Particle adhesion and removal mechanisms in post-CMP cleaning processes

A.A. Busnaina;  Hong Lin; N. Moumen;  Jiang-wei Feng; J. Taylor

doi:10.1109/tsm.2002.804872

Particle adhesion and removal mechanisms in post-CMP cleaning processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2002.804872 ◽

2002 ◽

Vol 15 (4) ◽

pp. 374-382 ◽

Cited By ~ 66

Author(s):

A.A. Busnaina ◽

Hong Lin ◽

N. Moumen ◽

Jiang-wei Feng ◽

J. Taylor

Keyword(s):

Particle Adhesion ◽

Removal Mechanisms

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Particle adhesion and removal mechanisms during brush scrubber cleaning

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1815319 ◽

2004 ◽

Vol 22 (6) ◽

pp. 2844 ◽

Cited By ~ 32

Author(s):

K. Xu ◽

R. Vos ◽

G. Vereecke ◽

G. Doumen ◽

W. Fyen ◽

...

Keyword(s):

Particle Adhesion ◽

Removal Mechanisms

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On particle adhesion and removal mechanisms in turbulent flows

Journal of Adhesion Science and Technology ◽

10.1163/156856194x00799 ◽

1994 ◽

Vol 8 (7) ◽

pp. 763-785 ◽

Cited By ~ 142

Author(s):

Mehdi Soltani ◽

Goodarz Ahmadi

Keyword(s):

Turbulent Flows ◽

Particle Adhesion ◽

Removal Mechanisms

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Yield enhancement through understanding the particle adhesion and removal mechanisms in CMP and post-CMP cleaning processes

2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072) ◽

10.1109/asmc.2000.902552 ◽

2002 ◽

Cited By ~ 3

Author(s):

J. Taylor ◽

A. Busnaina

Keyword(s):

Yield Enhancement ◽

Particle Adhesion ◽

Removal Mechanisms

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Particle adhesion to surfaces under vacuum

10.2514/6.1988-2725 ◽

1988 ◽

Author(s):

JACK BARENGOLTZ

Keyword(s):

Particle Adhesion

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Removal Mechanisms for Calf Barn Aerosol Particles

Transactions of the ASAE ◽

10.13031/2013.30633 ◽

1987 ◽

Vol 30 (6) ◽

pp. 1758-1763 ◽

Cited By ~ 1

Author(s):

G. L. Van Wicklen ◽

L. D. Albright

Keyword(s):

Aerosol Particles ◽

Removal Mechanisms

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Pathogen removal mechanisms in anoxic wastewater stabilization ponds

Water Science & Technology ◽

10.1016/0273-1223(96)00348-4 ◽

1996 ◽

Vol 33 (7) ◽

Cited By ~ 7

Keyword(s):

Pathogen Removal ◽

Stabilization Ponds ◽

Removal Mechanisms ◽

Wastewater Stabilization Ponds

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Numerical model for primary and secondary air pollutants emitted from an area and point source in an urban area with chemical reaction and removal mechanisms

Materials Today Proceedings ◽

10.1016/j.matpr.2020.08.706 ◽

2020 ◽

Author(s):

C. Bhaskar ◽

K. Lakshminarayanachari

Keyword(s):

Numerical Model ◽

Point Source ◽

Urban Area ◽

Chemical Reaction ◽

Air Pollutants ◽

Removal Mechanisms ◽

Secondary Air Pollutants ◽

Secondary Air

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Cadmium removal mechanisms from aqueous solution by using recycled lignocelluloses

Alexandria Engineering Journal ◽

10.1016/j.aej.2021.06.036 ◽

2021 ◽

Author(s):

Birol Kayranli

Keyword(s):

Aqueous Solution ◽

Cadmium Removal ◽

Removal Mechanisms

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Preparation of a novel non-burning polyaluminum chloride residue(PACR) compound filler and its phosphate removal mechanisms

Environmental Science and Pollution Research ◽

10.1007/s11356-021-15724-2 ◽

2021 ◽

Author(s):

Qiang Li ◽

Jingshen Zhang ◽

Jingqing Gao ◽

Zhenzhen Huang ◽

Haoxin Zhou ◽

...

Keyword(s):

Phosphate Removal ◽

Polyaluminum Chloride ◽

Removal Mechanisms

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Material removal mechanisms and characteristics of potassium dihydrogen phosphate crystals under nanoscratching

Advances in Manufacturing ◽

10.1007/s40436-021-00356-z ◽

2021 ◽

Author(s):

Ning Hou ◽

Yong Zhang ◽

Liang-Chi Zhang ◽

Ming-Hai Wang

Keyword(s):

Material Removal ◽

Potassium Dihydrogen Phosphate ◽

Dihydrogen Phosphate ◽

Potassium Dihydrogen ◽

Material Removal Mechanisms ◽

Removal Mechanisms

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