A Review of Feedforward Control Approaches in Nanopositioning for High-Speed SPM

Author(s):  
Garrett M. Clayton ◽  
Szuchi Tien ◽  
Kam K. Leang ◽  
Qingze Zou ◽  
Santosh Devasia

Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs.

1996 ◽  
Vol 118 (2) ◽  
pp. 178-187 ◽  
Author(s):  
E. D. Tung ◽  
M. Tomizuka ◽  
Y. Urushisaki

Experiments are performed for end milling aluminum at 15,000 RPM spindle speed (1,508 m/min cutting speed) and up to 3 m/min table feedrate using an experimental machine tool control system. A digital feedforward controller for feed drive control incorporates the Zero Phase Error Tracking Controller (ZPETC) and feedforward friction compensation. The controller achieves near-perfect (±3 μm) tracking over a 26 mm trajectory with a maximum speed of 2 m/min. The maximum contouring error for a 26 mm diameter circle at this speed is less than 4 μm. Tracking and contouring experiments are conducted for table feedrates as high as 10 m/min. Frequency domain analysis demonstrates that the feedforward controller achieves a bandwidth of 10 Hz without phase distortion. In a direct comparison of accuracy, the machining errors in specimens produced by the experimental controller were up to 20 times smaller than the errors in specimens machined by an industrial CNC.


2004 ◽  
Vol 126 (3) ◽  
pp. 547-557 ◽  
Author(s):  
Syh-Shiuh Yeh ◽  
Pau-Lo Hsu

For motion systems with multiple axes, the approach of matched direct current gains has been generally adopted to improve contouring accuracy under low-speed operations. To achieve high-speed and high-precision motion in modern manufacturing, a perfectly matched feedback control (PMFBC) design for multiaxis motion systems is proposed in this paper. By applying stable pole-zero cancellation and including complementary zeros for uncancelled zeros for all axes, matched dynamic responses across the whole frequency range for all axes are achieved. Thus, contouring accuracy for multiaxis systems is guaranteed for the basic feedback loops. In real applications, the modeling error is unavoidable and the degradation and limitations of the model-based PMFBC exist. Therefore, a newly designed digital disturbance observer is proposed to be included in the proposed PMFBC structure for each axis to compensate for undesirable nonlinearity and disturbances to maintain the matched dynamics among all axes for the PMFBC design. Furthermore, the feedforward control loops zero phase error tracking controller are employed to reduce tracking errors. Experimental results on a three-axis CNC machining center indicate that both contouring accuracy and tracking accuracy are achieved by applying the present PMFBC design.


Author(s):  
Masayoshi Tomizuka ◽  
Liting Sun

Abstract Zero phase error tracking (ZPET) control has gained popularity as a simple yet effective feedforward control method for tracking time varying desired trajectories by the plant output. In this paper, we will show that the zero-order hold equivalent of continuous time transfer function, i.e. pulse transfer function, naturally has a property to realize zero phase effort tracking. This property is exploited to realize a simple implementation of zero phase error tracking control. The effectiveness of the proposed approach is demonstrated by simulations.


Author(s):  
G. V. Kulikov ◽  
A. A. Lelyukh

Quadrature amplitude modulation (QAM) is used for high-speed information transmission in many radio systems and, in particular, in DVB-S and DVB-S2/S2X digital satellite television systems. A receiver included as a part of the transmitting equipment of such systems has a block for the formation of quadrature oscillations used as a reference for signal demodulation. Due to hardware instabilities, amplitude and phase errors may occur, which leads to quadratures imbalance. These inaccuracies cause additional errors in the received signal demodulation. This can significantly degrade the noise immunity of the reception. The paper investigates the influence of amplitude and phase errors in the formation of quadrature oscillations (imbalance of quadratures) on the noise immunity of coherent reception of QAM signals. Using the methods of statistical radio engineering the parameters of the distributions of processes in the receiver are obtained, and the probability of a bit error is estimated. The dependences of the bit error probability on the amplitude unbalance factor, on the phase error of quadrature formation and on signal-to-noise ratio are obtained. It is shown that the amplitude imbalance of the quadratures leads to a significant decrease in the noise immunity of QAM signals reception  at M ≥  16. The acceptable amplitude deviation in this case can be considered to be equal to 5%. At M= 4, the amplitude imbalance in a wide range of values practically does not affect the noise immunity. The phase imbalance of  quadratures  markedly affects the noise immunity of coherent reception of QAM signals. The permissible phase error is no more than 0.05 rad (3 degrees). As the signals positionality increases, this influence also increases.


1993 ◽  
Vol 115 (3) ◽  
pp. 348-356 ◽  
Author(s):  
E. D. Tung ◽  
M. Tomizuka

Several methodologies are proposed for identifying the dynamics of a machine tool feed drive system in the low frequency region. An accurate identification is necessary for the design of a feedforward tracking controller, which achieves unity gain and zero phase shift for the overall system in the relevant frequency band. In machine tools and other mechanical systems, the spectrum of the reference trajectory is composed of low frequency signals. Standard least squares fits are shown to heavily penalize high frequency misfit. Linear models described by the output-error (OE) and Autoregressive Moving Average with eXogenous Input (ARMAX) models display better closeness-of-fit properties at low frequency. Based on the identification, a feedforward compensator is designed using the Zero Phase Error Tracking Controller (ZPETC). The feedforward compensator is experimentally shown to achieve near-perfect tracking and contouring of high-speed trajectories on a machining center X-Y bed.


1987 ◽  
Vol 109 (2) ◽  
pp. 176-179 ◽  
Author(s):  
M. Tomizuka ◽  
M. S. Chen ◽  
S. Renn ◽  
T. C. Tsao

This paper presents the design and implementation of a digital controller for a lathe to machine workpieces with noncircular cross sections. Noncircular cutting is accomplished by controlling the radial tool position in the direction normal to the surface of workpiece. A discrete time model for the tool carriage in the radial direction is obtained by a least squares method applied to input and output data. The model is used for designing digital feedback and feedforward controllers. The zero phase error tracking control algorithm is applied as a feedforward control law for positioning of the tool along desired time varying signals. The effectiveness of the proposed controller is demonstrated by experiment and simulation.


2004 ◽  
Vol 43 (7B) ◽  
pp. 4811-4815 ◽  
Author(s):  
Daiichi Koide ◽  
Hitoshi Yanagisawa ◽  
Haruki Tokumaru ◽  
Shoichi Nakamura ◽  
Kiyoshi Ohishi ◽  
...  

1991 ◽  
Vol 113 (1) ◽  
pp. 67-74 ◽  
Author(s):  
J. Butler ◽  
B. Haack ◽  
M. Tomizuka

A method for generating two-dimensional reference trajectories to be followed by a linear second-order system under feedforward/feedback control is proposed. A differential equation is derived which assigns tracking velocity and tangential tracking acceleration as functions of time in such a way to allow high speed motion through an arbitrary smooth curve while guaranteeing the absence of actuator saturation. A method for using preview information for motion along curves with corners is also presented. The results are verified by simulation of a two axis cartesian positioning system under discrete time zero phase error tracking control.


Author(s):  
Xuewei Li ◽  
Jun Zhang ◽  
Wanhua Zhao ◽  
Bingheng Lu

Contour error due to the dynamic characteristics of feed system has a great influence on machining accuracy, in high-speed machining. In this paper, a new path precompensation method is proposed using zero phase error tracking control algorithm to improve the contouring accuracy for multiaxis machining with large feed rates. In this method, the outputs are predicted with the identified position-loop models of feed systems, and a contour error calculator is designed to calculate contour error in each sample instance using the predicted output and reference input. In order to compensate the contour error resulting from the dynamic tracking error of feed systems, the contour error vector is decomposed orthogonally and the compensation components for individual axis are calculated using zero phase error tracking control algorithm. Simulations showed that contour errors can be significantly improved with small compensation using the new path precompensation method for linear, circular, and parabola contours. Experimental results showed that the new method can reduce contour error significantly and achieve a better compensation compared with zero phase error tracking control and cross-coupled path pre-compensation.


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