Robust comb design for inductive displacement sensor with large travel and high sensitivity

2009 ◽  
Author(s):  
S. Schonhardt ◽  
J.G. Korvink ◽  
U. Wallrabe
Keyword(s):  
High Sensitivity ◽  
Displacement Sensor

scholarly journals Multifunctional Ultrahigh Sensitive Microwave Planar Sensor to Monitor Mechanical Motion: Rotation, Displacement, and Stretch

Sensors ◽  
2020 ◽  
Vol 20 (4) ◽  
pp. 1184 ◽  
Author(s):  
Mohammad Abdolrazzaghi ◽  
Mojgan Daneshmand
Keyword(s):  
Dynamic Range ◽  
Full Range ◽  
Electric Circuit ◽  
High Sensitivity ◽  
Parameter Extraction ◽  
Split Ring Resonator ◽  
Displacement Sensor ◽  
Rotation Sensor ◽  
Mechanical Deformations ◽  
Electric Circuit Model

This paper presents a novel planar multifunctional sensor that is used to monitor physical variations in the environment regarding distance, angle, and stretch. A double split-ring resonator is designed at 5.2 GHz as the core operating sensor. Another identical resonator is placed on top of the first one. The stacked configuration is theoretically analyzed using an electric circuit model with a detailed parameter extraction discussion. This design is first employed as a displacement sensor, and a compelling high sensitivity of 500 MHz/mm is observed for a wide dynamic range of 0-5 mm. Then, in another configuration, the stacked design is used as a rotation sensor that results in a high sensitivity of 4.5 MHz/ ° for the full range of 0-180 ° . In addition, the stacked resonator is utilized as a strain detector, and a 0–30% stretch is emulated with a linear sensitivity of 12 MHz/%. Measurements are well in congruence with simulated results, which proves the accurate functionality of the sensor in tracking mechanical deformations, all in a single compact contraption.

scholarly journals Micro-displacement sensor based on high sensitivity photonic crystal

2014 ◽  
Vol 4 (3) ◽  
pp. 220-224 ◽  
Author(s):  
Saeed Olyaee ◽  
Morteza Azizi
Keyword(s):  
Photonic Crystal ◽  
High Sensitivity ◽  
Displacement Sensor

High sensitivity waveguide micro-displacement sensor based on intermodal interference

2017 ◽  
Vol 19 (11) ◽  
pp. 115804 ◽  
Author(s):  
Lanting Ji ◽  
Guobing He ◽  
Yang Gao ◽  
Yan Xu ◽  
Honglei Liang ◽  
...  
Keyword(s):  
High Sensitivity ◽  
Displacement Sensor

Temperature Effect on the Sensitivity of a Highly Sensitive Micro-Machined Displacement Sensor

2012 ◽  
Vol 622-623 ◽  
pp. 1396-1400
Author(s):  
Tania Mukherjee ◽  
Tarun K. Bhattacharyya
Keyword(s):  
Electric Field ◽  
Temperature Effect ◽  
Field Emission ◽  
Applied Electric Field ◽  
Tunneling Current ◽  
High Sensitivity ◽  
Emission Current ◽  
Displacement Sensor ◽  
Field Emission Current ◽  
Displacement Sensitivity

In this paper, a comparative study of temperature effect which introduces a thermionic current under a high applied electric field, on three different modes of field emission current, such as Tunneling current, Fowler-Nordheim current and Field emission current in between these two regions has been done. Moreover, an idea of micromechanical displacement sensor with high sensitivity, operating in Fowler-Nordheim current mode, has been proposed. The displacement sensitivity of proposed sensor in Fowler-Nordheim current domain is about 10-9 m/A. The displacement sensitivity has been shifted from its expected value due to thermal effect (at 700K temperature) at about 1010V/m applied electric field across tip gap.

scholarly journals Simulation and Optimization of SNAP-Taper Coupling System in Displacement Sensing

Sensors ◽  
2021 ◽  
Vol 21 (9) ◽  
pp. 2947
Author(s):  
Jian Chen ◽  
Yongchao Dong ◽  
Han Wang ◽  
Penghui Sun ◽  
Xueliang Zeng
Keyword(s):  
High Sensitivity ◽  
Resonance Wavelength ◽  
Displacement Sensor ◽  
Sensitivity Threshold ◽  
Simulation And Optimization ◽  
Sensing Applications ◽  
Coupling System ◽  
Surface Plot ◽  
Wide Range ◽  
Coupling Parameters

Sensing applications based on whispering gallery mode (WGM) microcavities have attracted extensive attention recently, especially in displacement sensing applications. However, the traditional displacement sensing scheme based on shift in a single resonance wavelength, has a lot of drawbacks. Herein, a novel displacement sensing scheme based on the surface nanoscale axial photonics (SNAP) is proposed to achieve a wide range and high-resolution displacement sensor through analyzing the transmittance of multiple axial modes. By analyzing the surface plot of the resonance spectrum with different coupling positions, the ideal coupling parameters and ERV for displacement sensing are obtained. In the following, displacement sensing with high sensitivity and a wide range is theoretically realized through adjusting the sensitivity threshold and the number of modes. Finally, we present our views on the current challenges and the future development of the displacement sensing based on an SNAP resonator. We believe that a comprehensive understanding on this sensing scheme would significantly contribute to the advancement of the SNAP resonator for a broad range of applications.

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