Erosion behavior of Y
2
O
3
in fluorine‐based etching plasmas: Orientation dependency and reaction layer formation
2016 ◽
pp. 109-117
Keyword(s):
The influence of base oil polarity and slide–roll ratio on additive-derived reaction layer formation
2011 ◽
Vol 225
(7)
◽
pp. 565-576
◽
Keyword(s):
Keyword(s):
1990 ◽
Vol 30
(12)
◽
pp. 1142-1150
◽