Minimized blurring in stencil lithography using a compliant membrane

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2009.5285768 ◽

2009 ◽

Cited By ~ 1

Author(s):

K. Sidler ◽

G. Villanueva ◽

O. Vazquez-Mena ◽

J. Brugger

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