A wafer surface temperature measurement method utilizing the reordering phenomena of amorphous silicon

2006 ◽  
Author(s):  
Kazuaki Yamazawa ◽  
Masaru Arai ◽  
Satoshi Shibata ◽  
Yuko Nambu ◽  
Hisaki Izutani ◽  
...  
Keyword(s):  
Surface Temperature ◽  
Temperature Measurement ◽  
Amorphous Silicon ◽  
Measurement Method ◽  
Wafer Surface ◽  
Surface Temperature Measurement

In situSi Wafer Surface Temperature Measurement during Flash Lamp Annealing

2010 ◽  
Vol 49 (4) ◽  
pp. 04DA20 ◽  
Author(s):  
Yoshiro Yamada ◽  
Takayuki Aoyama ◽  
Hajime Chino ◽  
Kensuke Hiraka ◽  
Juntaro Ishii ◽  
...  
Keyword(s):  
Surface Temperature ◽  
Temperature Measurement ◽  
Flash Lamp ◽  
Wafer Surface ◽  
Surface Temperature Measurement
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