A lateral-axis micromachined tuning fork gyroscope with novel driving and sensing combs

2009 ◽  
Author(s):  
Z. Y. Guo ◽  
Z. C Yang ◽  
L. T. Lin ◽  
Q. C. Zhao ◽  
J. Cui ◽  
...  
Keyword(s):  
Tuning Fork ◽  
Lateral Axis

A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure

2010 ◽  
Vol 19 (3) ◽  
pp. 458-468 ◽  
Author(s):  
Zhong Yang Guo ◽  
Long Tao Lin ◽  
Qian Cheng Zhao ◽  
Zhen Chuan Yang ◽  
Huikai Xie ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Tuning Fork ◽  
Comb Drive ◽  
Lateral Axis

A lateral-axis tuning fork gyroscope with combined sensing capacitors and decoupled comb drive

2010 ◽  
Author(s):  
Z Y Guo ◽  
Q C Zhao ◽  
L T Lin ◽  
J Cui ◽  
Z C Yang ◽  
...  
Keyword(s):  
Tuning Fork ◽  
Comb Drive ◽  
Lateral Axis

A lateral-axis MEMS tuning fork gyroscope with nozzle-optimized squeeze-film sensing element

2013 ◽  
Author(s):  
Minghao Nie ◽  
Dachuan Liu ◽  
Liguo Dong ◽  
Qiancheng Zhao ◽  
Zhenchuan Yang ◽  
...  
Keyword(s):  
Tuning Fork ◽  
Squeeze Film ◽  
Sensing Element ◽  
Lateral Axis

A lateral-axis micromachined tuning fork gyroscope with torsionalZ-sensing and electrostatic force-balanced driving

2009 ◽  
Vol 20 (2) ◽  
pp. 025007 ◽  
Author(s):  
Z Y Guo ◽  
Z C Yang ◽  
Q C Zhao ◽  
L T Lin ◽  
H T Ding ◽  
...  
Keyword(s):  
Tuning Fork ◽  
Electrostatic Force ◽  
Lateral Axis

scholarly journals Development and Comparative Analysis of Electrochemically Etched Tungsten Tips for Quartz Tuning Fork Sensor

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 286
Author(s):  
Ashfaq Ali ◽  
Naveed Ullah ◽  
Asim Ahmad Riaz ◽  
Muhammad Zeeshan Zahir ◽  
Zuhaib Ali Khan ◽  
...  
Keyword(s):  
Tuning Fork ◽  
Mechanical Stability ◽  
Electrochemical Etching ◽  
Research Work ◽  
Cone Angle ◽  
Quartz Tuning Fork ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
High Quality ◽  
Scanning Electron

Quartz Tuning Fork (QTF) based sensors are used for Scanning Probe Microscopes (SPM), in particular for near-field scanning optical microscopy. Highly sharp Tungsten (W) tips with larger cone angles and less tip diameter are critical for SPM instead of platinum and iridium (Pt/Ir) tips due to their high-quality factor, conductivity, mechanical stability, durability and production at low cost. Tungsten is chosen for its ease of electrochemical etching, yielding high-aspect ratio, sharp tips with tens of nanometer end diameters, while using simple etching circuits and basic electrolyte chemistry. Moreover, the resolution of the SPM images is observed to be associated with the cone angle of the SPM tip, therefore Atomic-Resolution Imaging is obtained with greater cone angles. Here, the goal is to chemically etch W to the smallest possible tip apex diameters. Tips with greater cone angles are produced by the custom etching procedures, which have proved superior in producing high quality tips. Though various methods are developed for the electrochemical etching of W wire, with a range of applications from scanning tunneling microscopy (SPM) to electron sources of scanning electron microscopes, but the basic chemical etching methods need to be optimized for reproducibility, controlling cone angle and tip sharpness that causes problems for the end users. In this research work, comprehensive experiments are carried out for the production of tips from 0.4 mm tungsten wire by three different electrochemical etching techniques, that is, Alternating Current (AC) etching, Meniscus etching and Direct Current (DC) etching. Consequently, sharp and high cone angle tips are obtained with required properties where the results of the W etching are analyzed, with optical microscope, and then with field emission scanning electron microscopy (FE-SEM). Similarly, effects of varying applied voltages and concentration of NaOH solution with comparison among the produced tips are investigated by measuring their cone angle and tip diameter. Moreover, oxidation and impurities, that is, removal of contamination and etching parameters are also studied in this research work. A method has been tested to minimize the oxidation on the surface and the tips were characterized with scanning electron microscope (SEM).

Low-volume liquid delivery and nanolithography using a nanopipette combined with a quartz tuning fork-atomic force microscope

Nanoscale ◽  
2012 ◽  
Vol 4 (20) ◽  
pp. 6493 ◽  
Author(s):  
Sangmin An ◽  
Corey Stambaugh ◽  
Gunn Kim ◽  
Manhee Lee ◽  
Yonghee Kim ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Tuning Fork ◽  
Quartz Tuning Fork ◽  
Atomic Force ◽  
Low Volume ◽  
Liquid Delivery
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