Impurity doping effects on grown-in defects in silicon
2016 ◽
Vol 380
(48)
◽
pp. 4062-4069
◽
2003 ◽
Vol 42
(11)
◽
pp. 1297-1300
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2005 ◽
Vol 41
(11)
◽
pp. 4344-4346
◽
2002 ◽
Vol 91-92
◽
pp. 178-181
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