Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al $_{\bf 2}$O$_{\bf 3}$ and Parylene C for Biomedical Implantable Devices
2013 ◽
Vol 60
(10)
◽
pp. 2943-2951
◽
Keyword(s):
2017 ◽
Vol 35
(1)
◽
pp. 01B127
◽
Keyword(s):
Keyword(s):
Keyword(s):