High-Speed Scanning of Piezo-Probes for Nano-fabrication
1998 ◽
Vol 120
(3)
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pp. 617-622
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Keyword(s):
Low scanning speed of piezo-probes has been a fundamental limitation of scanning probe based nano-fabrication techniques. Typical scan-rates achieved are limited, by structural vibrations of the piezo-probe, to about 1/10th the fundamental vibrational frequency of the piezo-probe. Faster scanning of piezo-probes is achieved here (experimental results are presented) by using inversion of the piezo-dynamics—this approach uses a feedforward input voltage, applied to piezo-probe, to compensate for piezo vibrations.
2007 ◽
Vol 340-341
◽
pp. 283-288
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Keyword(s):
1996 ◽
Vol 61
(6)
◽
pp. 856-867
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Keyword(s):
2011 ◽
Vol 130-134
◽
pp. 2245-2248
Keyword(s):
Keyword(s):
2011 ◽
Vol 47
(10)
◽
pp. 4469-4472
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Keyword(s):
2009 ◽
Vol 69-70
◽
pp. 379-383
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