Using a Walking Piezo Actuator to Drive and Control a High-Precision Stage
2009 ◽
Vol 14
(1)
◽
pp. 21-31
◽
2020 ◽
Vol 140
(4)
◽
pp. 272-280
Keyword(s):
2012 ◽
Vol 06
◽
pp. 172-177
Keyword(s):
Keyword(s):