4E-6 Electric Field Sensitivity of Thin Film Resonators Based on Piezoelectric AlN Thin Films
Keyword(s):
2001 ◽
Vol 15
(28n30)
◽
pp. 3936-3939
Keyword(s):
1970 ◽
Vol 28
◽
pp. 544-545
Keyword(s):
1991 ◽
Vol 49
◽
pp. 1068-1069
1991 ◽
Vol 49
◽
pp. 1080-1081
1994 ◽
Vol 52
◽
pp. 1068-1069
Keyword(s):
1993 ◽
Vol 51
◽
pp. 842-843