Precompensated excitation waveforms to suppress harmonic generation in MEMS electrostatic transducers

Author(s):  
S. Zhou ◽  
P. Reynolds ◽  
J. Hossack
2003 ◽  
Vol 50 (3-4) ◽  
pp. 375-386
Author(s):  
D. B. MilosÕeviĆ ◽  
W. Becker

1992 ◽  
Vol 139 (2) ◽  
pp. 133 ◽  
Author(s):  
N.M. Lawandy ◽  
T.J. Driscoll ◽  
C.L. Adler ◽  
N.M. Lawandy

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