Loss Mechanisms Determining the Quality Factors in Quartz Tuning Forks Vibrating at the Fundamental and First Overtone Modes

Author(s):  
Pietro Patimisco ◽  
Angelo Sampaolo ◽  
Verena Mackowiak ◽  
Hubert Rossmadl ◽  
Alex Cable ◽  
...  
2013 ◽  
Vol 39 (10) ◽  
pp. 823-827 ◽  
Author(s):  
G. Sheshin ◽  
I. Gritsenko ◽  
D. Schmoranzer ◽  
L. Skrbek

2010 ◽  
Vol 161 (5-6) ◽  
pp. 536-547 ◽  
Author(s):  
D. I. Bradley ◽  
P. Crookston ◽  
M. J. Fear ◽  
S. N. Fisher ◽  
G. Foulds ◽  
...  

Sensors ◽  
2018 ◽  
Vol 18 (8) ◽  
pp. 2494 ◽  
Author(s):  
Xiaoqing Shi ◽  
Yulan Lu ◽  
Bo Xie ◽  
Yadong Li ◽  
Junbo Wang ◽  
...  

This paper presents a resonant pressure microsensor relying on electrostatic excitation and piezoresistive detection where two double-ended tuning forks were used as resonators, enabling differential outputs. Pressure under measurement caused the deformation of the pressure sensitive membrane, leading to stress buildup of the resonator under electrostatic excitation with a corresponding shift of the resonant frequency detected piezoresistively. The proposed microsensor was fabricated by simplified SOI-MEMS technologies and characterized by both open-loop and closed-loop circuits, producing a quality factor higher than 10,000, a sensitivity of 79.44 Hz/kPa and an accuracy rate of over 0.01% F.S. In comparison to the previously reported resonant piezoresistive sensors, the proposed device used single-crystal silicon as piezoresistors, which was featured with low DC biased voltages, simple sensing structures and fabrication steps. In addition, the two double-ended tuning forks were used as resonators, producing high quality factors and differential outputs, which further improved the sensor performances.


2022 ◽  
pp. 100329
Author(s):  
Yufei Ma ◽  
Yinqiu Hu ◽  
Shunda Qiao ◽  
Ziting Lang ◽  
Xiaonan Liu ◽  
...  

2014 ◽  
Vol 58 ◽  
pp. 132-137 ◽  
Author(s):  
Andrzej Chałupniak ◽  
Karol Waszczuk ◽  
Katarzyna Hałubek-Głuchowska ◽  
Tomasz Piasecki ◽  
Teodor Gotszalk ◽  
...  

2013 ◽  
Vol 189 ◽  
pp. 60-65 ◽  
Author(s):  
Tomasz Piasecki ◽  
Grzegorz Guła ◽  
Karol Nitsch ◽  
Karol Waszczuk ◽  
Zuzanna Drulis-Kawa ◽  
...  

2010 ◽  
Vol 162 (5-6) ◽  
pp. 678-685 ◽  
Author(s):  
A. Salmela ◽  
J. Tuoriniemi ◽  
J. Rysti

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