A low impedance VHF micromechanical filter using coupled-array composite resonators

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497525 ◽

2005 ◽

Cited By ~ 9

Author(s):

M.U. Demirci ◽

C.T.-C. Nguyen

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