Electrical and Optical Performance Investigation of Si-Based Ultrashallow-Junction $\hbox{p}^{+}\hbox{-}\hbox{n}$ VUV/EUV Photodiodes
2012 ◽
Vol 61
(5)
◽
pp. 1268-1277
◽
2013 ◽
Vol E96.B
(9)
◽
pp. 2206-2212
Keyword(s):
Keyword(s):
2001 ◽
Vol 32
(1)
◽
pp. 842
◽