Optimized CMOS-SOI process for high performance RF switches

2012 ◽  
Author(s):  
A. B. Joshi ◽  
S. Lee ◽  
Y. Y. Chen ◽  
T. Y. Lee
Keyword(s):  
High Performance ◽  
Rf Switches

Current Crowding in High Performance Low-Loss HFET RF Switches

2008 ◽  
Vol 29 (1) ◽  
pp. 15-17 ◽  
Author(s):  
Z. Yang ◽  
J. Wang ◽  
X. Hu ◽  
J. Yang ◽  
G. Simin ◽  
...  
Keyword(s):  
High Performance ◽  
Current Crowding ◽  
Low Loss ◽  
Rf Switches

scholarly journals Computational analysis of novel high performance optically controlled RF switches for reconfigurable millimeterwave-to-THz circuits

OSA Continuum ◽  
2021 ◽  
Vol 4 (10) ◽  
pp. 2642
Author(s):  
Yu Shi ◽  
Yijing Deng ◽  
Jun Ren ◽  
Peizhao Li ◽  
Patrick Fay ◽  
...  
Keyword(s):  
High Performance ◽  
Computational Analysis ◽  
Rf Switches

Glass Packaging for RF MEMS

2018 ◽  
Vol 2018 (1) ◽  
pp. 000680-000684 ◽  
Author(s):  
Rajiv Parmar ◽  
Jay Zhang ◽  
Chris Keimel
Keyword(s):  
High Performance ◽  
Rf Mems ◽  
Coefficient Of Thermal Expansion ◽  
Building Blocks ◽  
High Resistivity ◽  
Battery Life ◽  
Rf Switches ◽  
Mems Switches ◽  
Low Dielectric ◽  
Mems Technology

Abstract In recent years, advancements in High Performance Computing and Photonics are driving towards high density semiconductor packaging requirements that are creating a need for the adoption of novel material sets. Glass has many attractive properties that help address product level challenges such as low height, and smaller, packages. Glass also offers high resistivity, low dielectric constant, adjustable coefficient of thermal expansion (CTE), and low electrical loss. These properties can also be leveraged for RF and Mobile applications where battery life is paramount. To further utilize glass' material properties for interposers and compact substrates, it is necessary to form precision or Through Glass Vias (TGVs). Mobile cellular networks are rapidly evolving towards fifth generation (5G), which is set to exploit a wider spectrum of frequencies that range into millimeter wave (mmWave). RF MEMS technology is a promising approach to addressing RF Switches, which are key building blocks into Radio Frequency Front Ends (RFFE). In this paper, we show the usage of glass based packaging solutions and TGVs to offer low form factor, broadband RF MEMS switches.

Nonlinear Observability Analysis of Micro-machined Electrostatic Actuators Using Self-Sensing

2016 ◽  
Vol 2016 (DPC) ◽  
pp. 001632-001662
Author(s):  
Chong Li ◽  
Robert N. Dean ◽  
George T. Flowers
Keyword(s):  
Parallel Plate ◽  
High Performance ◽  
Practical Method ◽  
Excitation Power ◽  
Electrostatic Actuators ◽  
Rf Switches ◽  
Observability Analysis ◽  
System States ◽  
Series Resistor ◽  
Nonlinear Observability

Micro-machined electrostatic actuators (MEA) like parallel plate actuators (PPAs) and comb drive actuators (GCAs) are commonly used in many applications, including gyroscopes, resonators and RF switches. The detection of an actuators' mechanical motion is desired when they are combined with feedback control techniques, especially when the application requires high performance or is affected by disturbances. The motion can be detected by a variety of sensing techniques, including capacitive, piezoresistive and optical. Electrostatic parallel plate actuators can be modeled as a type of variable capacitor, which depends on the gap between a fixed electrode and a movable electrode. Thus, the displacement of the actuator can be obtained by measuring the capacitance. However, this practical method often requires high frequency excitation signal sources or additional sensing structures. The excitation power source not only affects the performance in the actuator's steady state, but it may also generate harmonics that distort the measurement signals due to the nonlinear characteristics of the actuator. In addition, the information about velocity may not be obtained without specific sensing structures. The additional structures occupy more space in each die, which could increase the cost and size, or decrease the performance. In this study, an estimator with a series resistor configuration is proposed. The estimator can estimate the displacement and velocity by measuring the voltage of the power supply and the voltage across the actuator itself. To evaluate the feasibility, a nonlinear observability analysis is applied. The analysis shows the observability index among different system states. A simulation study verified the proposed theories.

A High Performance Energy Analyzer for Use in Electron Scanning Microscopy

1969 ◽  
Vol 27 ◽  
pp. 14-15
Author(s):  
A. V. Crewe ◽  
M. Isaacson ◽  
D. Johnson
Keyword(s):  
High Performance ◽  
Vertical Plane ◽  
Median Plane ◽  
Electron Gun ◽  
Uniform Field ◽  
Loss Mechanism ◽  
Electron Scanning Microscopy ◽  
Sector Type ◽  
Double Focusing ◽  
Electron Energy Loss

A double focusing magnetic spectrometer has been constructed for use with a field emission electron gun scanning microscope in order to study the electron energy loss mechanism in thin specimens. It is of the uniform field sector type with curved pole pieces. The shape of the pole pieces is determined by requiring that all particles be focused to a point at the image slit (point 1). The resultant shape gives perfect focusing in the median plane (Fig. 1) and first order focusing in the vertical plane (Fig. 2).

Vacuum System to Minimize the Specimen Contamination of High-Performance EM

1977 ◽  
Vol 35 ◽  
pp. 68-69
Author(s):  
N. Yoshimura ◽  
K. Shirota ◽  
T. Etoh
Keyword(s):  
Electron Microscope ◽  
High Speed ◽  
High Performance ◽  
High Vacuum ◽  
Vacuum System ◽  
Pump System ◽  
Pumping System ◽  
Diffusion Pump ◽  
Almost All ◽  
Cascade Type

One of the most important requirements for a high-performance EM, especially an analytical EM using a fine beam probe, is to prevent specimen contamination by providing a clean high vacuum in the vicinity of the specimen. However, in almost all commercial EMs, the pressure in the vicinity of the specimen under observation is usually more than ten times higher than the pressure measured at the punping line. The EM column inevitably requires the use of greased Viton O-rings for fine movement, and specimens and films need to be exchanged frequently and several attachments may also be exchanged. For these reasons, a high speed pumping system, as well as a clean vacuum system, is now required. A newly developed electron microscope, the JEM-100CX features clean high vacuum in the vicinity of the specimen, realized by the use of a CASCADE type diffusion pump system which has been essentially improved over its predeces- sorD employed on the JEM-100C.

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