Vacuum-gapped film bulk acoustic resonator for low-loss mass sensing in liquid

2009 ◽  
Author(s):  
Sai Sumanth Pottigari ◽  
Jae Wan Kwon
Keyword(s):  
Acoustic Resonator ◽  
Low Loss ◽  
Mass Sensing ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications

2007 ◽  
Vol 253 (24) ◽  
pp. 9372-9380 ◽  
Author(s):  
Zhi Yan ◽  
Zhitang Song ◽  
Weili Liu ◽  
Hongxuan Ren ◽  
Ning Gu ◽  
...  
Keyword(s):  
Acoustic Resonator ◽  
Mass Sensing ◽  
Sensing Applications ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk ◽  
Device Properties

Design of a FBAR (Film Bulk Acoustic Resonator) Oscillator at 1.6 GHz

2011 ◽  
Vol 3 (2) ◽  
pp. 91-98 ◽  
Author(s):  
Xu Zhang ◽  
Wencheng Xu ◽  
Junseok Chae
Keyword(s):  
Acoustic Resonator ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator

2007 ◽  
Vol 400 (1-2) ◽  
pp. 38-41 ◽  
Author(s):  
Zhi Yan ◽  
Yi Ming Mi ◽  
Zhi Tang Song ◽  
Wei Li Liu ◽  
Hong Ji ◽  
...  
Keyword(s):  
Acoustic Resonator ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Air-gap type film bulk acoustic resonator using flexible thin substrate

2005 ◽  
Vol 117 (1) ◽  
pp. 62-70 ◽  
Author(s):  
Yu-Ri Kang ◽  
Sung-Chul Kang ◽  
Kyeong-Kap Paek ◽  
Yong-Kook Kim ◽  
Soo-Won Kim ◽  
...  
Keyword(s):  
Acoustic Resonator ◽  
Air Gap ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Silicon Bulk Micromachined High Q Film Bulk Acoustic Resonator Devices with Mo/AlN/Mo Structures

2005 ◽  
Vol 69 (1) ◽  
pp. 323-332 ◽  
Author(s):  
Heechul Lee ◽  
Jaeyeong Park ◽  
Kyunghak Lee ◽  
Youngjoon Ko ◽  
Jonguk Bu
Keyword(s):  
Acoustic Resonator ◽  
High Q ◽  
Silicon Bulk ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Impact of surface periodic grating on film bulk acoustic resonator structures to spurious transverse resonances

2013 ◽  
Vol 113 (14) ◽  
pp. 144507 ◽  
Author(s):  
Jiansong Liu ◽  
Tatsuya Omori ◽  
Changjun Ahn ◽  
Ken-ya Hashimoto
Keyword(s):  
Acoustic Resonator ◽  
Periodic Grating ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk
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