MEMS-based multiple fourier-horn silicon ultrasonic atomizer for inhalation drug delivery
2013 ◽
Vol 4
(3)
◽
pp. 256-267
◽
2004 ◽
Vol 50
(2)
◽
pp. 109-119
◽
Keyword(s):
2014 ◽
Vol 2014
(0)
◽
pp. _1202-1_-_1202-2_
2017 ◽
Vol 106
◽
pp. 362-380
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