Bio-MEMS Circular Plate Sensors Under Electrostatic Hard Excitations: Frequency Response of Superharmonic Resonance of Fourth Order

2021 ◽  
Author(s):  
Dumitru Caruntu ◽  
Julio Beatriz
Keyword(s):  
Frequency Response ◽  
Circular Plate ◽  
Fourth Order ◽  
Superharmonic Resonance

Bio-MEMS Circular Plate Sensors Under Electrostatic Hard Excitations: Frequency Response of Superharmonic Resonance of Fourth Order

2020 ◽  
Author(s):  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Frequency Response ◽  
Circular Plate ◽  
Fourth Order ◽  
Multiple Scales ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Amplitude Frequency Response ◽  
Elastic Circular Plate ◽  
Modes Of Vibration ◽  
The Difference

Abstract This paper investigates the frequency-amplitude response of electrostatically actuated Bio-MEMS clamped circular plates under superharmonic resonance of fourth order. The system consists of an elastic circular plate parallel to a ground plate. An AC voltage between the two plates will lead to vibrations of the elastic plate. Method of Multiple Scales, and Reduced Order Model with two modes of vibration are the two methods used in this work. The two methods show similar amplitude-frequency response, with an agreement in the low amplitudes. The difference between the two methods can be seen for larger amplitudes. The effects of voltage and damping on the amplitude-frequency response are reported. The steady-state amplitudes in the resonant zone increase with the increase of voltage and with the decrease of damping.

Amplitude-Frequency Response for Superharmonic Resonance of Fourth Order of Electrostatically Actuated MEMS Cantilever Resonators

2019 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christopher Reyes
Keyword(s):  
Frequency Response ◽  
Fourth Order ◽  
Microelectromechanical Systems ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Damping Force ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Homotopy Analysis ◽  
Ground Plate

Abstract This paper deals with the frequency response of superharmonic resonance of order four of electrostatically actuated MicroElectroMechanical Systems (MEMS) cantilever resonators. The MEMS structure in this work consists of a microcantilever parallel to an electrode ground plate. The MEMS resonator is elelctrostatically actuated through an AC voltage between the cantilever and the ground plate. The voltage is in the category of hard excitation. The AC frequency is near one eight of the natural frequency of the resonator. Since the electrostatic force acting on the resonator is proportional to the square of the voltage, it leads to superharmonic resonance of fourth order. Besides the electrostatic force, the system experiences damping. The damping force in this work is proportional to the velocity of the resonator, i.e. it is linear damping. Three methods are employed in this investigation. First, the Method of Multiple Scales (MMS), a perturbation method, is used predictions of the resonant regions for weak nonlinearities and small to moderate amplitudes. Second, the Homotopy Analysis Method (HAM), and third, the Reduced Order Model (ROM) method using two modes of vibration are also utilized to investigate the resonance. ROM is solved through numerical integration using Matlab in order to simulate time responses of the structure. All methods are in agreement for moderate nonlinearities and small to moderate amplitudes. This work shows that adequate MMS and HAM provide good predictions of the resonance.

ROM of Superharmonic Resonance of Fourth Order of Electrostatically Actuated Clamped MEMS Circular Plates: Voltage Response

2020 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Julio Beatriz
Keyword(s):  
Circular Plate ◽  
Fourth Order ◽  
Peak Amplitude ◽  
Voltage Response ◽  
Voltage Amplitude ◽  
Circular Plates ◽  
Amplitude Response ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Resonance Zone

Abstract This paper investigates the voltage-amplitude response of superharmonic resonance of fourth order of electrostatically actuated clamped MEMS circular plates. The system consists of flexible MEMS circular plate parallel to a ground plate. Hard excitations (voltage large enough) and AC voltage of frequency near one eight of the natural frequency of the MEMS plate resonator lead it into a superharmonic resonance. Hard excitations produce actuation forces large enough to produce resonance away from the primary resonance zone. There is no DC component in the voltage applied. The partial differential equation of motion describing the behavior of the system is solved using two modes of vibration reduced order model (ROM). This model is solved through a continuation and bifurcation analysis using the software package AUTO 07P which produces the voltage-amplitude response (bifurcation diagram of the system, and a numerical integration of the system of differential equations using Matlab that produces time responses of the system. Numerical simulations are conducted for a typical MEMS silicon circular plate resonator. For this resonator the quantum dynamics effects such as Casimir effect or Van der Waals effect are negligible. Both methods show agreement for the entire range of voltage values and amplitudes. The response consists of an increase of the amplitude with the increase of voltage, except around the value of 4 of the dimensionless voltage where the resonance shows two saddle-node bifurcations and a peak amplitude about ten times larger than the amplitudes before and after the dimensionless voltage of 4. The softening effect is present. The pull-in voltage is reached at large values of the dimensionless voltage, namely about 14. The effects of damping and frequency on the voltage response are reported. As the damping increases, the peak amplitude decreases for the resonance. However, the pull-in voltage is not affected. As the frequency increases, the resonance zone is shifted to lower voltage values and lower peak amplitudes. However, the pull-in voltage and the behavior for large voltage values are not affected.

Electrostatically Actuated MEMS Circular Plate Resonators: Frequency Response of Superharmonic Resonance of Third Order

2019 ◽  
Author(s):  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Frequency Response ◽  
Circular Plate ◽  
Microelectromechanical Systems ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Damping Force ◽  
Third Order ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Ground Plate

Abstract This paper deals with the frequency response of superharmonic resonance of order three of electrostatically actuated MicroElectroMechanical Systems (MEMS) circular plate resonators. The MEMS structure in this work consists of an elastic circular microplate parallel to an electrode ground plate. The microplate is elelctrostatically actuated through an AC voltage between the microplate and the ground plate. The voltage is in the category of hard excitations. The AC frequency is near one sixth of the natural frequency of the resonator. Since the electrostatic force acting on the resonator is proportional to the square of the voltage, it leads to superharmonic resonance of third order. Besides the electrostatic force, the system experiences damping. The damping force in this work is proportional to the velocity of the resonator, i.e. it is linear damping. Three methods are employed in this investigation. First, the Method of Multiple Scales (MMS), a perturbation method, is used predictions of the resonant regions for weak nonlinearities and small to moderate amplitudes. Second, the Reduced Order Model (ROM) method using two modes of vibration are also utilized to investigate the resonance. ROM is solved numerically integrated using Matlab in order to simulate time responses of the structure, and third, the ROM is used to predict the frequency response using AUTO, a software for continuation and bifurcation analysis. All methods are in agreement for moderate nonlinearities and small to moderate amplitudes. For relatively large amplitudes, when compared to the gap between the microplate and the ground plate, ROM more accurately predicts the behavior of the system. Effects of the parameters of the system on the frequency response are reported.

NEMS Circular Plates Under Hard Electrostatic Excitations: Amplitude-Frequency Response of Superharmonic Resonance of Second Order to Include Casimir Effect

2020 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Julio Beatriz ◽  
Benjamin Huerta
Keyword(s):  
Frequency Response ◽  
Circular Plate ◽  
Quantum Dynamics ◽  
Multiple Scales ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Primary Resonance ◽  
Second Order ◽  
Amplitude Response ◽  
Superharmonic Resonance

Abstract This work deals with the frequency-amplitude response of the superharmonic resonance of second order of electrostatically actuated clamped NEMS circular plate resonators. The NEMS system consists of a circular plate parallel to a ground plate. Hard excitations (large AC voltage) due to the electrostatic force of frequency near one fourth of the natural frequency of the plate resonator leads the plate into a superharmonic resonance of second order. Hard excitations are excitations significant enough to produce resonance although far from the primary resonance zone. There is no DC component in the voltage applied. For the partial differential equation of motion two reduced order models are developed. The first one uses one mode of vibration and it is solved using the Method of Multiple Scales (MMS), and the frequency-amplitude response is predicted. Hard excitations were modeled by keeping the first term of the Taylor polynomial of the electrostatic force as a large term. The second model uses two modes of vibration, and it is solved using numerical integration. This produces time responses of the resonator. In this work, the quantum dynamics effect such as Casimir effect is considered significant. The two branches, one unstable and one stable, with a saddle node bifurcation point are predicted. Both methods are in agreement for amplitudes up to 0.7 of the gap. The effect of damping and voltage on the frequency response are reported.

Circular Plates Under Hard Excitations to Include Casimir Effect: Amplitude-Voltage Response of Superharmonic Resonance of Second Order

2020 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Julio Beatriz ◽  
Jonathan Perez
Keyword(s):  
Circular Plate ◽  
Casimir Effect ◽  
Second Order ◽  
Peak Amplitude ◽  
Voltage Response ◽  
Voltage Amplitude ◽  
Circular Plates ◽  
Amplitude Response ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated

Abstract This paper deals with voltage-amplitude response of superharmonic resonance of second order of electrostatically actuated clamped MEMS circular plates. A flexible MEMS circular plate, parallel to a ground plate, and under AC voltage, constitute the structure under consideration. Hard excitations due to voltage large enough and AC frequency near one fourth of the natural frequency of the MEMS plate resonator lead the MEMS plate into superharmonic resonance of second order. These excitations produce resonance away from the primary resonance zone. No DC component is included in the voltage applied. The equation of motion of the MEMS plate is solved using two modes of vibration reduced order model (ROM), that is then solved through a continuation and bifurcation analysis using the software package AUTO 07P. This predicts the voltage-amplitude response of the electrostatically actuated MEMS plate. Also, a numerical integration of the system of differential equations using Matlab is used to produce time responses of the system. A typical MEMS silicon circular plate resonator is used to conduct numerical simulations. For this resonator the quantum dynamics effects such as Casimir effect are considered. Also, the Method of Multiple Scales (MMS) is used in this work. All methods show agreement for dimensionless voltage values less than 6. The amplitude increases with the increase of voltage, except around the dimensionless voltage value of 4, where the resonance shows two saddle-node bifurcations and a peak amplitude significantly larger than the amplitudes before and after the dimensionless voltage of 4. A light softening effect is present. The pull-in dimensionless voltage is found to be around 16. The effects of damping and frequency on the voltage response are reported. As the damping increases, the peak amplitude decreases. while the pull-in voltage is not affected. As the frequency increases, the peak amplitude is shifted to lower values and lower voltage values. However, the pull-in voltage and the behavior for large voltage values are not affected.

Nonlinear vibrations of a thin isotropic circular plate subjected to moving point loads

2020 ◽  
pp. 095440622097615
Author(s):  
Amit K Rai ◽  
Shakti S Gupta
Keyword(s):  
Boundary Conditions ◽  
Frequency Response ◽  
Circular Plate ◽  
Nonlinear Vibrations ◽  
Moving Load ◽  
Harmonic Balance Method ◽  
Angular Speed ◽  
Transverse Displacement ◽  
Governing Equations ◽  
Rotating Load

Here, we have studied the linear and nonlinear vibrations of a thin circular plate subjected to circularly, radially, and spirally moving transverse point loads. We follow Kirchoff’s theory and then incorporate von Kármán nonlinearity and employ Hamilton’s principle to obtain the governing equations and the associated boundary conditions. We solve the governing equations for the simply-supported and clamped boundary conditions using the mode summation method. Using the harmonic balance method for frequency response and Runge-Kutta method for time response, we solve the resulting coupled and cubic nonlinear ordinary differential equations. We show that the resonance instability due to a circularly moving load can be avoided by splitting it into multiple loads rotating at the same radius and angular speed. With the increasing magnitude of the rotating load, the frequency response of the transverse displacement shows jumps and modal interaction. The transverse response collected at the centre of the plate shows subharmonics of the axisymmetric frequencies only. The spectrum of the linear response due to spirally moving load contains axisymmetric frequencies, the angular speed of the load, their combination, and superharmonics of axisymmetric frequencies.

Amplitude-Frequency Response of Superharmonic Resonance of Third Order of Electrostatically Actuated MEMS Cantilever Resonators

2019 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christopher Reyes
Keyword(s):  
Frequency Response ◽  
Cantilever Beam ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Beam Theory ◽  
Driving Frequency ◽  
Third Order ◽  
Reduced Order ◽  
Superharmonic Resonance ◽  
Amplitude Frequency Response

Abstract This work deals with amplitude frequency response of MEMS cantilever resonators undergoing superharmonic resonance of third order. The cantilever resonator is parallel to a ground plate and under alternating current (AC) voltage that excites the cantilever into vibrations. The driving frequency of the AC voltage is near one sixth of the first natural frequency of the cantilever beam resulting into superharmonic resonance of third order. The cantilever beam is modeled using Euler-Bernoulli beam theory. The electrostatic force is modeled using Palmer’s formula to include the fringe effect. In order to investigate the amplitude frequency behavior of the system reduced order models (ROMs) are developed. Three methods are used to solve these ROMs they are 1) the method of multiple scales (MMS) for ROM with one mode of vibration, 2) homotopy analysis method (HAM) for ROM with one mode of vibration, and 3) direct numerical integration for 2 modes of vibration Reduced Order Model (2T ROM) producing time responses of the tip of the cantilever resonator. In this work the limitations of MMS and HAM are highlighted when considering large voltage values i.e hard excitations. For large voltage values MMS and HAM cannot accurately predict the amplitude frequency response; the results from 2T ROM time responses disagree significantly with the MMS and HAM solutions. The effect of voltage on the frequency response is investigated. As the voltage values in the system increase the responses shift to lower frequencies and larger amplitudes.

Frequency Response for MEMS Circular Plate Resonators Under Superharmonic Resonance of the Second Order

2018 ◽  
Author(s):  
Martin Botello ◽  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Circular Plate ◽  
Software Package ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Micro Electro Mechanical System ◽  
Second Order ◽  
Mode Shapes ◽  
Amplitude Response ◽  
Superharmonic Resonance ◽  
Mems Resonator

A nonlinear dynamics investigation is conducted on the frequency-amplitude response of electrostatically actuated micro-electro-mechanical system (MEMS) clamped plate resonators. The Alternating Current (AC) voltage is operating in the realm of superharmonic resonance of second order. This is given by an AC frequency near one-fourth of the natural frequency of the resonator. The magnitude of the AC voltage is large enough to be considered as hard excitation. The external forces acting on the MEMS resonator are viscous air damping and electrostatic force. Two proven mathematical models are utilized to obtain a predicted frequency-amplitude response for the MEMS resonator. Method of Multiple Scales (MMS) allows the transformation of a partial differential equation of motion into zero-order and first-order problems. Hence, MMS can be directly applied to obtain the frequency-amplitude response. Reduced Order Model (ROM), based on the Galerkin procedure, uses mode shapes of vibration for undamped circular plate resonator as a basis of functions. ROM is numerically integrated using MATLAB software package to obtain time responses. Also, ROM is used to conduct a continuation and bifurcation analysis utilizing AUTO 07P software package in order to obtain the frequency-amplitude response. The time responses show the movement of the center of the MEMS circular plate as a function of time. The frequency-amplitude response allows one to observe bifurcation and pull-in instabilities within the nonlinear system over a range of frequencies. The influences of parameters (i.e. damping and voltage) are also included in this investigation.

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