Development of fast-scanning laser probe system based on knife-edge method for diagnosis of RF surface acoustic wave devices

H. Kamizuma; T. Omori; K. Hamishoto; M. Yamaguchi

doi:10.1109/tuffc.2006.1642517

Development of fast-scanning laser probe system based on knife-edge method for diagnosis of RF surface acoustic wave devices

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2006.1642517 ◽

2006 ◽

Vol 53 (6) ◽

pp. 1186-1191 ◽

Cited By ~ 23

Author(s):

H. Kamizuma ◽

T. Omori ◽

K. Hamishoto ◽

M. Yamaguchi

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Scanning Laser ◽

Knife Edge ◽

Laser Probe ◽

Probe System ◽

Acoustic Wave Devices ◽

Edge Method

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Development of fast-scanning laser probe system based on knife-edge method for diagnosis of rf surface acoustic wave devices

IEEE Ultrasonics Symposium, 2005. ◽

10.1109/ultsym.2005.1603168 ◽

2006 ◽

Cited By ~ 1

Author(s):

H. Kamizuma ◽

K. Hashimoto ◽

T. Omori ◽

M. Yamaguchi

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Scanning Laser ◽

Knife Edge ◽

Laser Probe ◽

Probe System ◽

Acoustic Wave Devices ◽

Edge Method

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High-Speed Laser Probing System for Surface Acoustic Wave Devices Based on Knife-Edge Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.44.4535 ◽

2005 ◽

Vol 44 (6B) ◽

pp. 4535-4538 ◽

Cited By ~ 15

Author(s):

Hiroshi Kamizuma ◽

Liyan Yang ◽

Tatsuya Omori ◽

Ken-ya Hashimoto ◽

Masatsune Yamaguchi

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

High Speed ◽

Knife Edge ◽

Laser Probing ◽

Acoustic Wave Devices ◽

Edge Method

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Phase-sensitive and fast-scanning laser probe system for diagnosis of high frequency acoustic wave devices

Procedia Engineering ◽

10.1016/j.proeng.2010.09.241 ◽

2010 ◽

Vol 5 ◽

pp. 846-849

Author(s):

Ken-ya Hashimoto ◽

Nan Wu ◽

Tatsuya Omori ◽

Masatsune Yamaguchi

Keyword(s):

Acoustic Wave ◽

High Frequency ◽

Scanning Laser ◽

Laser Probe ◽

Probe System ◽

Phase Sensitive ◽

Acoustic Wave Devices

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Development of a high-speed, phase-sensitive laser probe system for RF surface acoustic wave/bulk acoustic wave devices with an absolute vibration amplitude measurement function

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/abef12 ◽

2021 ◽

Vol 60 (SD) ◽

pp. SDDC10

Author(s):

Hikaru Takahashi ◽

Tatsuya Omori ◽

Ken-ya Hashimoto

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Vibration Amplitude ◽

High Speed ◽

Bulk Acoustic Wave ◽

Laser Probe ◽

Measurement Function ◽

Probe System ◽

Phase Sensitive ◽

Acoustic Wave Devices

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Phase-sensitive and fast-scanning laser probe system for radio frequency surface/bulk acoustic wave devices

2014 European Frequency and Time Forum (EFTF) ◽

10.1109/eftf.2014.7331425 ◽

2014 ◽

Cited By ~ 1

Author(s):

Ken-ya Hashimoto ◽

Tatsuya Omori

Keyword(s):

Acoustic Wave ◽

Radio Frequency ◽

Bulk Acoustic Wave ◽

Scanning Laser ◽

Laser Probe ◽

Probe System ◽

Phase Sensitive ◽

Acoustic Wave Devices

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A fast scanning laser probe based on Sagnac interferometer for RF surface and bulk acoustic wave devices

2008 IEEE MTT-S International Microwave Symposium Digest ◽

10.1109/mwsym.2008.4632966 ◽

2008 ◽

Cited By ~ 4

Author(s):

Ken-ya Hashimoto ◽

Keisuke Kashiwa ◽

Tatsuya Omori ◽

Masatsune Yamaguchi ◽

Osamu Takano ◽

...

Keyword(s):

Acoustic Wave ◽

Bulk Acoustic Wave ◽

Scanning Laser ◽

Sagnac Interferometer ◽

Laser Probe ◽

Acoustic Wave Devices

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Study on the Frequency Dependence of Lateral Energy Leakage in RF Bulk Acoustic Wave Device by Fast-Scanning Laser Probe System

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.07gg01 ◽

2009 ◽

Vol 48 (7) ◽

pp. 07GG01 ◽

Cited By ~ 11

Author(s):

Nan Wu ◽

Ken-ya Hashimoto ◽

Keisuke Kashiwa ◽

Tatsuya Omori ◽

Masatsune Yamaguchi

Keyword(s):

Acoustic Wave ◽

Frequency Dependence ◽

Bulk Acoustic Wave ◽

Scanning Laser ◽

Laser Probe ◽

Probe System ◽

Energy Leakage ◽

Acoustic Wave Device ◽

Wave Device

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Improvement of Detection System for a Fast-Scanning and Phase-Sensitive Laser Probe for Surface Acoustic Wave Devices in 2 GHz Range

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.4108 ◽

2008 ◽

Vol 47 (5) ◽

pp. 4108-4110 ◽

Cited By ~ 8

Author(s):

Keisuke Kashiwa ◽

Tatsuya Omori ◽

Ken-ya Hashimoto ◽

Masatsune Yamaguchi

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Detection System ◽

Laser Probe ◽

Phase Sensitive ◽

Acoustic Wave Devices

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The Temperature Coefficients of Frequency of Surface Acoustic Wave Devices with SiOxNy Passivation Films on LiTaO3 Substrates

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2020.3048030 ◽

2020 ◽

pp. 1-1

Author(s):

Atsushi Nishimura ◽

Satoru Matsuda ◽

Yoshiro Kabe

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Temperature Coefficients ◽

Acoustic Wave Devices

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High-Performance Surface Acoustic Wave Devices Using LiNbO₃/SiO₂/SiC Multilayered Substrates

IEEE Transactions on Microwave Theory and Techniques ◽

10.1109/tmtt.2021.3077261 ◽

2021 ◽

pp. 1-1

Author(s):

Junyao Shen ◽

Sulei Fu ◽

Rongxuan Su ◽

Huiping Xu ◽

Zengtian Lu ◽

...

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

High Performance ◽

Acoustic Wave Devices ◽

Performance Surface

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