Incidence Angle Effect of Energetic Carbon Ions on Deposition Rate, Topography, and Structure of Ultrathin Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc

2012 ◽  
Vol 48 (7) ◽  
pp. 2220-2227 ◽  
Author(s):  
N. Wang ◽  
K. Komvopoulos
Keyword(s):  
Deposition Rate ◽  
Amorphous Carbon ◽  
Incidence Angle ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Carbon Ions ◽  
Amorphous Carbon Films ◽  
Angle Effect ◽  
Filtered Cathodic Vacuum Arc

Etching behaviour of pure and metal containing amorphous carbon films prepared using filtered cathodic vacuum arc technique

2002 ◽  
Vol 195 (1-4) ◽  
pp. 107-116 ◽  
Author(s):  
L.J Yu ◽  
D Sheeja ◽  
B.K Tay ◽  
Daniel H.C Chua ◽  
W.I Milne ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Filtered Cathodic Vacuum Arc

Characterization of Boron- and Phosphorous-Incorporated Tetrahedral Amorphous Carbon Films Deposited by the Filtered Cathodic Vacuum Arc Process

2009 ◽  
Vol 48 (6) ◽  
pp. 065501 ◽  
Author(s):  
Omvir Singh Panwar ◽  
Mohd. Alim Khan ◽  
Mahesh Kumar ◽  
Sonnada Math Shivaprasad ◽  
Bukinakere Subbakrihniah Satyanarayana ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon ◽  
Filtered Cathodic Vacuum Arc
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