A Renewal Weakest-Link Model of Strength Distribution of Polycrystalline Silicon MEMS Structures

2019 ◽  
Vol 86 (8) ◽  
Author(s):  
Zhifeng Xu ◽  
Roberto Ballarini ◽  
Jia-Liang Le
Keyword(s):  
Experimental Data ◽  
Polycrystalline Silicon ◽  
Microelectromechanical Systems ◽  
Strength Distribution ◽  
Material Strength ◽  
Mems Devices ◽  
Efficient Computation ◽  
Weakest Link ◽  
Large Size ◽  
The Stability

Experimental data have made it abundantly clear that the strength of polycrystalline silicon (poly-Si) microelectromechanical systems (MEMS) structures exhibits significant variability, which arises from the random distribution of the size and shape of sidewall defects created by the manufacturing process. Test data also indicated that the strength statistics of MEMS structures depends strongly on the structure size. Understanding the size effect on the strength distribution is of paramount importance if experimental data obtained using specimens of one size are to be used with confidence to predict the strength statistics of MEMS devices of other sizes. In this paper, we present a renewal weakest-link statistical model for the failure strength of poly-Si MEMS structures. The model takes into account the detailed statistical information of randomly distributed sidewall defects, including their geometry and spacing, in addition to the local random material strength. The large-size asymptotic behavior of the model is derived based on the stability postulate. Through the comparison with the measured strength distributions of MEMS specimens of different sizes, we show that the model is capable of capturing the size dependence of strength distribution. Based on the properties of simulated random stress field and random number of sidewall defects, a simplified method is developed for efficient computation of strength distribution of MEMS structures.

scholarly journals Strength Reliability of Micro Polycrystalline Silicon Structure

2007 ◽  
Vol 345-346 ◽  
pp. 777-780
Author(s):  
Shigeru Hamada ◽  
Kenji Hashizume
Keyword(s):  
Polycrystalline Silicon ◽  
Microelectromechanical Systems ◽  
Bending Strength ◽  
Chemical Vapor ◽  
Material Strength ◽  
Mems Devices ◽  
Bending Tests ◽  
Average Value ◽  
Micron Size ◽  
Mechanical Movement

In order to evaluate strength reliability of micron size polycrystalline silicon (poly-Si) structure, bending tests of cantilever beam and Weibull analysis are performed. Recently, the importance of microelectromechanical systems (MEMS) in society is increasing, and the number of production is also increasing. The MEMS devices, which contain mechanical movement, have to maintain their reliability in face of external shock, thermal stress and residual stress from manufacturing processes. In greeting the mass production era of the MEMS, in case the material strength design of MEMS is performed, required strength data is not average value but the variation, especially minimum value of the material. Micron size poly-Si structure is widely employed in the MEMS such as microsensor, switching device and so on. Then, in order to evaluate strength reliability of micron size poly-Si structure, tests and analysis are performed. The specimen is made by chemical vapor deposition (CVD) process and thickness is 3.5, 6.4 and 8.3 micrometer and the specimen has notch. The test specimen used for the test changed characteristics of (1) film thickness (2) stress concentration, and investigation about the influence each effects of the variation in a bending strength are discussed.

scholarly journals Thermal Conductivity Measurements on Polysilicon Microbridges Using the 3-Omega Technique

2008 ◽  
Author(s):  
Patrick E. Hopkins ◽  
Leslie M. Phinney
Keyword(s):  
Thermal Conductivity ◽  
Thermal Properties ◽  
Polycrystalline Silicon ◽  
Microelectromechanical Systems ◽  
Boundary Resistance ◽  
Mems Devices ◽  
Conductivity Measurements ◽  
3 Omega ◽  
3Ω Technique

The thermal properties of microelectromechanical systems (MEMS) devices are governed by the structure and composition of the constituent materials as well as the geometrical design. With the continued reduction of the characteristic sizes of these devices, experimental determination of the thermal properties becomes more difficult. In this study, the thermal conductivity of polycrystalline silicon (polysilicon) microbridges are measured with the transient 3ω technique and compared to measurements on the same structures using a steady state joule heating technique. The microbridges with lengths from 200 microns to 500 microns were designed and fabricated using the Sandia National Laboratories SUMMiT™ V surface micromachining process. The differences between the two measurements, which arise from the geometry of the test structures, are explained by bond pad heating and thermal boundary resistance effects.

Stability of Ring-Type MEMS Gyroscopes Subjected to Stochastic Angular Speed Fluctuation

2017 ◽  
Vol 139 (4) ◽  
Author(s):  
Samuel F. Asokanthan ◽  
Soroush Arghavan ◽  
Mohamed Bognash
Keyword(s):  
Angular Velocity ◽  
Degrees Of Freedom ◽  
Microelectromechanical Systems ◽  
Damping Ratio ◽  
Operating Conditions ◽  
System Stability ◽  
System Response ◽  
Ring Type ◽  
Mems Gyroscopes ◽  
The Stability

Effect of stochastic fluctuations in angular velocity on the stability of two degrees-of-freedom ring-type microelectromechanical systems (MEMS) gyroscopes is investigated. The governing stochastic differential equations (SDEs) are discretized using the higher-order Milstein scheme in order to numerically predict the system response assuming the fluctuations to be white noise. Simulations via Euler scheme as well as a measure of largest Lyapunov exponents (LLEs) are employed for validation purposes due to lack of similar analytical or experimental data. The response of the gyroscope under different noise fluctuation magnitudes has been computed to ascertain the stability behavior of the system. External noise that affect the gyroscope dynamic behavior typically results from environment factors and the nature of the system operation can be exerted on the system at any frequency range depending on the source. Hence, a parametric study is performed to assess the noise intensity stability threshold for a number of damping ratio values. The stability investigation predicts the form of threshold fluctuation intensity dependence on damping ratio. Under typical gyroscope operating conditions, nominal input angular velocity magnitude and mass mismatch appear to have minimal influence on system stability.

scholarly journals Effects of Maximal Sodium and Potassium Conductance on the Stability of Hodgkin-Huxley Model

2014 ◽  
Vol 2014 ◽  
pp. 1-9 ◽  
Author(s):  
Yue Zhang ◽  
Kuanquan Wang ◽  
Yongfeng Yuan ◽  
Dong Sui ◽  
Henggui Zhang
Keyword(s):  
Experimental Data ◽  
Mathematical Method ◽  
Bifurcation Point ◽  
Potassium Conductance ◽  
Maximal Conductance ◽  
Computing Model ◽  
The World ◽  
Stability And Bifurcations ◽  
The Stability ◽  
Sodium And Potassium

Hodgkin-Huxley (HH) equation is the first cell computing model in the world and pioneered the use of model to study electrophysiological problems. The model consists of four differential equations which are based on the experimental data of ion channels. Maximal conductance is an important characteristic of different channels. In this study, mathematical method is used to investigate the importance of maximal sodium conductanceg-Naand maximal potassium conductanceg-K. Applying stability theory, and takingg-Naandg-Kas variables, we analyze the stability and bifurcations of the model. Bifurcations are found when the variables change, and bifurcation points and boundary are also calculated. There is only one bifurcation point wheng-Nais the variable, while there are two points wheng-Kis variable. The (g-Na,  g-K) plane is partitioned into two regions and the upper bifurcation boundary is similar to a line when bothg-Naandg-Kare variables. Numerical simulations illustrate the validity of the analysis. The results obtained could be helpful in studying relevant diseases caused by maximal conductance anomaly.

Measurement of Angular Acceleration of a Rigid Body Using Linear Accelerometers

1975 ◽  
Vol 42 (3) ◽  
pp. 552-556 ◽  
Author(s):  
A. J. Padgaonkar ◽  
K. W. Krieger ◽  
A. I. King
Keyword(s):  
Experimental Data ◽  
Rigid Body ◽  
Simple Procedure ◽  
Three Dimensional ◽  
Angular Acceleration ◽  
Theory And Practice ◽  
Body Segments ◽  
Impact Biomechanics ◽  
The Stability ◽  
Definition Of

The computation of angular acceleration of a rigid body from measured linear accelerations is a simple procedure, based on well-known kinematic principles. It can be shown that, in theory, a minimum of six linear accelerometers are required for a complete definition of the kinematics of a rigid body. However, recent attempts in impact biomechanics to determine general three-dimensional motion of body segments were unsuccessful when only six accelerometers were used. This paper demonstrates the cause for this inconsistency between theory and practice and specifies the conditions under which the method fails. In addition, an alternate method based on a special nine-accelerometer configuration is proposed. The stability and superiority of this approach are shown by the use of hypothetical as well as experimental data.

scholarly journals On the Trigonometric Descriptions of Colors

2016 ◽  
Vol 8 (3) ◽  
pp. 5
Author(s):  
Jirí Stavek
Keyword(s):  
Experimental Data ◽  
Transverse Energy ◽  
Gravitational Constant ◽  
Isaac Newton ◽  
Type Ia ◽  
New Interpretation ◽  
The Stability ◽  
Mass Evaporation ◽  
Supernovae Type Ia ◽  
Insight Into

<p class="1Body">An attempt is presented for the description of the spectral colors using the standard trigonometric tools in order to extract more information about photons. We have arranged the spectral colors on an arc of the circle with the radius R = 1 and the central angle θ = π/3 when we have defined cos (θ) = λ<sub>380</sub>/λ<sub>760</sub> = 0.5. Several trigonometric operations were applied in order to find the gravity centers for the scotopic, photopic, and mesopic visions. The concept of the center of gravity of colors introduced Isaac Newton. We have postulated properties of the long-lived photons with the new interpretation of the Hubble (Zwicky-Nernst) constant H<sub>0</sub> = 2.748… * 10<sup>-18</sup> kg kg<sup>-1 </sup>s<sup>-1</sup>, the specific mass evaporation rate (SMER) of gravitons from the source mass. The stability of international prototypes of kilogram has been regularly checked. We predict that those standard kilograms due to the evaporation of gravitons lost 8.67 μg kg<sup>-1</sup> century<sup>-1</sup>. The energy of long-lived photons was trigonometrically decomposed into three parts that could be experimentally tested: longitudinal energy, transverse energy and energy of evaporated gravitons. We tested the properties of the long-lived photons with the experimental data published for the best available standard candles: supernovae Type Ia. There was found a surprising match of those experimental data with the model of the long-lived photons. Finally, we have proposed a possible decomposition of the big G (Newtonian gravitational constant) and the small kappa κ (Einsteinian gravitational constant) in order to get a new insight into the mysterious gravitational force and/or the curvature concept.</p>

Three Approaches for Managing Stiffness in Origami-Inspired Mechanisms

2018 ◽  
Author(s):  
Alden Yellowhorse ◽  
Larry L. Howell
Keyword(s):  
Experimental Data ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Engineering Applications ◽  
Element Analysis ◽  
Advantages And Disadvantages ◽  
Large Size ◽  
Selection For

Ensuring that deployable mechanisms are sufficiently rigid is a major challenge due to their large size relative to their mass. This paper examines three basic types of stiffener that can be applied to light, origami-inspired structures to manage their stiffness. These stiffeners are modeled analytically to enable prediction and optimization of their behavior. The results obtained from this analysis are compared to results from a finite-element analysis and experimental data. After verifying these models, the advantages and disadvantages of each stiffener type are considered. This comparison will facilitate stiffener selection for future engineering applications.

Experimental Study of Typical Graded Asphalt Mixture about Dynamic Stability at High Temperature

2016 ◽  
Vol 858 ◽  
pp. 300-304
Author(s):  
Zhen Fu Chen ◽  
Dan Wu ◽  
Qiu Wang Tao ◽  
Yuan Chu Gan
Keyword(s):  
Experimental Data ◽  
Experimental Study ◽  
High Temperature ◽  
Asphalt Mixture ◽  
Temperature Stability ◽  
Specimen Thickness ◽  
High Temperature Stability ◽  
Change Trend ◽  
Comparison And Analysis ◽  
The Stability

The high temperature stability of AC-16, AC-13, AC-20 under specimen thickness of 5cm and 6cm is studied through indoor asphalt mixture high rutting test, Through comparison and analysis about experimental data, it is found that the stability of AC-16, AC-13, AC-20 asphalt mixture at high- temperature decreases in turn. It is shown that thickness changes did not affect the change trend of the high temperature stability under gradation change, and the stability of AC-16 at high-temperature is the best, the AC-13 is second and the AC-20 is less.

scholarly journals Dispersion stability and rheological characteristics of water and ethylene glycol based zinc oxide nanofluids

2020 ◽  
pp. 187-187
Author(s):  
Adnan Qamar ◽  
Attique Arshad ◽  
Zahid Anwar ◽  
Rabia Shaukat ◽  
Muhammad Amjad ◽  
...  
Keyword(s):  
Experimental Data ◽  
Ethylene Glycol ◽  
Industrial Applications ◽  
Deionized Water ◽  
Rheological Characteristics ◽  
Particle Loading ◽  
Viscosity Models ◽  
Vis Spectroscopy ◽  
Settling Speed ◽  
The Stability

With advancement of nanoscience, ?nanofluids? are becoming quite popular among thermal engineers. High thermal conductivity, relatively less settling speed, and higher surface area of nanoparticles are a few key promoting properties. The last two decades have seen dramatic progress towards using nanoparticles in industrial applications. However, the stability and rheological characteristics of prepared nanofluids have serious effects on their transport characteristics, but unfortunately, this has not found proper attention from researchers. In this study, stability and rheological characteristics of ZnO nanoparticles within deionized water, ethylene glycol, and their blends have been extensively tested. Stability was observed using UV-vis spectroscopy, while the viscosity was measured with the help of a rheometer. The data was collected with 0.011-0.044 wt. % loading of nanoparticles, while experiments were conducted within 15-55oC temperature range. Better stability was recorded when nanofluids were prepared with pure ethylene glycol. Experiments showed that the viscosity increased with particle loading, whereas the effect of surfactants appeared to be insignificant. Research results were used to assess predictions of different viscosity models. Experimental data was overpredicted by Einstein, Brinkman, and Batchelor?s models.

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