Bismuth Zinc Niobate Thin Film Multilayer Capacitors with Cu Electrodes Fabricated at Low Temperature by RF Magnetron Sputtering

2016 ◽  
Vol 99 (5) ◽  
pp. 1676-1680 ◽  
Author(s):  
Fan He ◽  
Wei Ren ◽  
Muhammad Saeed Khan ◽  
Peng Shi
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Multilayer Capacitors ◽  
Bismuth Zinc Niobate

In situ low temperature growth of poly-crystalline germanium thin film on glass by RF magnetron sputtering

2010 ◽  
Vol 94 (9) ◽  
pp. 1501-1505 ◽  
Author(s):  
Chao-Yang Tsao ◽  
Jürgen W. Weber ◽  
Patrick Campbell ◽  
Gavin Conibeer ◽  
Dengyuan Song ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Crystalline Germanium

Transparent p-type SnOx thin film transistors produced by reactive rf magnetron sputtering followed by low temperature annealing

2010 ◽  
Vol 97 (5) ◽  
pp. 052105 ◽  
Author(s):  
Elvira Fortunato ◽  
Raquel Barros ◽  
Pedro Barquinha ◽  
Vitor Figueiredo ◽  
Sang-Hee Ko Park ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Thin Film Transistors ◽  
Rf Magnetron Sputtering ◽  
Low Temperature Annealing ◽  
P Type ◽  
Reactive Rf Magnetron Sputtering

Fabrication of Amorphous Indium Gallium Zinc Oxide Thin Film Transistor at Low Temperature by RF Magnetron Sputtering

2012 ◽  
Vol 33 (10) ◽  
pp. 1149-1152 ◽  
Author(s):  
信恩龙 XIN En-long ◽  
李喜峰 LI Xi-feng ◽  
陈龙龙 CHEN Long-long ◽  
石继锋 SHI Ji-feng ◽  
李春亚 LI Chun-ya ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Thin Film Transistor ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Film ◽  
Indium Gallium Zinc Oxide ◽  
Zinc Oxide Thin Film ◽  
Indium Gallium

Effect of Al2O3-doping on the structure and optoelectronic characteristics of MgZnO thin film prepared by RF magnetron sputtering

2021 ◽  
Vol 127 (7) ◽  
Author(s):  
Du-Cheng Tsai ◽  
Feng-Kuan Chen ◽  
Zue-Chin Chang ◽  
Bing-Hau Kuo ◽  
Erh-Chiang Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Al2o3 Doping

Electron Conduction of Nd0.6Sr0.4FeO3−δ Thin Film with Oxygen Vacancies Prepared by RF Magnetron Sputtering

2017 ◽  
Vol 86 (7) ◽  
pp. 074704 ◽  
Author(s):  
Wataru Namiki ◽  
Takashi Tsuchiya ◽  
Makoto Takayanagi ◽  
Shoto Furuichi ◽  
Makoto Minohara ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Oxygen Vacancies ◽  
Rf Magnetron Sputtering ◽  
Electron Conduction
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