scholarly journals Erosion behavior of Y 2 O 3 in fluorine‐based etching plasmas: Orientation dependency and reaction layer formation

2020 ◽  
Vol 104 (3) ◽  
pp. 1465-1474
Author(s):  
Moritz Kindelmann ◽  
Mark Stamminger ◽  
Nino Schön ◽  
Marcin Rasinski ◽  
Rüdiger‐A. Eichel ◽  
...  
1996 ◽  
Vol 157 (1) ◽  
pp. 99-106 ◽  
Author(s):  
Xiangjun He ◽  
Size Yang ◽  
Yong Du ◽  
Kun Tao ◽  
Yudian Fan

Author(s):  
A Naveira-Suarez ◽  
A Tomala ◽  
M Grahn ◽  
M Zaccheddu ◽  
R Pasaribu ◽  
...  

Wear ◽  
1984 ◽  
Vol 100 (1-3) ◽  
pp. 301-313 ◽  
Author(s):  
H. Uetz ◽  
M.A. Khosrawi ◽  
J. Föhl

1993 ◽  
Vol 24 (1) ◽  
pp. 53-60 ◽  
Author(s):  
Sandra M. Devincent ◽  
Gary M. Michal

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