Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing

X. Yao; E. Fernandez-Gaucherand; M.C. Fu; S.I. Marcus

doi:10.1109/tsm.2004.831948

Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2004.831948 ◽

2004 ◽

Vol 17 (3) ◽

pp. 345-356 ◽

Cited By ~ 81

Author(s):

X. Yao ◽

E. Fernandez-Gaucherand ◽

M.C. Fu ◽

S.I. Marcus

Keyword(s):

Preventive Maintenance ◽

Semiconductor Manufacturing ◽

Maintenance Scheduling

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Optimization of Preventive Maintenance scheduling in semiconductor manufacturing models using a simulation-based Approximate Dynamic Programming approach

49th IEEE Conference on Decision and Control (CDC) ◽

10.1109/cdc.2010.5717523 ◽

2010 ◽

Cited By ~ 5

Author(s):

Jose A. Ramirez-Hernandez ◽

Emmanuel Fernandez

Keyword(s):

Dynamic Programming ◽

Preventive Maintenance ◽

Semiconductor Manufacturing ◽

Approximate Dynamic Programming ◽

Maintenance Scheduling ◽

Programming Approach ◽

Dynamic Programming Approach ◽

Simulation Based

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Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing Systems: Software Tool and Simulation Case Studies

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2010.2051731 ◽

2010 ◽

Vol 23 (3) ◽

pp. 477-489 ◽

Cited By ~ 16

Author(s):

J A Ramírez-Hernández ◽

J Crabtree ◽

Xiaodong Yao ◽

E Fernandez ◽

M C Fu ◽

...

Keyword(s):

Case Studies ◽

Preventive Maintenance ◽

Semiconductor Manufacturing ◽

Manufacturing Systems ◽

Software Tool ◽

Maintenance Scheduling ◽

Systems Software

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Optimization of preventive maintenance scheduling for semiconductor manufacturing systems: models and implementation

Proceedings of the 2001 IEEE International Conference on Control Applications (CCA'01) (Cat. No.01CH37204) ◽

10.1109/cca.2001.973899 ◽

2002 ◽

Cited By ~ 2

Author(s):

Xiaodong Yao ◽

M. Fu ◽

S.I. Marcus ◽

E. Fernandez-Gaucherand

Keyword(s):

Preventive Maintenance ◽

Semiconductor Manufacturing ◽

Manufacturing Systems ◽

Maintenance Scheduling ◽

Systems Models

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Integrated Production Planning and Preventive Maintenance Scheduling for Synchronized Parallel Machines

Reliability Engineering & System Safety ◽

10.1016/j.ress.2021.107869 ◽

2021 ◽

pp. 107869

Author(s):

Yu Liu ◽

Qin Zhang ◽

Zhiyuan Ouyang ◽

Hong-Zhong Huang

Keyword(s):

Production Planning ◽

Preventive Maintenance ◽

Parallel Machines ◽

Maintenance Scheduling ◽

Integrated Production ◽

Integrated Production Planning

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Optimization of high-level preventive maintenance scheduling for high-speed trains

Reliability Engineering & System Safety ◽

10.1016/j.ress.2018.11.028 ◽

2019 ◽

Vol 183 ◽

pp. 261-275 ◽

Cited By ~ 13

Author(s):

Boliang Lin ◽

Jianping Wu ◽

Ruixi Lin ◽

Jiaxi Wang ◽

Hui Wang ◽

...

Keyword(s):

Preventive Maintenance ◽

High Speed ◽

Maintenance Scheduling ◽

High Speed Trains ◽

High Level

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A novel approach to Data Driven Preventive Maintenance Scheduling of medical instruments

2010 International Conference on Systems in Medicine and Biology ◽

10.1109/icsmb.2010.5735370 ◽

2010 ◽

Cited By ~ 1

Author(s):

Justin Joseph ◽

S. Madhukumar

Keyword(s):

Preventive Maintenance ◽

Maintenance Scheduling ◽

Data Driven ◽

Novel Approach ◽

Medical Instruments

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Opportunistic preventive maintenance scheduling for multi-unit reusable rocket engine system based on the variable maintenance task window method

Aerospace Science and Technology ◽

10.1016/j.ast.2022.107346 ◽

2022 ◽

pp. 107346

Author(s):

Ping Jin ◽

Zhiwei Chen ◽

Ruizhi Li ◽

Yi Li ◽

Guobiao Cai

Keyword(s):

Preventive Maintenance ◽

Rocket Engine ◽

Maintenance Scheduling ◽

Window Method ◽

Engine System

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A multistage stochastic programming approach for preventive maintenance scheduling of GENCOs with natural gas contract

European Journal of Operational Research ◽

10.1016/j.ejor.2020.03.036 ◽

2020 ◽

Vol 287 (3) ◽

pp. 1036-1051 ◽

Cited By ~ 2

Author(s):

Zhouchun Huang ◽

Qipeng Phil Zheng

Keyword(s):

Natural Gas ◽

Stochastic Programming ◽

Preventive Maintenance ◽

Maintenance Scheduling ◽

Programming Approach ◽

Multistage Stochastic Programming

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Preventive maintenance scheduling of power generating units

Annals of Operations Research ◽

10.1007/bf02023074 ◽

1993 ◽

Vol 41 (3) ◽

pp. 185-206 ◽

Cited By ~ 10

Author(s):

Michèle Charest ◽

Jacques A. Ferland

Keyword(s):

Preventive Maintenance ◽

Maintenance Scheduling

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Optimization of preventive maintenance scheduling in processing plants

Computer Aided Chemical Engineering - 18th European Symposium on Computer Aided Process Engineering ◽

10.1016/s1570-7946(08)80058-2 ◽

2008 ◽

pp. 319-324 ◽

Cited By ~ 8

Author(s):

DuyQuang Nguyen ◽

Miguel Bagajewicz

Keyword(s):

Preventive Maintenance ◽

Maintenance Scheduling ◽

Processing Plants

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