scholarly journals Comprehensive Reduced-Order Models of Electrostatically Actuated MEMS Switches and Their Dynamics Including Impact and Bounce

2010 ◽  
Author(s):  
Michael G. Snow ◽  
Anil K. Bajaj
Keyword(s):  
Galerkin Method ◽  
Rarefied Gas ◽  
Dielectric Substrate ◽  
Contact Dynamics ◽  
Mode Shapes ◽  
Squeeze Film ◽  
Equilibrium Solutions ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Lift Off

As MEMS technology develops it is becoming better understood that MEMS designers must account for the large uncertainties characteristic of the relevant manufacturing processes. Uncertainty quantification tasks the designer with evaluating many different possible outcomes from the manufacturing process which creates a demand for models that are accurate and comprehensive, yet fast to evaluate. This work presents a comprehensive reduced-order model of electrostatically actuated switches incorporating a range of effects that are typically included only in FE modeling codes. Specifically, the model accounts for variable electrode geometry, stretching of centerline or large displacement effects, fringing field, squeeze film and rarefied gas damping, and allows for elastic contact with the dielectric substrate. Individual compact models for each of these effects are taken from literature and included in the model for the system. The dielectric substrate is modeled as an elastic foundation. The resulting partial differential equation for the switch modeled as a beam is discritized via a Galerkin method into ordinary differential equations for modal amplitudes. The Galerkin method uses the linear un-damped mode shapes of the beam to approximate the solution. Both cantilever and fixed-fixed type switches are analyzed. Static equilibrium solutions as a function of the applied voltage are developed along with their stability. Static pull-in voltages, first time of switch closure, and voltage for lift-off are studied with the model. To capture the contact dynamics, the contact condition is evaluated with the substrate divided into a large number of elements and the contact force is projected on to the beam basis functions. In the case of cantilever geometry and slow voltage variations, three stable regimes of contact configuration and hysteresis between them are demonstrated.

Voltage Response of Superharmonic Resonance of Electrostatically Actuated MEMS Resonators: Comparison Between Boundary Value Problem Model and Reduced Order Model

2018 ◽  
Author(s):  
Julio Beatriz ◽  
Martin Botello ◽  
Dumitru I. Caruntu
Keyword(s):  
Differential Equation ◽  
Partial Differential Equation ◽  
Boundary Value ◽  
Mode Shapes ◽  
Voltage Response ◽  
Order Model ◽  
Partial Differential ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Modes Of Vibration

This paper deals with the voltage response of electrostatically actuated NEMS resonators at superharmonic resonance. In this work a comparison between Boundary Value Problem (BVP) model, and Reduced Order Model (ROM) is conducted for this type of resonance. BVP model is developed from the partial differential equation by replacing the time derivatives with finite differences. So, the partial differential equation is replaced by a sequence of boundary value problems, one for each step in time. Matlab’s function bvp4c is used to numerically integrate the BVPs. ROMs are based on Galerkin procedure and use the mode shapes of the resonator as a basis of functions. Therefore, the partial differential equation is replaced by a system of differential equations in time. The number of the equations in the system is equal to the number of mode shapes (or modes of vibration) used in the ROM. One mode of vibration ROM is solved using the method of multiple scales. Two modes of vibration ROM is numerically integrated using Matlab’s function ode15s in order to obtain time responses, and a continuation and bifurcation analysis is conducted using AUTO 07P. The effects of different nonlinearities in the system on the voltage response are reported. This work shows that BVP model is a valid method to predict the voltage response of a micro/nano cantilevers.

scholarly journals The Influence of Higher-Order Mode Shapes for Reduced-Order Models of Electrostatically Actuated Microbeams

2010 ◽  
Vol 77 (4) ◽  
Author(s):  
Stefanie Gutschmidt
Keyword(s):  
System Modeling ◽  
Mode Shapes ◽  
Approximation Procedure ◽  
Reduced Order Models ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Advantages And Disadvantages ◽  
Electromechanical Actuation ◽  
Nano Electromechanical System ◽  
Nonlinear Continuum

Reduced-order models for micro-electromechanical structures possess several attractive features when compared with computational approaches using, e.g., finite-element packages. However, also within the business of reduced-order modeling, there are different approaches that yield different results. The efficiency of such approaches has to be judged according to, first, the purposes and aims of the model and, second, according to computational expenses and modeling efforts. This paper deals specifically with the frequently asked question of how many modes have to be considered in the discretization procedure to ensure an efficient reduced-order model. A consistent nonlinear continuum model is employed to describe a doubly clamped microbeam subject to two cases of electromechanical actuation. The analysis, confined to the static behavior, concentrates on two discretization techniques and addresses the differences between the final reduced-order models, accordingly. The results show significant differences with respect to the number of implemented linear-undamped mode shape functions, which are used as basis functions in the approximation procedure. This is demonstrated for the two mentioned distinct excitation schemes of the doubly clamped microbeam. The purposes of this paper are twofold. First, it draws attention to the differences between reduced-order models, which have been discretized one way or the other according to investigation goals and purposes. Second, it serves as a guideline for future micro- and nano-electromechanical system modeling by elaborating the advantages and disadvantages of both techniques.

Harmonic Balance Analysis of General Squeeze Film Damped Multidegree-of-Freedom Rotor Bearing Systems

1994 ◽  
Vol 116 (3) ◽  
pp. 499-507 ◽  
Author(s):  
E. J. Hahn ◽  
P. Y. P. Chen
Keyword(s):  
Harmonic Balance ◽  
Reference Frames ◽  
Squeeze Film ◽  
Equilibrium Solutions ◽  
Rotor Bearing ◽  
Balance Analysis ◽  
Force Components ◽  
Lift Off ◽  
Rotating Reference Frames ◽  
The Stability

Squeeze film dampers introduce nonlinear motion dependent damper forces into otherwise linear rotor bearing systems, thereby considerably complicating their analysis. Noncircular orbit type dampers, such as unsupported or uncentralized dampers, have generally necessitated transient solutions, which are computationally prohibitive for design studies of large order systems, particularly for systems with low damping. By utilizing harmonic balance with appropriate condensation, it is possible to considerably reduce the number of simultaneous nonlinear equations inherent to this approach. The stability (linear) of the equilibrium solutions may be conveniently evaluated using Floquet theory, particularly if the damper force components are evaluated in fixed, rather than rotating, reference frames. The versatility of this technique is illustrated on systems of increasing complexity with and without damper centralizing springs. Of particular interest, is its applicability to unsupported systems illustrating how such systems can lift off and, with further increase in speed, the damper forces can be linearized about the orbit center.

Modeling Squeeze-Film Damping of Electrostatically Actuated Microplates Undergoing Large Deflections

2005 ◽  
Author(s):  
Mohammad I. Younis ◽  
Ali H. Nayfeh
Keyword(s):  
Mode Shapes ◽  
Squeeze Film ◽  
Beam Equation ◽  
Large Deflections ◽  
Static Deflection ◽  
Quality Factors ◽  
Electrostatically Actuated ◽  
Squeeze Film Damping ◽  
Plate Equations ◽  
Analytical Expressions

A model for the dynamics of electrostatically actuated microplates undergoing large deflections under the effect of squeeze-film damping is presented. The model predicts the quality factors of microplates under a wide range of gas pressures and applied electrostatic forces up to the pull-in instability. The model utilizes the nonlinear Euler-Bernoulli beam equation, the von Ka´rma´n plate equations, and the compressible Reynolds equation. The static deflection of the microplate is calculated using the beam model. Analytical expressions are derived for the pressure distribution in terms of the plate mode shapes around the deflected position using perturbation techniques. The static deflection and the analytical expressions are substituted into the plate equations, which are solved using a finite-element method. Several results are presented showing the effect of the pressure and the electrostatic force on the structural mode shapes, the pressure distributions, the natural frequencies, and the quality factors.

Investigation of the Squeeze Film Dynamics Underneath a Microstructure With Large Oscillation Amplitudes and Inertia Effects

2016 ◽  
Vol 138 (3) ◽  
Author(s):  
Nadim A. Diab ◽  
Issam A. Lakkis
Keyword(s):  
Rarefied Gas ◽  
Direct Simulation Monte Carlo ◽  
Squeeze Film ◽  
Dsmc Method ◽  
Inertia Effects ◽  
Flow Parameters ◽  
Fluid Behavior ◽  
Dimensionless Groups ◽  
Simulation Monte Carlo ◽  
The Impact

This paper presents direct simulation Monte Carlo (DSMC) numerical investigation of the dynamic behavior of a gas film in a microbeam. The microbeam undergoes large amplitude harmonic motion between its equilibrium position and the fixed substrate underneath. Unlike previous work in literature, the beam undergoes large displacements throughout the film gap thickness and the behavior of the gas film along with its impact on the moving microstructure (force exerted by gas on the beam's front and back faces) is discussed. Since the gas film thickness is of the order of few microns (i.e., 0.01 < Kn < 1), the rarefied gas exists in the noncontinuum regime and, as such, the DSMC method is used to simulate the fluid behavior. The impact of the squeeze film on the beam is investigated over a range of frequencies and velocity amplitudes, corresponding to ranges of dimensionless flow parameters such as the Reynolds, Strouhal, and Mach numbers on the gas film behavior. Moreover, the behavior of compressibility pressure waves as a function of these dimensionless groups is discussed for different simulation case studies.

The Static and Dynamic Behavior of MEMS Arches Under Electrostatic Actuation

2009 ◽  
Author(s):  
Hassen M. Ouakad ◽  
Mohammad I. Younis ◽  
Fadi M. Alsaleem ◽  
Ronald Miles ◽  
Weili Cui
Keyword(s):  
Multiple Scales ◽  
Perturbation Technique ◽  
Dynamical Behavior ◽  
Primary Resonance ◽  
Reduced Order Model ◽  
Harmonic Load ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Model Equations

In this paper, we investigate theoretically and experimentally the static and dynamic behaviors of electrostatically actuated clamped-clamped micromachined arches when excited by a DC load superimposed to an AC harmonic load. A Galerkin based reduced-order model is used to discretize the distributed-parameter model of the considered shallow arch. The natural frequencies of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. For small DC and AC loads, a perturbation technique (the method of multiple scales) is also used. For large DC and AC, the reduced-order model equations are integrated numerically with time to get the arch dynamic response. The results show various nonlinear scenarios of transitions to snap-through and dynamic pull-in. The effect of rise is shown to have significant effect on the dynamical behavior of the MEMS arch. Experimental work is conducted to test polysilicon curved microbeam when excited by DC and AC loads. Experimental results on primary resonance and dynamic pull-in are shown and compared with the theoretical results.

Modal Reduced Order Model for Vision Sensing of IPMC Actuator

2006 ◽  
Vol 326-328 ◽  
pp. 1523-1526
Author(s):  
Il Kweon Oh ◽  
Seong Won Yeom ◽  
Dong Weon Lee
Keyword(s):  
Reduced Order Model ◽  
Mode Shapes ◽  
Computational Time ◽  
Transverse Displacement ◽  
Metal Composite ◽  
Motion Generation ◽  
Order Model ◽  
Lower Mode ◽  
Reduced Order ◽  
Vision Sensing

In order to control the IPMC (Ionic Polymer Metal Composite) actuators, it is necessary to use a vision sensing system and a reduced order model from the vision sensing data. In this study, the MROVS (Modal Reduced Order Vision Sensing) model using the least square method has been developed for implementation of the biomimetic motion generation. The simulated transverse displacement is approximated with a sum of the lower mode shapes of the cantilever beam. The NIPXI 1409 image acquisition board and CCD camera (XC-HR50) are used in the experimental setup. Present results show that the MROVS model can efficiently process the vision sensing of the biomimetic IPMC actuator with cost-effective computational time.

Reduced Order Model of MEMS Sensors Near Natural Frequency

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Jose C. Solis Silva
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Mass Detection ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator sensor for mass detection is investigated. The excitation is near the natural frequency. A first order fringe correction of the electrostatic force, viscous damping, and Casimir effect are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for uniform microresonators with mass deposition and without are reported.

Nonlinear Analysis of Rotor-Bearing Systems Using Component Mode Synthesis

1983 ◽  
Vol 105 (3) ◽  
pp. 606-614 ◽  
Author(s):  
H. D. Nelson ◽  
W. L. Meacham ◽  
D. P. Fleming ◽  
A. F. Kascak
Keyword(s):  
Forced Response ◽  
Component Mode Synthesis ◽  
Squeeze Film ◽  
System Response ◽  
Reduced Order ◽  
Squeeze Film Dampers ◽  
Rotor Bearing ◽  
System Equations ◽  
Transient System ◽  
Blade Loss

The method of component mode synthesis is developed to determine the forced response of nonlinear, multishaft, rotor-bearing systems. The formulation allows for simulation of system response due to blade loss, distributed unbalance, base shock, maneuver loads, and specified fixed frame forces. The motion of each rotating component of the system is described by superposing constraint modes associated with boundary coordinates and constrained precessional modes associated with internal coordinates. The precessional modes are truncated for each component and the reduced component equations are assembled with the nonlinear supports and interconnections to form a set of nonlinear system equations of reduced order. These equations are then numerically integrated to obtain the system response. A computer program, which is presently restricted to single shaft systems has been written and results are presented for transient system response associated with blade loss dynamics, with squeeze film dampers, and with interference rubs.

ROM of Superharmonic Resonance of Second Order of Electrostatically Actuated MEMS Resonators

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Second Order ◽  
Voltage Response ◽  
Order Model ◽  
Reduced Order ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Method Effects ◽  
Ground Plate

This paper deals with the voltage-amplitude response (or voltage response) of superharmonic resonance of second order of MEMS resonator sensors under electrostatic actuation. The system consists of a MEMS flexible cantilever above a parallel ground plate. The AC frequency of actuation is near one fourth the natural frequency. The voltage response of the superharmonic resonance of second order of the structure is investigated using the Reduced Order Model (ROM) method. Effects of voltage and damping voltage response are reported.

Sign in / Sign up

Export Citation Format

Share Document