High-Voltage Isolation Technique Using Fe Ion Implantation for Monolithic Integration of AlGaN/GaN Transistors

2013 ◽  
Vol 60 (2) ◽  
pp. 771-775 ◽  
Author(s):  
Hidekazu Umeda ◽  
Toshiyuki Takizawa ◽  
Yoshiharu Anda ◽  
Tetsuzo Ueda ◽  
Tsuyoshi Tanaka
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Monolithic Integration ◽  
Isolation Technique

Hybrid elevated-temperature, low/high-voltage plasma immersion ion implantation of AISI304 stainless steel

2001 ◽  
Vol 135 (2-3) ◽  
pp. 178-183 ◽  
Author(s):  
X.B. Tian ◽  
Y.X. Leng ◽  
T.K. Kwok ◽  
L.P. Wang ◽  
B.Y. Tang ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Elevated Temperature ◽  
Ion Implantation ◽  
High Voltage ◽  
Plasma Immersion Ion Implantation

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010 ◽  
Vol 81 (12) ◽  
pp. 124703 ◽  
Author(s):  
M. C. Salvadori ◽  
F. S. Teixeira ◽  
W. W. R. Araújo ◽  
L. G. Sgubin ◽  
N. S. Sochugov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Power Supply ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power ◽  
Pulse Power Supply ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

Low-Noise GaN p-i-n Avalanche Photodiodes for Ultraviolet Applications Using an Ion-Implantation Isolation Technique

2020 ◽  
Author(s):  
Minkyu Cho ◽  
Hoon Jeong ◽  
Chuan-Wei Tsou ◽  
Marzieh Bakhtiary-Noodeh ◽  
Theeradetch Detchprohm ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Avalanche Photodiodes ◽  
Low Noise ◽  
Isolation Technique
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