Control Algorithm for Nanoscale Positioning of a 6DOF Stewart Platform
A 6DOF Stewart platform driven by piezoelectric actuators was designed for applications in need of nanoscale positioning. By using flexural joints and an error compensation model based on a minimum-points-3-axes measurement method, the manufacturing and assembly errors can be offset. The design of a feedforward controller that is able to reduce the nonlinear hysteresis effect of the piezoelectric actuator is the focus of this article. A dynamic Preisach model is developed to improve the accuracy of hysteresis model, whose inverse model is used as the feedforward controller. Such a control scheme is cost-effective without employing expensive sensors for feedback control. Experimental data shows that the platform can achieve the objective of nanoscale positioning.