Fabrication of Carbon Nanotube Gas Sensor Using Step-Wise Dielectrophoretic Deposition Onto Interdigitated Pyrolyzed Carbon Electrodes
Keyword(s):
Abstract Carbon nanotubes (CNTs) have been implemented in the creation of many micro- and nano-devices due to their physical properties such as large volume-to-surface area as well as their high thermal and electrical conductivity. The paper describes a novel dielectrophoretic step-wise deposition of CNTs (that alternates deposition of CNTs and drying steps) between the interdigitated fingers of carbon electrodes. Multiphysics simulation illustrates the physics of CNT alignment along the electrical field lines that forms a basis for dielectrophoretic deposition of CNTs. This fabrication methodology resulted in the creation of a proof-of-concept nitrogen gas sensor.
2017 ◽
Vol 90
◽
pp. 467-484
◽
2007 ◽
Vol 554
◽
pp. 123-128
◽
2008 ◽
Vol 112
(15)
◽
pp. 6119-6125
◽
Keyword(s):
2012 ◽
Vol 32
(6-7)
◽
pp. 407-413
◽