On-Chip High Quality Factor CMOS-MEMS Silicon-Fin Resonators
2006 ◽
Vol 16
(4)
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pp. 203-205
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Keyword(s):
2008 ◽
Vol 51
(2)
◽
pp. 497-501
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Keyword(s):
Keyword(s):
2014 ◽
Vol 134
(2)
◽
pp. 26-31
◽
Keyword(s):
2020 ◽
Vol 842
◽
pp. 155709
◽
Keyword(s):