4E-5 Study of Temperature Coefficient of Frequency and Electromechanical Coupling Coefficient of X Band Frequency SAW Devices Based on AlN/Diamond Layered Structure

Author(s):  
M.B. Assouar ◽  
O. Elmazria ◽  
P. Kirsch ◽  
P. Alnot ◽  
V. Mortet
2002 ◽  
Vol 720 ◽  
Author(s):  
Sun-Ki Kim ◽  
Min-Jung Park ◽  
Cheol-Yeong Jang ◽  
Hyun-Chul Choi ◽  
Jung-Hee Lee ◽  
...  

AbstractAlxGa1-xN sample with x=0.36 was epitaxially grown on sapphire by MOCVD. SAW velocity of 5420 m/s and TCF (temperature coefficient of frequency) of -51.20 ppm/°C were measured from the SAW devices fabricated on the AlxGa1-xN sample, when kh value was 0.078, at temperatures between –30 °C and 60 °C Electromechanical coupling coefficient was ranged from 1.26 % to 2.22 %. The fabricated SAW filter have shown a good device performance with insertion loss of -33.853 dB and side lobe attenuation of 20 dB.


Crystals ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 332
Author(s):  
Namrata Dewan Soni ◽  
Jyoti Bhola

The present study depicts the first-ever optimized surface acoustic wave (SAW) device based on Beryllium Oxide (BeO) thin film. The feasibility of surface acoustic wave devices based on BeO/128° YX LiNbO3 layered structure has been examined theoretically. The SAW phase velocity, electromechanical coupling coefficient, and temperature coefficient of delay for BeO/128° YX LiNbO3 layered structure are calculated. The layered structure is found to exhibit optimum value of phase velocity (4476 ms−1) and coupling coefficient (~9.66%) at BeO over layer thickness of 0.08λ. The BeO (0.08λ)/128° YX LiNbO3 SAW device is made temperature stable, by integrating it with negative temperature coefficient of delay (TCD) TeO3 over layer of thickness 0.026λ.


2014 ◽  
Vol 2014 ◽  
pp. 1-6 ◽  
Author(s):  
Walter Water ◽  
Yi-Shun Lin ◽  
Chi-Wei Wen

A TiO2thin film deposited on a 90° rotated 42°45′ ST-cut quartz substrate was applied to fabricate a Love wave ultraviolet photodetector. TiO2thin films were grown by radio frequency magnetron sputtering. The crystalline structure and surface morphology of TiO2thin films were examined using X-ray diffraction, scanning electron microscope, and atomic force microscope. The effect of TiO2thin film thickness on the phase velocity, electromechanical coupling coefficient, temperature coefficient of frequency, and sensitivity of ultraviolet of devices was investigated. TiO2thin film increases the electromechanical coupling coefficient but decreases the temperature coefficient of frequency for Love wave propagation on the 90° rotated 42°45′ ST-cut quartz. For Love wave ultraviolet photodetector application, the maximum insertion loss shift and phase shift are 2.81 dB and 3.55 degree at the 1.35-μm-thick TiO2film.


2021 ◽  
Vol 2131 (5) ◽  
pp. 052098
Author(s):  
R M Taziev

Abstract In this study, the surface acoustic wave (SAW) temperature properties in flux-grown α-GeO2 crystal are numerically investigated. It is shown that the SAW velocity temperature change substantially depends only on the temperature coefficient of three elastic constants: C66, C44 and C14 for crystal cuts and wave propagation directions, where SAW has high electromechanical coupling coefficient. The SAW temperature coefficient of delay (TCD) for these crystal cuts are in the range from -40 ppm /°C to -70 ppm /°C. In contrast to alpha-quartz, the surface wave TCD values are not equal to zero in Z-, Y- , and Z- rotated cuts of α-GeO2 single crystal. Its values are comparable in the magnitude with the surface wave TCD values in lithium tantalate. In the crystal grown from the melt, the interdigital transducer (IDT) conductance has two times larger amplitude than that in hydrothermally grown a-GeO2. The leaky acoustic wave excited by IDT on Z+120°-cut and wave propagation direction along the X-axis, has an electromechanical coupling coefficient 5 times less than that for surface wave.


2003 ◽  
Vol 764 ◽  
Author(s):  
Sheng-Yuan Chu ◽  
Te-Yi Chen ◽  
Walter Water ◽  
Tung-Yi Huang

AbstractPoly-crystal ZnO films with c-axis (002) orientation have been successfully grown on the lead-based ceramic substrates by r.f. magnetron sputtering technique. The deposited films were characterized as a function of deposition time and argon-oxygen gas flow ratio. Crystalline structures of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Highly oriented films with c-axis normal to the substrates can be obtained by depositing under a total pressure of 10mTorr containing 50% argon and 50% oxygen and r.f. power of 70W for 3 hours. The phase velocity, electromechanical coupling coefficient and temperature coefficient of frequency of SAW device with ZnO/IDT/PT-ceramic structure were investigated. It shows that the preferred oriented ZnO film is beneficial for improving the electromechanical coupling coefficient of SAW device.


2016 ◽  
Vol 848 ◽  
pp. 339-343
Author(s):  
Xiao Kun Zhao ◽  
Bo Ping Zhang ◽  
Lei Zhao ◽  
Li Feng Zhu

The modified behavior of the phase transition temperatures (TO-T and/or TC) between orthorhombic (O), tetragonal (T) and cubic (C) that caused by doping Sb5+ in (Li0.052Na0.493K0.455)(Nb1-xSbx)O3 (LNKNSx) ceramics was reported in the present investigation. The results show that differing from the insensitive TO-T to the Sb5+ content, TC splits into two peaks TCI and TCII when doping Sb5+. The decreased TCI by raising x may be ascribed to the Sb-rich grains and the settled TCII round 480 °C resulting from the Sb-lack ones. The enhanced piezoelectric coefficient d33 value of 263 pC/N and planar mode electromechanical coupling coefficient kp value of 42.5% at x=0.052 can be attributed to the polymorphic phase boundary (PPB) behavior with an appropriate ratio between T and O phases without any second phase.


2004 ◽  
Vol 14 (03) ◽  
pp. 837-846 ◽  
Author(s):  
GANG BU ◽  
DAUMANTAS CIPLYS ◽  
MICHAEL S. SHUR ◽  
LEO J. SCHOWALTER ◽  
SANDRA B. SCHUJMAN ◽  
...  

We report on the velocity V and the electromechanical coupling coefficient K2 of the first and the second leaky surface acoustic waves in various propagation directions in the a-plane AlN single-crystal. For c-propagation direction, the second leaky wave exhibited the velocity of 11016 m/s and K2 of 0.45%. For this direction, the temperature coefficient of frequency was found to be -30 ppm/°C. A near match of the velocities of the plane and leaky waves in the a-plane AlN allowed us to establish analytical relationships between the piezoelectric and elastic constants. A full set of elastic and piezoelectric constants of AlN has been evaluated by fitting the measured and calculated dependencies of velocities and electromechanical coupling coefficients on the propagation direction for both Rayleigh and leaky waves.


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