Novel, Effective and Cost-Efficient Method of Introducing Fluorine into Metal/Hf-based Gate Stack in MuGFET and Planar SOI Devices with Significant BTI Improvement
2021 ◽
Vol 9
(VI)
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pp. 1714-1722
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2018 ◽
Vol 28
(4)
◽
pp. 518-525
◽
Keyword(s):
Keyword(s):
Keyword(s):