Ideal and potential flexibility measures for qualification management in semiconductor manufacturing

2016 ◽  
Author(s):  
Amelie Pianne ◽  
Luis Rivero ◽  
Stephane Dauzere-Peres ◽  
Philippe Vialletelle
Keyword(s):  
Semiconductor Manufacturing ◽  
Flexibility Measures ◽  
Qualification Management

Impact of qualification management on scheduling in semiconductor manufacturing

2008 ◽  
Author(s):  
Carl Johnzen ◽  
Philippe Vialletelle ◽  
Stephane Dauzere-Peres ◽  
Claude Yugma ◽  
Alexandre Derreumaux
Keyword(s):  
Semiconductor Manufacturing ◽  
Qualification Management

Capacitated qualification management in semiconductor manufacturing

Omega ◽  
2015 ◽  
Vol 54 ◽  
pp. 50-59 ◽  
Author(s):  
M. Rowshannahad ◽  
S. Dauzère-Pérès ◽  
B. Cassini
Keyword(s):  
Semiconductor Manufacturing ◽  
Qualification Management

Flexibility measures for qualification management in wafer fabs

2010 ◽  
Vol 22 (1) ◽  
pp. 81-90 ◽  
Author(s):  
Carl Johnzén ◽  
Stéphane Dauzère-Pérès ◽  
Philippe Vialletelle
Keyword(s):  
Flexibility Measures ◽  
Qualification Management

NanoProbing on 7 nm FinFET Devices in an SRAM Array: Challenges and Solutions

2019 ◽  
Author(s):  
Anqi Qiu ◽  
William Lowe ◽  
Mridul Arora
Keyword(s):  
Manufacturing Process ◽  
Semiconductor Manufacturing

Abstract Nanoprobing systems have evolved to meet the challenges from recent innovations in the semiconductor manufacturing process. This is demonstrated through an exhibition of standard SRAM measurements on TSMC 7 nm FinFET technology. SEM based nanoprober is shown to meet or exceed the requirements for measuring 7nm technology and beyond. This paper discusses in detail of the best-known methods for nanoprobing on 7nm technology.

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