MEMS Optical Force Sensor Enhancement Via Compliant Mechanism

2007 ◽  
Author(s):  
Gustavo A. Roman ◽  
Gloria J. Wiens
Keyword(s):  
Optical Sensors ◽  
Dynamic Range ◽  
Compliant Mechanism ◽  
Force Sensor ◽  
Optical Interferometry ◽  
Optical Force ◽  
Cell Manipulation ◽  
Design Parameters ◽  
Force Sensors ◽  
Rigid Body Model

Although there are capacitive surface micromachined force sensors with adequate resolution for cell manipulation and microneedle injections, it comes with the sacrifice of dynamic range and linearity. In contrast, optical based force sensors can provide the desired resolution and maintain relatively large sensing ranges compared to similar capacitive sensors. Plus, optical interferometry provides a sensing method that uncouples the conflicting design parameters, such as sensitivity and linearity. The current drawback to optical interferometry is the large off-chip equipment that is currently used in the operation of optical sensors. However, innovative techniques are being applied to surface micromachined microphones that allow off-chip components to be integrated onto the sensing chip. These same techniques can easily translate to the force sensor presented in this research, due to the similarities in the sensing methods. The thrust of this work is to explore a mechanism approach for enhancing the performance of a surface micromachined optical force sensor. A new design is presented which introduces a special mechanism, known as the Robert’s mechanism, as an alternate means in which the device is structurally supported. The new design’s implementation is achievable using an equivalent compliant mechanism. Initially, an analytical set of pseudo-rigid-body-model equations were developed to model the compliant design. A more accurate model was then constructed using FEA methods. The geometric parameters of the compliant Robert’s mechanism were then optimized to obtain a sensor with improved linearity and sensitivity. Overall, the force sensor provides higher sensitivity, larger dynamic range and higher linearity compared to a similar optical force sensor that uses a simple structural supporting scheme. In summary, this paper demonstrates the effectiveness of using a mechanism approach for enhancing the performance of MEMS sensors. The expected impact is to improve biomedical experiments and help further advance research that can improve quality of life.

Analysis of Bio-Inspired Structures for 3D Force Sensing Using Virtual Prototyping

2019 ◽  
Author(s):  
Ahmed M. Alotaibi ◽  
Sohel Anwar
Keyword(s):  
Physical Therapy ◽  
Structural Integrity ◽  
Force Sensor ◽  
Design Parameters ◽  
Force Sensors ◽  
Element Analysis ◽  
Sensor Performance ◽  
Development Cycle ◽  
Tissue Manipulation ◽  
Sensor Configuration

Abstract 3D force sensors have been proven its effectiveness and appropriateness for robotics applications. It has been used in medical and physical therapy applications such as surgical robot and Instrument Assisted Soft Tissue Manipulation (IASTM) in the recent times. The 3D force sensors have been utilized in robot assisted surgeries and modern physical therapy devices to monitor the 3D forces for improved performances. The 3D force sensor performance and specifications depend on different design parameters, such as structural configuration, sensing elements placements, and load criterion. In this paper, different bioinspired structure configurations have been investigated and analyzed to obtain the optimal 3D force sensor configuration in terms of structural integrity, compactness, safety factor, and strain sensitivity. Finite Element Analysis (FEA) simulation was used for the analysis to minimize the time of the development cycle.

Displacement Amplification Using a Compliant Mechanism for Vibration Energy Harvesting

2015 ◽  
Author(s):  
Moataz Elsisy ◽  
Yasser Anis ◽  
Mustafa Arafa ◽  
Chahinaz Saleh
Keyword(s):  
Energy Harvester ◽  
Compliant Mechanism ◽  
Mechanical Vibration ◽  
Element Model ◽  
Design Parameters ◽  
Vibration Energy ◽  
Vibration Energy Harvesting ◽  
Flexure Hinges ◽  
Rigid Body Model ◽  
The Right

In this paper, we introduce a symmetric five-bar compliant mechanism for the displacement amplification of mechanical vibration. When the proposed mechanism is connected to an energy harvester, input excitation vibrations to the mechanism are amplified, which leads to an increase in harvested power. The mechanism is composed of both rigid links and flexure hinges, which enable deflection. The flexure hinges we use are either of the right-circular, or the corner-filleted types. The mechanism is analyzed using a pseudo-rigid-body-model, where flexure hinges are substituted with rotational springs. We developed an analytical model of the displacement amplification, which was validated both experimentally and numerically using a finite element model. Our model reveals that the displacement amplification is a function in design parameters, such as the geometry of the mechanism, the flexure hinges stiffness, in addition to the load caused by the harvester. The effects of the flexure hinge dimensions on the flexure hinges stiffness, and thus on displacement amplification were investigated. Preliminary experiments indicate the success of our proposed mechanism in amplifying small excitation harmonic inputs and generation of power.

Design of a Linear Bistable Compliant Crank–Slider Mechanism

2016 ◽  
Vol 8 (5) ◽  
Author(s):  
Ahmad Alqasimi ◽  
Craig Lusk ◽  
Jairo Chimento
Keyword(s):  
Material Selection ◽  
Compliant Mechanism ◽  
Single Layer ◽  
Design Guidelines ◽  
Design Parameters ◽  
Cylindrical Shape ◽  
Postbuckling Behavior ◽  
Initial Shape ◽  
Rigid Body Model ◽  
Rectangular Area

This paper presents a new model for a linear bistable compliant mechanism and design guidelines for its use. The mechanism is based on the crank–slider mechanism. This model takes into account the first mode of buckling and postbuckling behavior of a compliant segment to describe the mechanism's bistable behavior. The kinetic and kinematic equations, derived from the pseudo-rigid-body model (PRBM), were solved numerically and are represented in plots. This representation allows the generation of step-by-step design guidelines. The design parameters consist of maximum desired deflection, material selection, safety factor, compliant segments' widths, maximum force required for actuator selection, and maximum footprint (i.e., the maximum rectangular area that the mechanism can fit inside of and move freely without interfering with other components). Because different applications may have different input requirements, this paper describes two different design approaches with different parameters subsets as inputs. The linear bistable compliant crank–slider mechanism (LBCCSM) can be used in the shape-morphing space-frame (SMSF) as potential application. The frame's initial shape is constructed from a single-layer grid of flexures, rigid links, and LBCCSMs. The grid is bent into the space-frame's initial cylindrical shape, which can morph because of the inclusion of LBCCSMs in its structure.

scholarly journals Surface-plasmon-coupled optical force sensors based on metal–insulator–metal metamaterials with movable air gap

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Taiyu Okatani ◽  
Shota Sekiguchi ◽  
Kazuhiro Hane ◽  
Yoshiaki Kanamori
Keyword(s):  
Surface Plasmon ◽  
Force Sensor ◽  
Air Gap ◽  
Optical Force ◽  
Force Sensors ◽  
Insulator Layer ◽  
Metal Insulator ◽  
Metal Insulator Metal ◽  
Fabry Perot ◽  
Metal Diaphragm

Abstract We proposed surface-plasmon-coupled optical force sensors based on metal–insulator–metal (MIM) metamaterials with a movable air gap as an insulator layer. The MIM metamaterial was composed of an air gap sandwiched by a metal nanodot array and a metal diaphragm, the resonant wavelength of which was red-shifted when the air gap was narrowed by applying a normal force. We designed and fabricated a prototype of the proposed sensor and confirmed that the MIM metamaterial could be used as a force sensor with larger sensitivity than a force sensor based on Fabry-Pérot interferometer (FPI).

Design of a Linear Bi-Stable Compliant Crank-Slider-Mechanism (LBCCSM)

2014 ◽  
Author(s):  
Ahmad Alqasimi ◽  
Craig Lusk ◽  
Jairo Chimento
Keyword(s):  
Material Selection ◽  
Compliant Mechanism ◽  
Design Guidelines ◽  
Design Parameters ◽  
Bistable Behavior ◽  
Body Model ◽  
Buckling Behavior ◽  
Rigid Body Model ◽  
Rectangular Area ◽  
Post Buckling

This paper presents a new model for a linear bistable compliant mechanism and design guidelines for its use. The mechanism is based on the crank-slider mechanism. This model takes into account the first mode of buckling and post-buckling behavior of a compliant segment to describe the mechanism’s bistable behavior. The kinetic and kinematic equations, derived from the Pseudo-Rigid-Body Model, were solved numerically and are represented in plots. This representation allows the generation of step-by-step design guidelines. The design parameters consist of maximum desired deflection, material selection, safety-factor, compliant segments’ widths, maximum force required for actuator selection and maximum footprint (i.e. the maximum rectangular area that the mechanism can fit inside of and move freely without interfering with other components). Because different applications may have different input requirements, this paper describes two different design approaches with different parameters subsets as inputs.

Design of a Single-Acting Constant-Force Actuator Based on Dielectric Elastomers

2008 ◽  
Author(s):  
Giovanni Berselli ◽  
Rocco Vertechy ◽  
Gabriele Vassura ◽  
Vincenzo Parenti Castelli
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Compliant Mechanism ◽  
Structural Parameters ◽  
Dielectric Elastomer ◽  
Constant Force ◽  
Element Analysis ◽  
Body Model ◽  
Rigid Body Model ◽  
Supporting Frame

The interest in actuators based on dielectric elastomer films as a promising technology in robotic and mechatronic applications is increasing. The overall actuator performances are influenced by the design of both the active film and the film supporting frame. This paper presents a single-acting actuator which is capable of supplying a constant force over a given range of motion. The actuator is obtained by coupling a rectangular film of silicone dielectric elastomer with a monolithic frame designed to suitably modify the force generated by the dielectric elastomer film. The frame is a fully compliant mechanism whose main structural parameters are calculated using a pseudo-rigid-body model and then verified by finite element analysis. Simulations show promising performance of the proposed actuator.

Exploiting the instability of eccentric tube robots for distal force control in minimally invasive cardiac ablation

2021 ◽  
pp. 095440622110075
Author(s):  
Hessa Alfalahi ◽  
Federico Renda ◽  
Conor Messer ◽  
Cesare Stefanini
Keyword(s):  
Minimally Invasive ◽  
Force Control ◽  
Motion Tracking ◽  
Heart Surgery ◽  
Compliant Mechanism ◽  
Heart Rhythm ◽  
Disease Recurrence ◽  
Optimal Level ◽  
Design Parameters ◽  
Cardiac Ablation

While the dilemma of motion tracking and force control in beating-heart surgery is previously addressed using active control architectures and rigid robotic actuators, this work leverages the highly controllable mechanical properties of concentric tube robots for intelligent, design-based force control in minimally invasive cardiac ablation. Briefly, cardiac ablation is the conventional procedure for treating arrhythmia patients, by which exposing the diseased cardiac tissue to Radio-Frequency (RF) energy restores the normal heart rhythm. Yet, the procedure suffers low success rate due to the inability of existing flexible catheters to maintain a consistent, optimal contact force between the tip electrode and the tissue, imposing the need for future repeat surgeries upon disease recurrence. The novelty of our work lies in the development of a statically-balanced compliant mechanism composed of (1) distal bi-stable concentric tubes and (2) a compliant, torsional spring mechanism that provides torque at tubes proximal extremity, resulting in an energy-free catheter with a zero-stiffness tip. This catheter is expected to maintain surgical efficacy and safety despite the chaotic displacement of the heart, by naturally keeping the tip force at an optimal level, not less and not more than the surgical requirement. The presented experimental results of the physical prototype, reflect the feasibility of the proposed design, as well as the robustness of the formulated catheter mathematical models which were uniquely deployed in the selection of the optimal design parameters.

scholarly journals Customizable Optical Force Sensor for Fast Prototyping and Cost-Effective Applications

Sensors ◽  
2018 ◽  
Vol 18 (2) ◽  
pp. 493 ◽  
Author(s):  
Jorge Díez ◽  
José Catalán ◽  
Andrea Blanco ◽  
José García-Perez ◽  
Francisco Badesa ◽  
...  
Keyword(s):  
Cost Effective ◽  
Force Sensor ◽  
Optical Force ◽  
Fast Prototyping

A Simple and Accurate Method for Determining Large Deflections in Compliant Mechanisms Subjected to End Forces and Moments

1998 ◽  
Vol 120 (3) ◽  
pp. 392-400 ◽  
Author(s):  
A. Saxena ◽  
S. N. Kramer
Keyword(s):  
Rigid Body ◽  
Compliant Mechanisms ◽  
Compliant Mechanism ◽  
Elliptic Integral ◽  
Beam Equation ◽  
Large Deflections ◽  
Euler Beam ◽  
Body Model ◽  
Rigid Body Model ◽  
Analysis And Synthesis

Compliant members in flexible link mechanisms undergo large deflections when subjected to external loads. Because of this fact, traditional methods of deflection analysis do not apply. Since the nonlinearities introduced by these large deflections make the system comprising such members difficult to solve, parametric deflection approximations are deemed helpful in the analysis and synthesis of compliant mechanisms. This is accomplished by representing the compliant mechanism as a pseudo-rigid-body model. A wealth of analysis and synthesis techniques available for rigid-body mechanisms thus become amenable to the design of compliant mechanisms. In this paper, a pseudo-rigid-body model is developed and solved for the tip deflection of flexible beams for combined end loads. A numerical integration technique using quadrature formulae has been employed to solve the large deflection Bernoulli-Euler beam equation for the tip deflection. Implementation of this scheme is simpler than the elliptic integral formulation and provides very accurate results. An example for the synthesis of a compliant mechanism using the proposed model is also presented.

Research on PVDF Micro-Force Sensor

2014 ◽  
Vol 599-601 ◽  
pp. 1135-1138
Author(s):  
Chao Zhe Ma ◽  
Jin Song Du ◽  
Yi Yang Liu
Keyword(s):  
Power Dissipation ◽  
Polyvinylidene Fluoride ◽  
High Sensitivity ◽  
Force Sensor ◽  
Calibration Method ◽  
Pvdf Film ◽  
Force Sensors ◽  
Low Power Dissipation ◽  
Micro Force Sensor ◽  
Processing Circuit

At present, sub-micro-Newton (sub-μN) micro-force in micro-assembly and micro-manipulation is not able to be measured reliably. The piezoelectric micro-force sensors offer a lot of advantages for MEMS applications such as low power dissipation, high sensitivity, and easily integrated with piezoelectric micro-actuators. In spite of many advantages above, the research efforts are relatively limited compared to piezoresistive micro-force sensors. In this paper, Sensitive component is polyvinylidene fluoride (PVDF) and the research object is micro-force sensor based on PVDF film. Moreover, the model of micro-force and sensor’s output voltage is built up, signal processing circuit is designed, and a novel calibration method of micro-force sensor is designed to reliably measure force in the range of sub-μN. The experimental results show the PVDF sensor is designed in this paper with sub-μN resolution.

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