Development of fabric force sensor for detecting normal and lateral force by applying umbonal fiber

2009 ◽  
Author(s):  
G. Kita ◽  
Y. Suzuki ◽  
M. Shikida ◽  
K. Sato
Keyword(s):  
Force Sensor ◽  
Lateral Force

scholarly journals Ultrasensitive nano-optomechanical force sensor operated at dilution temperatures

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Francesco Fogliano ◽  
Benjamin Besga ◽  
Antoine Reigue ◽  
Laure Mercier de Lépinay ◽  
Philip Heringlake ◽  
...  
Keyword(s):  
Thermal Conduction ◽  
Photon Counting ◽  
Force Sensor ◽  
Lateral Force ◽  
Oscillation Period ◽  
The Road ◽  
Field Gradients ◽  
Concomitant Reduction ◽  
Generic Strategy ◽  
Conduction Properties

AbstractCooling down nanomechanical force probes is a generic strategy to enhance their sensitivities through the concomitant reduction of their thermal noise and mechanical damping rates. However, heat conduction becomes less efficient at low temperatures, which renders difficult to ensure and verify their proper thermalization. Here we implement optomechanical readout techniques operating in the photon counting regime to probe the dynamics of suspended silicon carbide nanowires in a dilution refrigerator. Readout of their vibrations is realized with sub-picowatt optical powers, in a situation where less than one photon is collected per oscillation period. We demonstrate their thermalization down to 32 ± 2 mK, reaching very large sensitivities for scanning probe force sensors, 40 zN Hz−1/2, with a sensitivity to lateral force field gradients in the fN m−1 range. This opens the road toward explorations of the mechanical and thermal conduction properties of nanoresonators at minimal excitation level, and to nanomechanical vectorial imaging of faint forces at dilution temperatures.

A Temperature-independent Lateral Force Sensor using a Pair of FBGs

2007 ◽  
Author(s):  
J.Z. Hao ◽  
L.C. Ong ◽  
Y.D. Gong ◽  
Z.H. Cai ◽  
J.H. Ng ◽  
...  
Keyword(s):  
Force Sensor ◽  
Lateral Force

scholarly journals Temperature- and phase-independent lateral force sensor based on a core-offset multi-mode fiber interferometer

2008 ◽  
Vol 16 (23) ◽  
pp. 19291 ◽  
Author(s):  
Bo Dong ◽  
Da-Peng Zhou ◽  
Li Wei ◽  
Wing-Ki Liu ◽  
John W. Y. Lit
Keyword(s):  
Force Sensor ◽  
Lateral Force ◽  
Multi Mode

Calibration of lateral force measurements in atomic force microscopy with a piezoresistive force sensor

2008 ◽  
Vol 79 (3) ◽  
pp. 033708 ◽  
Author(s):  
Hui Xie ◽  
Julien Vitard ◽  
Sinan Haliyo ◽  
Stéphane Régnier ◽  
Mehdi Boukallel
Keyword(s):  
Atomic Force Microscopy ◽  
Force Sensor ◽  
Lateral Force ◽  
Force Measurements ◽  
Force Microscopy ◽  
Atomic Force

Design, Fabrication, and Characterization of Piezoresistive MEMS Shear Stress Sensors

2005 ◽  
Author(s):  
A. Alvin Barlian ◽  
Sung-Jin Park ◽  
Vikram Mukundan ◽  
Beth L. Pruitt
Keyword(s):  
Shear Stress ◽  
Force Sensor ◽  
Lateral Force ◽  
Stress Sensors ◽  
Silicon Cantilever ◽  
Shear Stress Sensors ◽  
Out Of Plane ◽  
Order Of Magnitude ◽  
Fabrication And Characterization

This paper presents the design, fabrication, and characterization of unique piezoresistive microfabricated shear stress sensors for direct measurements of shear stress underwater. The uniqueness of this design is in its transduction scheme which uses sidewall-implanted piezoresistors to measure lateral force (and shear stress), along with traditional top-implanted piezoresistors to detect normal forces. Aside from the oblique-implant technique, the fabrication process also includes hydrogen anneal step to smooth scalloped silicon sidewalls due to Deep Reactive Ion Etch process, which was shown to reduce 1/f noise level by almost an order of magnitude for the sidewall-implanted piezoresistors. Lateral sensitivity characterization of the sensors was done using a microfabricated silicon cantilever force sensor, while out-of-plane characterization was done using Laser Doppler Vibrometry technique. In-plane sensitivity and out-of-plane crosstalk were characterized, as well as hysteresis and repeatability of the measurements. The sensors are designed to be used underwater for various applications.

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