Micro- and Sub-Micromachining of Type IIa Single Crystal Diamond Using a Ti:Sapphire Femtosecond Laser

2002 ◽  
Vol 124 (2) ◽  
pp. 389-396 ◽  
Author(s):  
Diwakar Ramanathan ◽  
Pal A. Molian
Keyword(s):  
Single Crystal ◽  
Femtosecond Lasers ◽  
Damage Threshold ◽  
Direct Writing ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Crystal Diamond ◽  
Microscopy Analysis ◽  
Very High ◽  
Two Temperature

A 200-fs pulsed Ti:Sapphire laser was used to micromachine Type IIa single crystal diamond. The effects of pulse energy and exposure time were investigated. Both blind and through holes were generated by trepanning and percussion modes. Trenches were produced by the direct-writing mode. Scanning electron and atomic force microscopy analysis revealed that the holes are in the range 0.65–100 μm and are free from taper. In addition, there was little recast layer around the holes. The damage threshold was approximately 4 J/cm2, which is smaller than those obtained from other lasers. A two-temperature model was used to establish the electron temperatures and to predict the ablation depth per pulse. It is evident from this work that femtosecond lasers are capable of producing micron and sub-micron structures with very high precision.

Influence of morphology on the conductance of single-crystal diamond surfaces measured by atomic force microscopy

2009 ◽  
Vol 106 (5) ◽  
pp. 054301 ◽  
Author(s):  
E. Tranvouez ◽  
E. Boer-Duchemin ◽  
A. J. Mayne ◽  
T. Vanderbruggen ◽  
M. Scheele ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Single Crystal ◽  
Diamond Surfaces ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Crystal Diamond

Surface Cleaning, Topography, and Temperature Measurements of Single Crystal Diamond

1994 ◽  
Vol 339 ◽  
Author(s):  
Mark P. D'Evelyn ◽  
Lisa M. Struck ◽  
Robin E. Rawles
Keyword(s):  
Single Crystal ◽  
Surface Science ◽  
Surface Cleaning ◽  
Diamond Surfaces ◽  
Surface Hydroxyl ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Crystal Diamond ◽  
Adsorption Desorption ◽  
Internal Reflection Spectroscopy

ABSTRACTApplication of surface science methods to single crystal diamond surfaces requires the preparation of clean, well-ordered surfaces and accurate measurement of substrate temperature. Cleaning of diamond (100) in H2SO4/HNO3/HClO4 produced several infrared absorption features between 1025 and 1275 cm-1, as observed by infrared multiple-internal-reflection spectroscopy. These modes are assigned to surface hydroxyl and bridge-bonded oxygen. Heating an oxidized surface to ca. 1130 °C caused disappearance of a surface hydroxyl mode centered at 1080 cm-1. We show by atomic force microscopy that an as-polished diamond (100) sample is covered by grooves and ridges several nm in height, implying a modest density of atomic steps. The surface of a diamond that underwent etching via numerous adsorption/desorption experiments in ultrahigh vacuum and was acid cleaned several times was essentially unchanged, indicating a minimal perturbation of the surface topography. The capability of Fizeau interferometry for accurate measurement of single-crystal diamond temperatures is demonstrated.

Single-crystal diamond pyramids: synthesis and application for atomic force microscopy

2015 ◽  
Vol 10 (1) ◽  
pp. 012517 ◽  
Author(s):  
Feruza T. Tuyakova ◽  
Ekaterina A. Obraztsova ◽  
Rinat R. Ismagilov
Keyword(s):  
Atomic Force Microscopy ◽  
Single Crystal ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Crystal Diamond

Single-crystal diamond probes for atomic-force microscopy

2010 ◽  
Vol 53 (4) ◽  
pp. 613-619 ◽  
Author(s):  
P. G. Kopylov ◽  
B. A. Loginov ◽  
R. R. Ismagilov ◽  
A. N. Obraztsov
Keyword(s):  
Atomic Force Microscopy ◽  
Single Crystal ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Crystal Diamond

Single crystal diamond probes for atomic-force microscopy

2014 ◽  
Vol 40 (7) ◽  
pp. 553-557 ◽  
Author(s):  
F. T. Tuyakova ◽  
E. A. Obraztsova ◽  
D. V. Klinov ◽  
R. R. Ismagilov
Keyword(s):  
Atomic Force Microscopy ◽  
Single Crystal ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Crystal Diamond

Ion beam fabrication of natural single crystal diamond nano-tips for potential use in atomic force microscopy

2010 ◽  
Vol 87 (5-8) ◽  
pp. 1494-1496 ◽  
Author(s):  
Takashi Nagase ◽  
Junki Kawamura ◽  
Shahjada Ahemed Pahlovy ◽  
Iwao Miyamoto
Keyword(s):  
Atomic Force Microscopy ◽  
Single Crystal ◽  
Ion Beam ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Crystal Diamond ◽  
Potential Use

Development of the UHV-STM

1990 ◽  
Vol 48 (1) ◽  
pp. 322-323
Author(s):  
M. Iwatsuki ◽  
S. Kitamura ◽  
A. Mogami
Keyword(s):  
Surface Science ◽  
Real Space ◽  
Atomic Scale ◽  
Scanning Tunneling ◽  
Great Promise ◽  
Force Microscopy ◽  
Atomic Force ◽  
Stm Image ◽  
Surface Construction ◽  
Very High

Since Binnig, Rohrer and associates observed real-space topographic images of Si(111)-7×7 and invented the scanning tunneling microscope (STM),1) the STM has been accepted as a powerful surface science instrument.Recently, many application areas for the STM have been opened up, such as atomic force microscopy (AFM), magnetic force microscopy (MFM) and others. So, the STM technology holds a great promise for the future.The great advantages of the STM are its high spatial resolution in the lateral and vertical directions on the atomic scale. However, the STM has difficulty in identifying atomic images in a desired area because it uses piezoelectric (PZT) elements as a scanner.On the other hand, the demand to observe specimens under UHV condition has grown, along with the advent of the STM technology. The requirment of UHV-STM is especially very high in to study of surface construction of semiconductors and superconducting materials on the atomic scale. In order to improve the STM image quality by keeping the specimen and tip surfaces clean, we have built a new UHV-STM (JSTM-4000XV) system which is provided with other surface analysis capability.

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