Simultaneous On-Chip Sensing and Actuation Using the Thermomechanical In-Plane Microactuator

2007 ◽  
Author(s):  
Tyler Waterfall ◽  
Kendall Teichert ◽  
Brian Jensen
Keyword(s):  
Experimental Evidence ◽  
Microelectromechanical Systems ◽  
Biological Cell ◽  
Integrated Sensor ◽  
Sensor Actuator ◽  
Thermal Actuators ◽  
Cell Handling ◽  
One To One ◽  
Measured Displacement ◽  
On Chip

Many applications in microelectromechanical systems require physical actuation for implementation or operation. On-chip sensors would allow control of these actuators. This paper presents experimental evidence showing that a certain class of thermal actuators can be used simultaneously as an actuator and a sensor to control the actuator’s force or displacement output. By measuring the current and voltage supplied to the actuator, a one-to-one correspondence is found between a given voltage and current and a measured displacement or force. This truly integrated sensor/actuator combination will lead to efficient, on-chip control of motion for applications including microsurgery, biological cell handling, and optic positioning.

Closed-loop feedback control of microfluidic cell manipulation via deep-learning integrated sensor networks

Lab on a Chip ◽  
2021 ◽  
Author(s):  
Ningquan Wang ◽  
Ruxiu Liu ◽  
Norh Asmare ◽  
Chia-Heng Chu ◽  
Ozgun Civelekoglu ◽  
...  
Keyword(s):  
Deep Learning ◽  
Sensor Networks ◽  
Feedback Control ◽  
Closed Loop ◽  
Microfluidic System ◽  
Cell Manipulation ◽  
Integrated Sensor ◽  
Loop Feedback ◽  
Closed Loop Feedback ◽  
On Chip

An adaptive microfluidic system changing its operational state in real-time based on cell measurements through an on-chip electrical sensor network.

Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

2021 ◽  
pp. 105678952110339
Author(s):  
Jiaxing Cheng ◽  
Zhaoxia Li
Keyword(s):  
Damage Mechanics ◽  
Microelectromechanical Systems ◽  
Mechanical Performance ◽  
Damage Model ◽  
Irreversible Damage ◽  
Damage Behavior ◽  
Thermal Actuators ◽  
Long Term Performance ◽  
Term Performance

Effective numerical analysis is significant for the optimal design and reliability evaluation of MEMS, but the complexity of multi-physical field couplings and irreversible damage accumulation in long-term performance make the analysis difficult. In the present paper, the continuum damage mechanics method is used to develop a creep damage model and conduct long-term performance analysis for MEMS thermal actuators with coupled thermo-mechanical damage behavior. The developed damage model can make a connection between the material deterioration due to microstructure changes and the macroscopic responses (the change of thermo-mechanical performance or structure failure). The numerical simulations of coupled thermo-mechanical behavior in long-term performance are implemented using the finite element method, which is validated through comparison with previous literature. The numerical results demonstrate that the proposed damage model and numerical method can provide effective assessment in the long-term performance of MEMS thermal actuators.

scholarly journals Identificador de falhas para motor de indução trifásico baseado em support vector machine implementado em cloud.

2020 ◽  
Author(s):  
Jacyeude De Morais Passos Araújo Segundo ◽  
Carlos Vinicius Alves Coimbra ◽  
Mauro Sergio Silva Pinto ◽  
Leonardo Ramos Rodrigues
Keyword(s):  
Support Vector Machine ◽  
Microelectromechanical Systems ◽  
System On Chip ◽  
Support Vector ◽  
On Chip

Ao passo que a Indústria 4.0 avança, conjuntos de ações de automação e controle vem sendo implementados. Dentro deste contexto o sensoriamento de motores de indução trifásicos vem se tornando remoto e conectado à internet. A manutenção preventiva pode então utilizar esse grande volume de dados para aumentar sua capacidade de detecção de falhas em relação aos métodos clássicos de classificação. Este trabalho propõe o desenvolvimento de um identificador de diferentes condições, entre normalidade, desbalanceamento no rotor, alimentação por duas fases e desníveis na base de um motor trifásico de indução W22 IR3, com base em dados de análises vibracionais e de correntes elétricas. Utilizando um sistema para aquisição de dados que consiste em um acelerômetro MEMS (Microelectromechanical Systems) e um transformador de corrente não invasivo SCT-013, controlados por um SoC (System on Chip). A análise dos dados foi realizada na IBM Cloud através de Watson Studio e SPSS Modeler para aplicação de um modelo estatístico Support Vectot Machine (SVM) que foi treinado e testado usando diferentes funções kernel. Observou-se que a oferta da escolha das funções kernel condicionam os dados a diferentes performances de processamento. A utilização dos algoritmos de classificação SVM, provou ser bastante robusto e eficiente. Mostrando que a capacidade de generalização do classificador foi garantida.

An Electrochemically Actuated Micro Dosing System With Improved Dosing Control

1999 ◽  
Author(s):  
Sebastian Böhm ◽  
Wouter Olthuis ◽  
Piet Bergveld
Keyword(s):  
Driving Force ◽  
Gas Bubbles ◽  
Back Reaction ◽  
Integrated Sensor ◽  
Bubble Generation ◽  
Sensor Actuator ◽  
The Past ◽  
Electrolyte Mixture ◽  
Measured Impedance ◽  
Oxygen Gas

Abstract In this contribution a micromachined electrochemically-actuated micro dosing system is presented, which accurately can manipulate fluids in microsystems in the nanoliter range. The driving force to actively dispense liquids is provided by the electrochemical generation of gas bubbles (hydrogen and oxygen) by the electrolysis of an electrolyte. As these bubbles expand, they indirectly drive liquid out of a liquid filled reservoir, which is in hydraulic contact with the electrolyte in the bubble reservoir. The dosing system consists basically of a micromachined channel/reservoir structure in silicon, realized by dry reactive ion etching (DRIE). On top of this silicon fluidic board, a Pyrex® cover is bonded on which a set of electrodes is structured. These electrodes are applied for the generation of gas bubbles and at the same time, to measure the impedance of the gas/electrolyte mixture that is formed after bubble generation. It will be shown that this measured impedance reflects the gas bubble fraction in the bubble reservoir and that this parameter can be applied in determining the dosed amount of fluid. Besides the integrated sensor/actuator electrodes, measures have been taken to reduce the catalytic back reaction from the hydrogen oxygen gas mixture to water, as have been observed in the past.

scholarly journals Optically read Coriolis vibratory gyroscope based on a silicon tuning fork

2019 ◽  
Vol 5 (1) ◽  
Author(s):  
N. V. Lavrik ◽  
P. G. Datskos
Keyword(s):  
Tuning Fork ◽  
Microelectromechanical Systems ◽  
Ambient Pressure ◽  
Electrical Contacts ◽  
Wafer Level ◽  
Vibratory Gyroscopes ◽  
Equivalent Rate ◽  
Additional Processing ◽  
On Chip ◽  
Optical Lever

Abstract In this work, we describe the design, fabrication, and characterization of purely mechanical miniature resonating structures that exhibit gyroscopic performance comparable to that of more complex microelectromechanical systems. Compared to previous implementations of Coriolis vibratory gyroscopes, the present approach has the key advantage of using excitation and probing that do not require any on-chip electronics or electrical contacts near the resonating structure. More specifically, our design relies on differential optical readout, each channel of which is similar to the “optical lever” readout used in atomic force microscopy. The piezoelectrically actuated stage provides highly efficient excitation of millimeter-scale tuning fork structures that were fabricated using widely available high-throughput wafer-level silicon processing. In our experiments, reproducible responses to rotational rates as low as 1.8 × 103° h−1 were demonstrated using a benchtop prototype without any additional processing of the raw signal. The noise-equivalent rate, ΩNER, derived from the Allan deviation plot, was found to be <0.5° h−1 for a time of 103 s. Despite the relatively low Q factors (<104) of the tuning fork structures operating under ambient pressure and temperature conditions, the measured performance was not limited by thermomechanical noise. In fact, the performance demonstrated in this proof-of-principle study is approximately four orders of magnitude away from the fundamental limit.

scholarly journals DMD-based hyperspectral microscopy with flexible multiline parallel scanning

2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Xue Dong ◽  
Geng Tong ◽  
Xuankun Song ◽  
Xingchen Xiao ◽  
Yiting Yu
Keyword(s):  
Microelectromechanical Systems ◽  
Detection Efficiency ◽  
Rapid Development ◽  
Operating Conditions ◽  
Scanning Time ◽  
Transmission Imaging ◽  
Data Volume ◽  
Line Scanning ◽  
On Chip ◽  
Time Decrease

AbstractAs one of the most common hyperspectral microscopy (HSM) techniques, line-scanning HSM is currently utilized in many fields. However, its scanning efficiency is still considered to be inadequate since many biological and chemical processes occur too rapidly to be captured. Accordingly, in this work, a digital micromirror device (DMD) based on microelectromechanical systems (MEMS) is utilized to demonstrate a flexible multiline scanning HSM system. To the best of our knowledge, this is the first line-scanning HSM system in which the number of scanning lines N can be tuned by simply changing the DMD’s parallel scanning units according to diverse applications. This brilliant strategy of effortless adjustability relies only on on-chip scanning methods and totally exploits the benefits of parallelization, aiming to achieve nearly an N-time improvement in the detection efficiency and an N-time decrease in the scanning time and data volume compared with the single-line method under the same operating conditions. To validate this, we selected a few samples of different spectral wavebands to perform reflection imaging, transmission imaging, and fluorescence imaging with varying numbers of scanning lines. The results show the great potential of our DMD-based HSM system for the rapid development of cellular biology, material analysis, and so on. In addition, its on-chip scanning process eliminates the inherent microscopic architecture, making the whole system compact, lightweight, portable, and not subject to site constraints.

scholarly journals 4D Printing Strain Self‐Sensing and Temperature Self‐Sensing Integrated Sensor–Actuator with Bioinspired Gradient Gaps

2020 ◽  
Vol 7 (13) ◽  
pp. 2000584
Author(s):  
Daobing Chen ◽  
Qingping Liu ◽  
Zhiwu Han ◽  
Junqiu Zhang ◽  
HongLie Song ◽  
...  
Keyword(s):  
4D Printing ◽  
Integrated Sensor ◽  
Sensor Actuator
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