Dedicated finite elements for electrode thin films on quartz resonators

S.A. Srivastava;  Yook-Kong Yong; M. Tanaka; T. Imai

doi:10.1109/tuffc.2008.854

Dedicated finite elements for electrode thin films on quartz resonators

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2008.854 ◽

2008 ◽

Vol 55 (8) ◽

pp. 1686-1697

Author(s):

S.A. Srivastava ◽

Yook-Kong Yong ◽

M. Tanaka ◽

T. Imai

Keyword(s):

Thin Films ◽

Finite Elements ◽

Quartz Resonators

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Dedicated finite elements for electrode thin films on quartz resonators

IEEE Ultrasonics Symposium, 2004 ◽

10.1109/ultsym.2004.1417719 ◽

2005 ◽

Cited By ~ 1

Author(s):

S.A. Srivastava ◽

Yook-Kong Yong ◽

M. Tanaka ◽

T. Imai

Keyword(s):

Thin Films ◽

Finite Elements ◽

Quartz Resonators

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Microstructural and elasto-plastic material parameters identification by inverse finite elements method of Ti (1−x) Al x N (0 < x < 1) sputtered thin films from Berkovich nano-indentation experiments

Thin Solid Films ◽

10.1016/j.tsf.2014.07.037 ◽

2014 ◽

Vol 569 ◽

pp. 81-92 ◽

Cited By ~ 11

Author(s):

M.-J. Pac ◽

S. Giljean ◽

C. Rousselot ◽

F. Richard ◽

P. Delobelle

Keyword(s):

Thin Films ◽

Finite Elements ◽

Plastic Material ◽

Finite Elements Method ◽

Parameters Identification ◽

Nano Indentation ◽

Material Parameters ◽

Material Parameters Identification

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Viscoelastic analysis of organic thin films on quartz resonators

Macromolecular Chemistry and Physics ◽

10.1002/(sici)1521-3935(19990301)200:3<501::aid-macp501>3.0.co;2-w ◽

1999 ◽

Vol 200 (3) ◽

pp. 501-516 ◽

Cited By ~ 120

Author(s):

Diethelm Johannsmann

Keyword(s):

Thin Films ◽

Organic Thin Films ◽

Viscoelastic Analysis ◽

Quartz Resonators

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1000. Recovery of quartz resonators used for measurement of thickness and deposition rate of thin films

Vacuum ◽

10.1016/0042-207x(74)90668-x ◽

1974 ◽

Vol 24 (7) ◽

pp. 324

Keyword(s):

Thin Films ◽

Deposition Rate ◽

Quartz Resonators ◽

Measurement Of Thickness

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Multi-physics modelling of thin films: Optimization for finite elements simulations tools

2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems ◽

10.1109/eurosime.2015.7103138 ◽

2015 ◽

Author(s):

Toni Youssef ◽

Eric Woirgard ◽

Stephane Azzopardi ◽

Donatien Martineau ◽

Regis Meuret

Keyword(s):

Thin Films ◽

Finite Elements

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Shear birefringence measurements on polymer thin films deposited on quartz resonators

Journal of Applied Physics ◽

10.1063/1.366827 ◽

1998 ◽

Vol 83 (3) ◽

pp. 1286-1295 ◽

Cited By ~ 4

Author(s):

Arno Domack ◽

Diethelm Johannsmann

Keyword(s):

Thin Films ◽

Polymer Thin Films ◽

Quartz Resonators

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Instabilities in thin films on hyperelastic substrates by 3D finite elements

International Journal of Solids and Structures ◽

10.1016/j.ijsolstr.2015.06.007 ◽

2015 ◽

Vol 69-70 ◽

pp. 71-85 ◽

Cited By ~ 14

Author(s):

Fan Xu ◽

Yao Koutsawa ◽

Michel Potier-Ferry ◽

Salim Belouettar

Keyword(s):

Thin Films ◽

Finite Elements

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A new family of finite elements for wrinkling analysis of thin films on compliant substrates

Composite Structures ◽

10.1016/j.compstruct.2014.09.040 ◽

2015 ◽

Vol 119 ◽

pp. 568-577 ◽

Cited By ~ 26

Author(s):

Jie Yang ◽

Qun Huang ◽

Heng Hu ◽

Gaetano Giunta ◽

Salim Belouettar ◽

...

Keyword(s):

Thin Films ◽

Finite Elements ◽

Compliant Substrates ◽

New Family ◽

Wrinkling Analysis

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Derivation of the shear compliance of thin films on quartz resonators from comparison of the frequency shifts on different harmonics: A perturbation analysis

Journal of Applied Physics ◽

10.1063/1.1358317 ◽

2001 ◽

Vol 89 (11) ◽

pp. 6356-6364 ◽

Cited By ~ 39

Author(s):

Diethelm Johannsmann

Keyword(s):

Thin Films ◽

Perturbation Analysis ◽

Frequency Shifts ◽

Quartz Resonators ◽

Shear Compliance

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Kinetic absorption of vapors of alkyl acetates C1-C4 and diethyl ether on thin films of modified piezoelectric quartz resonators

Russian Journal of Applied Chemistry ◽

10.1134/s1070427211040069 ◽

2011 ◽

Vol 84 (4) ◽

pp. 592-596

Author(s):

S. I. Niftaliev ◽

S. E. Plotnikova ◽

N. Ya. Mokshina

Keyword(s):

Thin Films ◽

Diethyl Ether ◽

Piezoelectric Quartz ◽

Alkyl Acetates ◽

Quartz Resonators

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