Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid Multicluster Tools via Petri Nets

2017 ◽  
Vol 47 (11) ◽  
pp. 2920-2932 ◽  
Author(s):  
FaJun Yang ◽  
NaiQi Wu ◽  
Yan Qiao ◽  
MengChu Zhou
Keyword(s):  
2009 ◽  
Vol 129 (5) ◽  
pp. 455-461 ◽  
Author(s):  
Xinhong Hei ◽  
Sei Takahashi ◽  
Hideo Nakamura
Keyword(s):  

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