CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications

2004 ◽  
Vol 57 (1) ◽  
pp. B2-B3
Author(s):  
D Lange, ◽  
O Brand ◽  
H Baltes ◽  
T Krzyzynski,
2017 ◽  
Vol 8 ◽  
pp. 982-988 ◽  
Author(s):  
Santa Stepina ◽  
Astrida Berzina ◽  
Gita Sakale ◽  
Maris Knite

By using a solvent-based method composites of ethylenevinyl acetate copolymer and carbon black (EVA–CB) were synthesized for sensing BTEX (benzene, toluene, ethylbenzene and xylene) vapours. The composites were characterized using atomic force microscopy (AFM) in an electroconductive mode. Gas sensing results show that EVA-CB can reproducibly detect BTEX and that the response increases linearly with vapour concentration. Compared to gas-sensing measurements of gasoline vapours, the responses with toluene and ethylbenzene are different and can be explained by varying side chains of the benzene ring.


Author(s):  
John Melcher

Quartz tuning fork (QTF) sensors offer an attractive alternative to traditional silicon microcantilevers for sensing applications in dynamic atomic force microscopy (DAFM). The QTF sensor consists of two identical, weakly-coupled tines with a sharp tip affixed to the distal end of one tine. The fundamental anti-phase mode of the QTF achieves a stable resonant frequency with a high Quality factor making it ideal for DAFM applications in which a small shift in the resonant frequency is linked to a tip-sample force. The addition of the tip-sample force also breaks the symmetry of the QTF leading to a classic eigenvalue veering scenario. The eigenvalue veering and accompanying mode localization phenomena violate the standard DAFM modeling assumptions which treat the addition of the tip-sample force as a small perturbation to a single-degree-of-freedom oscillator. We find that the eigenvalue veering can contribute a systematic error in force measurements on the order of 20%. Methodology for correcting the systematic error caused by eigenvalue veering is proposed.


2016 ◽  
Vol 7 ◽  
pp. 1044-1051 ◽  
Author(s):  
Li-Yang Hong ◽  
Heh-Nan Lin

In this work, the fabrication of single titanium oxide nanodot (ND) resistive sensors for NO gas sensing at room temperature is reported. Two atomic force microscopy nanolithography methods, nanomachining and nano-oxidation, are employed. A single titanium nanowire (NW) is created first along with contact electrodes and a single titanium oxide ND is subsequently produced in the NW. Gas sensing is realized by the photo-activation and the photo-recovery approaches. It is found that a sensor with a smaller ND has better performance than a larger one. A response of 31%, a response time of 91 s, and a recovery time of 184 s have been achieved at a concentration of 10 ppm for a ND with a size of around 80 nm. The present work demonstrates the potential application of single metal oxide NDs for gas sensing with a performance that is comparable with that of metal oxide nanowire gas sensors.


2000 ◽  
Vol 10 (1-2) ◽  
pp. 15
Author(s):  
Eugene Sprague ◽  
Julio C. Palmaz ◽  
Cristina Simon ◽  
Aaron Watson

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