Numerical Investigation of Effect of Operating Parameters on the Phase Transformation During Vibration-Assisted Nano-Impact Machining of Silicon by Loose Abrasives

2020 ◽  
Vol 8 (1) ◽  
Author(s):  
Nick H. Duong ◽  
Jianfeng Ma ◽  
Muhammad P. Jahan ◽  
Shuting Lei ◽  
Vamshi Krishna Kore ◽  
...  

Abstract Vibration-assisted nano-impact machining by loose abrasives (VANILA) is a newly developed process based on the atomic force microscope (AFM) platform, where the nanoabrasive (diamond particles) slurry is injected between the workpiece and the vibrating AFM probe. This study aims to use the commercial finite element method (FEM) software package abaqus to simulate the phase transformation experienced by the silicon workpiece and to study the effects of VANILA process parameters, such as impact speed, impact angle, and coefficient of friction between the nanoabrasive and silicon workpiece, on the volume of phase transformation of silicon. Among these three parameters, impact speed is found to have the most dominating effect on the phase transformation process, followed by impact angle and friction coefficient. It is found that the volumes for Si-VII, Si-VIII, and Si-X phases increase with the increase of impact speed from 100 m/s to 200 m/s. The phase volumes of Si-VII and Si-VIII are found to decrease slightly with the increase of friction coefficient from 0.05 to 0.5. The phase volumes for Si-VII, Si-VIII, and Si-X are found to increase with the increase of impact angles from 20 deg to 90 deg. Finally, the multiple linear regression modeling using a design of experiments is carried out to study the relationship among the three parameters and the volume of different phases of silicon.

Author(s):  
Nick H. Duong ◽  
J. Ma ◽  
Muhammad P. Jahan ◽  
Shuting Lei ◽  
Murali Sundaram

In this paper, a numerical study of a nanomachining process, Vibration Assisted Nano Impact machining by Loose Abrasives (VANILA), has been conducted. In the VANILA process, an atomic force microscope (AFM) is used as a platform and the nano abrasives (diamond particles) are injected in slurry between the silicon workpiece and the vibrating AFM probe. The vibration of the AFM probe generates kinetic energy for the abrasives to impact the silicon workpiece and result in nanoscale material removal. In addition, silicon usually experiences phase transformation when subject to high pressure at nano-scale. The commercial Finite Element Method (FEM) software package Abaqus is employed to simulate the phase transformation experienced by the silicon workpiece in this VANILA process under different machining parameters such as impact speed, impact angle and coefficient of friction between the nano-abrasive and silicon workpiece. It is found that the machining parameters (impact speed, impact angle, and coefficient of friction) have substantial influence on the phase transformation of silicon workpiece in the nanomachining VANILA. Phase volumes for Si-VII, Si-VIII, and Si-X increase as the impact speed increases from 100 m/s to 200 m/s. Phase volume of Si-X increases as the friction coefficient increases. For Si-VII and Si-VIII, the phase volumes decrease as friction coefficient increases from 0.05, 0.3 and 0.5. In addition, the phase volumes for Si-VII, Si-VIII, and Si-X usually increase as the impact angles increases from 20° to 90°. However, for impact speed of 150 m/s and frictional coefficient of 0.05, the Si-VII phase volume increases first as impact angle increases from 20° to 70° and then decreases as the impact angle increases from 70° to 90°.


2018 ◽  
Author(s):  
Nick H. Duong ◽  
J. Ma ◽  
Shuting Lei

In this paper, the commercial FEM software package Abaqus is employed to model a novel nanomachining process, in which an atomic force microscope (AFM) is used as a platform and the nano abrasives injected in slurry between the workpiece and the vibrating AFM probe impact the workpiece and result in nanoscale material removal. Diamond particles are used as loose abrasives. The ductile material model is used to describe the behavior of the silicon workpiece. The effects of impact speed, impact angle, and the frictional coefficient between the workpiece and abrasives on material removal mechanism are investigated. It is found that the impact speed, impact angle, and frictional coefficient between the silicon workpiece and nanoabrasives have big influence on material removal volume in this novel nanomachining process.


2017 ◽  
Author(s):  
Nick H. Duong ◽  
J. Ma ◽  
Shuting Lei

In this paper, the commercial FEM software package Abaqus is employed to model the novel nanomachining process, Vibration Assisted Nano Impact machining by Loose Abrasives (VANILA), which combines the principles of vibration-assisted abrasive machining and tip-based nanomachining to conduct nano abrasive machining of hard and brittle materials. In this novel nanomachining process, an atomic force microscope (AFM) is used as a platform and the nano abrasives injected in slurry between the workpiece and the vibrating AFM probe impact the workpiece and result in nanoscale material removal. Diamond particles are used as the loose abrasives. The effects of impact speed, angle of impacts, and the frictional coefficient between the workpiece and abrasives are investigated using Abaqus. It is found that the impact speed, impact angle, and frictional coefficient between the silicon workpiece and nanoabrasives have big influence on the nanocavity’s size and depth.


2011 ◽  
Vol 88-89 ◽  
pp. 34-37
Author(s):  
Kuai Ji Cai

The relationship of the friction coefficient and the MTC were discussed, and the MTC and its effects on surface roughness were a theoretical analysised and experimental verification by AFM (atomic force microscope). The results show that the theoretical MTC tends to be minimal value then before the adhering effect to reach remarkable. Appropriate adjustments cutting parameters, the cutting process can always micro-cutting phase to reach the steady-thin chip, and no plowing phenomenon. So the surface residues highly were reduced and higher surface quality was achieved.


2015 ◽  
Vol 723 ◽  
pp. 763-768
Author(s):  
Mei Dong ◽  
Mei Li ◽  
Yan Zhang

The effect of tip materials on the friction properties of silicon substrate was investigated by using atomic force microcopy (AFM). The roughness of the silicon wafer surface was characterized with silicon tip at tapping mode, and then the relationship between the friction force and normal force was obtained by silicon tip and silicon nitride tip at contact mode. The experimental results show that when the load exceeds a critical value, the friction coefficient with silicon tip increases from 0.17 to 0.37, which is due to the wear of the silicon tip; the friction coefficient with a hard silicon nitride tip increases from 0.25 to 0.5, which can only be attributed to the plastic deformation of silicon substrate. And the roughness of the silicon substrate can lead to an incomplete contact, which can influence the real contact area between the silicon nitride tip and silicon substrate.


2014 ◽  
Vol 2014 ◽  
pp. 1-8
Author(s):  
S. Shasthri ◽  
V. Kausalyah ◽  
Qasim H. Shah ◽  
Kassim A. Abdullah ◽  
Moumen M. Idres ◽  
...  

The effects of bullet vehicle crash impact angle, child restraint system design, and restraint harness slack at side impact speed of 32.2 km/h (20 mph) on moments sustained at the neck by a three-year-old child are investigated. Mathematical models are built using the response surface method based on simulation results whereby good fitness is achieved. The singular and cross interactive effect of each predictor on the neck moment are analyzed. The number of significant parameters affecting the neck moment is shown to be the largest for wide impact angles (ϕ≥60°) and the impact angle parameter is largely revealed to be the most sensitive. An ideal safe range for low neck moment has been established to be within ϕ angles 45° and 65°. It is further shown that the nature of all parameters effect on the neck moment is highly dependent on the impact angle range.


2009 ◽  
Vol 131 (3) ◽  
Author(s):  
Abouel-Kasem ◽  
M. A. Al-Bukhaiti ◽  
K. M. Emara ◽  
S. M. Ahmed

In the present work, the topographical images of slurry erosion surfaces at different impact angles were quantified using fractal analysis. The study showed that the variation of fractal value of slope of linearized power spectral density with the impact angle is largely similar to the relationship between the erosion rate and the impact angle. Both the fractal value and erosion rate were maximum at 45 deg and 90 deg for ductile and brittle materials, respectively. It was found also that the variation of fractal values versus the impact angle has a general trend that does not depend on magnification factor. The fractal features to the eroded surfaces along different directions showed high directionality at oblique impact angle and were symmetrical at normal impact.


2001 ◽  
Vol 393 (1-2) ◽  
pp. 319-324 ◽  
Author(s):  
Toyonari Yaji ◽  
Kaname Yoshida ◽  
Seiji Isoda ◽  
Takashi Kobayashi ◽  
Naoki Sato ◽  
...  

Micromachines ◽  
2021 ◽  
Vol 12 (4) ◽  
pp. 410
Author(s):  
Dan Liu ◽  
Xiaoming Liu ◽  
Pengyun Li ◽  
Xiaoqing Tang ◽  
Masaru Kojima ◽  
...  

In recent years, micromanipulators have provided the ability to interact with micro-objects in industrial and biomedical fields. However, traditional manipulators still encounter challenges in gaining the force feedback at the micro-scale. In this paper, we present a micronewton force-controlled two-finger microhand with a soft magnetic end-effector for stable grasping. In this system, a homemade electromagnet was used as the driving device to execute micro-objects manipulation. There were two soft end-effectors with diameters of 300 μm. One was a fixed end-effector that was only made of hydrogel, and the other one was a magnetic end-effector that contained a uniform mixture of polydimethylsiloxane (PDMS) and paramagnetic particles. The magnetic force on the soft magnetic end-effector was calibrated using an atomic force microscopy (AFM) probe. The performance tests demonstrated that the magnetically driven soft microhand had a grasping range of 0–260 μm, which allowed a clamping force with a resolution of 0.48 μN. The stable grasping capability of the magnetically driven soft microhand was validated by grasping different sized microbeads, transport under different velocities, and assembly of microbeads. The proposed system enables force-controlled manipulation, and we believe it has great potential in biological and industrial micromanipulation.


Materials ◽  
2021 ◽  
Vol 14 (11) ◽  
pp. 2767
Author(s):  
Ki-Won Jeong ◽  
Jung-Suk Han ◽  
Gi-Uk Yang ◽  
Dae-Joon Kim

Yttria-stabilized zirconia (3Y-TZP) containing 0.25% Al2O3, which is resistant to low temperature degradation (LTD), was aged for 10 h at 130–220 °C in air. The aged specimens were subsequently indented at loads ranging from 9.8 to 490 N using a Vickers indenter. The influence of preaging temperature on the biaxial strength of the specimens was investigated to elucidate the relationship between the extent of LTD and the strength of zirconia restorations that underwent LTD. The indented strength of the specimens increased as the preaging temperature was increased higher than 160 °C, which was accompanied by extensive t-ZrO2 (t) to m-ZrO2 (m) and c-ZrO2 (c) to r-ZrO2 (r) phase transformations. The influence of preaging temperature on the indented strength was rationalized by the residual stresses raised by the t→m transformation and the reversal of tensile residual stress on the aged specimen surface due to the indentation. The results suggested that the longevity of restorations would not be deteriorated if the aged restorations retain compressive residual stress on the surface, which corresponds to the extent of t→m phase transformation less than 52% in ambient environment.


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