High-$Q$ Inductors on Locally Semi-Insulated Si Substrate by Helium-3 Bombardment for RF CMOS Integrated Circuits
2015 ◽
Vol 62
(4)
◽
pp. 1269-1275
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Ning Li
◽
Kenichi Okada
◽
Takeshi Inoue
◽
Takuichi Hirano
◽
Qinghong Bu
◽
...
Ning Li
◽
Kenichi Okada
◽
Takeshi Inoue
◽
Takuichi Hirano
◽
Qinghong Bu
◽
...
C. Soens
◽
C. Crunelle
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P. Wambacq
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G. Vandersteen
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S. Donnay
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...
N. Fong
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J.-O. Plouchart
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N. Zamdmer
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Jonghae Kim
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K. Jenkins
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...