Dynamic Analysis of MEMS Resonators Under Primary-Resonance Excitation
Keyword(s):
We present a dynamic analysis and simulation of electrically actuated microelectromechanical systems (MEMS) resonators under primary-resonance excitation. We use a shooting technique, perturbation techniques, and long-time integration of the equation of motion to investigate the global dynamics of the resonators. We study the dynamic pull-in instability and show various scenarios and mechanisms for its occurrence. Our results show that dynamic pull-in can occur through a saddle-node bifurcation, a period-doubling bifurcation, or homoclinic tangling, depending on factors such as the initial conditions of the device and the level of the electrostatic force.
2014 ◽
Vol 2014
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pp. 1-13
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2017 ◽
Vol 389
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pp. 438-453
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2006 ◽
Vol 462
(2075)
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pp. 3435-3464
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