Characterization of Elastoplastic Properties Based on Inverse Analysis and Finite Element Modeling of Two Separate Indenters

2006 ◽  
Vol 129 (4) ◽  
pp. 603-608 ◽  
Author(s):  
Chaiwut Gamonpilas ◽  
Esteban P. Busso

A method that can determine uniquely the elastoplastic properties from indentation loading and unloading curves has been developed. It is based on finite element modeling and inverse analysis of two separate indenters. The approach was validated by numerical experiments using a fictitious material. It was demonstrated that the proposed method can uniquely recover the elastoplastic properties using only indentation load-displacement curves of two indenters. Although the proposed procedure has been used to predict elastoplastic strain hardening behavior, it is also applicable to estimate other mechanical properties where there are more than two unknown parameters, such as rate-dependent behavior.

2004 ◽  
Vol 127 (3) ◽  
pp. 276-285 ◽  
Author(s):  
J. M. J. den Toonder ◽  
Y. Ramone ◽  
A. R. van Dijken ◽  
J. G. J. Beijer ◽  
G. Q. Zhang

SiLK is a polymer material developed for use as a thin-film dielectric in the interconnect structure of high-density integrated circuits. Among others, its thermomechanical properties play a dominant role for the integrity and reliability of the interconnect during processing, testing, and use. Being a polymer, SiLK may show viscoelastic (time-dependent) behavior. In this paper, we use nanoindentation techniques in combination with analytical and finite element modeling (FEM) to determine the viscoelastic properties of a thin SiLK film on a silicon substrate. Indentation-creep experiments show that this SiLK film indeed responds in a viscoelastic way. This may be caused by the non fully cross-linked test samples prepared using nonstandard processing. Using the FEM simulation, we find that the behavior of this thin SiLK film can be described with a linear viscoelastic model up to the characteristic stress and strain levels of approximately 200MPa and 3%, respectively. For higher stress and strain levels, the response becomes nonlinear. The results are validated with independent indentation load-unload measurements.


1992 ◽  
Vol 32 (16) ◽  
pp. 1086-1096 ◽  
Author(s):  
P. Krishnaswamy ◽  
M. E. Tuttle ◽  
A. F. Emery ◽  
J. Ahmad

1991 ◽  
Vol 3 (1) ◽  
pp. 235-253 ◽  
Author(s):  
L. D. Philipp ◽  
Q. H. Nguyen ◽  
D. D. Derkacht ◽  
D. J. Lynch ◽  
A. Mahmood

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