ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
X Ray ◽  
Zirconate Titanate

scholarly journals Enhanced Ferroelectric Functionality in Flexible Lead Zirconate Titanate Films with In Situ Substrate‐Clamping Compensation

2019 ◽  
Vol 5 (10) ◽  
pp. 1900428 ◽  
Author(s):  
Rachel Onn Winestook ◽  
Cecile Saguy ◽  
Chun‐Hao Ma ◽  
Ying‐Hao Chu ◽  
Yachin Ivry
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate

In Situ Measurements of Raman Spectra for PLZT Ceramics under Compressive Stresses

2016 ◽  
Vol 680 ◽  
pp. 25-29
Author(s):  
Li Ping Liang ◽  
Xuan Cheng ◽  
Ying Zhang
Keyword(s):  
Raman Spectra ◽  
Lead Zirconate Titanate ◽  
Scattered Light ◽  
Solid State Reaction Method ◽  
Lead Zirconate ◽  
Ceramic Specimen ◽  
Conventional Solid State Reaction ◽  
In Situ Raman ◽  
Compressive Stresses

A lanthanum doped lead zirconate titanate (PLZT) ceramic specimen was prepared by the conventional solid state reaction method. The crystal phase and morphology of the PLZT specimen were characterized by XRD and SEM techniques, with the hysteresis loop by RT6000HVS system. The compressive stress was applied to the PLZT specimen through the microtest mechanical loading device. In-situ Raman spectra focused on a fixed grain under various compressive stresses were recorded for different polarization directions of the scattered light. The effects of stresses on the Raman spectra and the intensity ratio between the E+B1 and E(2TO) modes are discussed.

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