Design of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems

2006 ◽  
Author(s):  
Aurelio Soma ◽  
Alberto Ballestra
Keyword(s):  
Reduced Order Modeling ◽  
Squeeze Film ◽  
Reduced Order ◽  
Squeeze Film Damping

Reduced Order Modeling of the Squeeze Film Damping in MEMS

2006 ◽  
Author(s):  
Aurelio Soma` ◽  
Guido Spinola ◽  
Alberto Ballestra ◽  
Alessandro Pennetta
Keyword(s):  
Finite Element ◽  
Coupled Model ◽  
Reduced Order Modeling ◽  
Squeeze Film ◽  
Design Parameters ◽  
Reduced Order ◽  
Equivalent Damping ◽  
Squeeze Film Damping ◽  
Numerical Finite Element ◽  
Micro Systems

In this work the effect of the Squeeze Film Damping on MEMS structures is studied. When a device is being designed, it is very important to preview with good approximation its dynamic behavior. However, as the simulation of the micro-systems involves different physical domains, the analysis with numerical methods can turn out remarkably onerous. Moreover the Reduced Order Modeling is preferable when, due to technological reasons, the membrane is built with several holes and the geometrical FEM coupled model will be computational heavy. Therefore Reduced Order Models allow to integrate in a total mathematical model the main parameters, obtained by the numerical analysis, considering the behavior of the structure analyzed in different physical domains. In the present work the non-linear coefficients of equivalent damping and stiffness by finite element models are investigated to be exported in a reduced order model. By means of numerical finite element calculation is studied the sensitivity analysis related to design parameters such as dimension of the plate and the presence, or lack, of holes.

The Effect of Squeeze-Film Damping on Suppressing the Shock Response of MEMS

2009 ◽  
Author(s):  
Hadi Yagubizade ◽  
Mohammad I. Younis ◽  
Ghader Rezazadeh
Keyword(s):  
Reynolds Equation ◽  
Element Model ◽  
Squeeze Film ◽  
Beam Equation ◽  
Mechanical Shock ◽  
Shock Loads ◽  
Reduced Order ◽  
Squeeze Film Damping ◽  
Nonlinear Finite Element Model ◽  
Euler Bernoulli Beam

This paper presents an investigation into the response of a clamped-clamped microbeam to mechanical shock under the effect of squeeze-film damping (SQFD). In this work, we solve simultaneously the nonlinear Reynolds equation, to model squeeze-film damping, coupled with a nonlinear Euler-Bernoulli beam equation. A Galerkin-based reduced-order model and a finite-deference method (FDM) are utilized for the solid domain and for the fluid domain, respectively. Several results showing the effect of gas pressure on the response of the microbeams are shown. Comparison with the results of a multi-physics nonlinear finite-element model is presented. The results indicate that squeeze-film damping has more significant effect on the response of microstructures in the dynamic shock loads compared to the quasi-static shock loads.

The Effect of Squeeze-Film Damping on the Shock Response of Clamped-Clamped Microbeams

2011 ◽  
Vol 134 (1) ◽  
Author(s):  
Hadi Yagubizade ◽  
Mohammad I. Younis
Keyword(s):  
Element Model ◽  
Squeeze Film ◽  
Beam Equation ◽  
Mechanical Shock ◽  
Computationally Efficient ◽  
Reduced Order ◽  
Squeeze Film Damping ◽  
Nonlinear Finite Element Model ◽  
Euler Bernoulli Beam ◽  
Fully Coupled

This paper presents an investigation into the nonlinear effect of squeeze-film damping on the response of a clamped–clamped microbeam to mechanical shock. In this work, we solve simultaneously the nonlinear Reynolds equation, to model squeeze-film damping, coupled with a nonlinear Euler–Bernoulli beam equation. A Galerkin-based reduced-order model and a finite-difference method are utilized for the solid domain and fluid domain, respectively. Several results demonstrating the effect of gas pressure on the response of the microbeams are shown. Comparison with the results of a fully coupled multiphysics nonlinear finite-element model is presented. The results indicate that, for devices operating in air, squeeze-film damping can be used effectively to minimize the displacements of released microstructures during shock and impact. The results also indicate that squeeze-film damping has more significant effect on the response of microstructures in the dynamic shock regime compared to the quasi-static shock regime. A computationally efficient approach is proposed to model the fluidic-structural problem more efficiently based on a nonlinear analytical expression of the squeeze-film damping.

Lattice Boltzmann Flow Simulations With Applications of Reduced Order Modeling Techniques.

2014 ◽  
Author(s):  
Donald L. Brown ◽  
Jun Li ◽  
Victor M. Calo ◽  
Mehdi Ghommem ◽  
Yalchin Efendiev
Keyword(s):  
Lattice Boltzmann ◽  
Reduced Order Modeling ◽  
Reduced Order ◽  
Flow Simulations ◽  
Modeling Techniques
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